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Fabrication and characterization of Si3N4-MIS structures on p-type diamond

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https://hal.laas.fr/hal-03445543
Contributor : Josiane Tasselli Connect in order to contact the contributor
Submitted on : Wednesday, November 24, 2021 - 9:05:12 AM
Last modification on : Wednesday, December 1, 2021 - 9:25:29 AM

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2021-07-27-Oral_ICDCM-DIAM21-C...
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  • HAL Id : hal-03445543, version 1

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Josiane Tasselli, Lya Fontaine, Karine Isoird, Emmanuel Scheid, Patrick Austin, et al.. Fabrication and characterization of Si3N4-MIS structures on p-type diamond. 31st International Conference on Diamond and Carbon Materials, Sep 2021, On line, Spain. ⟨hal-03445543⟩

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