Influences of deposition and crystallization kinetics on the properties of silicon films deposited by low-pressure chemical vapour deposition from silane and disilane

Pierre Temple-Boyer 1 Bernard Rousset 2 Emmanuel Scheid 3
1 LAAS-MICA - Équipe MICrosystèmes d'Analyse
LAAS - Laboratoire d'analyse et d'architecture des systèmes [Toulouse]
2 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique
LAAS - Laboratoire d'analyse et d'architecture des systèmes [Toulouse]
3 LAAS-MPN - Équipe Matériaux et Procédés pour la Nanoélectronique
LAAS - Laboratoire d'analyse et d'architecture des systèmes [Toulouse]
Abstract : The paper deals with the properties of silicon films obtained by low-pressure chemical vapour deposition (LPCVD). Two gaseous sources characterized by different deposition temperatures, i.e. disilane Si2H6 (420 – 520°C) and silane SiH4 (520 – 750°C), were studied in order to understand the influences of the deposition and crystallization kinetics on the silicon films properties. Thus, the deposition of amorphous, semi-crystallized and polycrystalline silicon films was related to the "volume random" and "surface columnar" crystallization phenomena, highlighting a linear relationship between the refractive index and the polysilicon volume fraction and, showing complex residual stress dependency with process conditions. Finally, by introducing the ratio Vd/Vc between the deposition and crystallization rates as a major parameter, different deposition behaviours and related semi-empirical relationships were defined in order to characterize fully the various properties of LPCVD silicon films (microstructure, polysilicon volume fraction, refractive index and residual stress) according to the chosen gaseous source, silane or disilane.
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Thin Solid Films, Elsevier, 2010, 518 (23), pp.6897-6903. 〈10.1016/j.tsf.2010.07.037〉
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Pierre Temple-Boyer, Bernard Rousset, Emmanuel Scheid. Influences of deposition and crystallization kinetics on the properties of silicon films deposited by low-pressure chemical vapour deposition from silane and disilane. Thin Solid Films, Elsevier, 2010, 518 (23), pp.6897-6903. 〈10.1016/j.tsf.2010.07.037〉. 〈hal-01511365v2〉

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