Impact of sensor metal thickness on microwave spectroscopy sensitivity for individual particles and biological cells analysis

Wenli Chen 1 David Dubuc 1 Katia Grenier 1
1 LAAS-MH2F - Équipe Micro et nanosystèmes HyperFréquences Fluidiques
LAAS - Laboratoire d'analyse et d'architecture des systèmes [Toulouse]
Abstract : This paper focuses on evaluating the impact of metal thickness of a microwave coplanar based sensor dedicated to the microwave dielectric spectroscopy of single particles and individual biological cells. A sensitivity study has therefore been achieved for metal thicknesses comprised between 0.3 and 20 µm. After the validation of electromagnetic simulations with measurements of 10 μm-diameter polystyrene bead, both capacitive and conductive contrasts have been defined for the different metal thickness of the sensor. The maximal sensitivity improvement is therefore achieved for a thickness value similar to the diameter of the particle or cell to measure. Capacitive and conductive contrasts are increased by a factor 2.4 and 1.75 respectively. The study leads consequently to an important design and fabrication rule of such a sensor.
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Conference papers
2016 IEEE Topical Conference on Biomedical Wireless Technologies, Networks, and Sensing Systems (BioWireleSS), Jan 2016, Austin, United States. pp.81 - 83, 2016, 2016 IEEE Topical Conference on Biomedical Wireless Technologies, Networks, and Sensing Systems (BioWireleSS). 〈10.1109/BIOWIRELESS.2016.7445568〉
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Wenli Chen, David Dubuc, Katia Grenier. Impact of sensor metal thickness on microwave spectroscopy sensitivity for individual particles and biological cells analysis. 2016 IEEE Topical Conference on Biomedical Wireless Technologies, Networks, and Sensing Systems (BioWireleSS), Jan 2016, Austin, United States. pp.81 - 83, 2016, 2016 IEEE Topical Conference on Biomedical Wireless Technologies, Networks, and Sensing Systems (BioWireleSS). 〈10.1109/BIOWIRELESS.2016.7445568〉. 〈hal-01463901〉

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