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Communication Dans Un Congrès Année : 2016

An embedded 2D imager for microscale flowmetry based on optical feedback interferometry

Résumé

We present a compact and embedded imager based on the Optical Feedback Interferometry (OFI) sensing scheme that gives quantitative information about the velocity in fluids at micro-scale through the Doppler-Fizeau effect. This sensor can reach a spatial imaging resolution up to 5 μm in 2D scanning using a MEMS 2 axis beam-steering mirror. As an illustration of the imager performances, a 500 μm circular channel flow profile is measured. An image (300x50 pixels) of a 100 μm square section channel is successfully obtained thus validating the device.
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Dates et versions

hal-01435994 , version 1 (21-11-2017)

Identifiants

Citer

Raul da Costa Moreira, Adam Quotb, Clément Tronche, Francis Jayat, Antonio Luna Arriaga, et al.. An embedded 2D imager for microscale flowmetry based on optical feedback interferometry. IEEE SENSORS 2016, Oct 2016, Orlando-Florida, United States. pp.1 - 3, ⟨10.1109/ICSENS.2016.7808586⟩. ⟨hal-01435994⟩
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