J. M. Dallesasse and N. Holonyak, Oxidation of Al-bearing III-V materials: A review of key progress, Journal of Applied Physics, vol.9, issue.5, p.51101, 2013.
DOI : 10.1063/1.2058213

D. L. Huffaker, D. G. Deppe, K. Kumar, and T. J. Rogers, Native???oxide defined ring contact for low threshold vertical???cavity lasers, Applied Physics Letters, vol.6, issue.1, p.97, 1994.
DOI : 10.1109/68.275408

J. M. Dallesasse and D. G. Deppe, III–V Oxidation: Discoveries and Applications in Vertical-Cavity Surface-Emitting Lasers, Proc. IEEE 101, pp.2234-2242, 2013.
DOI : 10.1109/JPROC.2013.2274931

S. A. Maranowski, A. R. Sugg, E. I. Chen, and N. Holonyak, As quantum well heterostructure laser, Applied Physics Letters, vol.62, issue.12, p.1660, 1993.
DOI : 10.1063/1.109487

K. De-mesel, R. Baets, C. Sys, S. Verstuyft, I. Moerman et al., First demonstration of 980 nm oxide confined laser with integrated spot size converter, Electronics Letters, vol.36, issue.12, p.1028, 2000.
DOI : 10.1049/el:20000781

S. J. Caracci, M. R. Krames, N. Holonyak, C. M. Herzinger, A. C. Crook et al., Native???oxide???defined low???loss AlGaAs???GaAs planar waveguide bends, Applied Physics Letters, vol.25, issue.16, pp.2265-2267, 1993.
DOI : 10.1049/el:19890842

M. R. Krames, E. I. Chen, N. Holonyak, A. C. Crook, T. A. Detemple et al., Deep???oxide planar buried???channel AlGaAs???GaAs quantum well heterostructure waveguides with low bend loss, Applied Physics Letters, vol.57, issue.15, pp.1912-1914, 1995.
DOI : 10.1063/1.113319

C. L. Chua, R. L. Thornton, and D. W. Treat, Planar laterally oxidized vertical-cavity lasers for low-threshold high-density top-surface-emitting arrays, IEEE Photonics Technology Letters, vol.9, issue.8, pp.1060-1062, 1997.
DOI : 10.1109/68.605499

S. N. Tandon, J. T. Gopinath, H. M. Shen, G. S. Petrich, L. A. Kolodziejski et al., Large-area broadband saturable Bragg reflectors by use of oxidized AlAs, Optics Letters, vol.29, issue.21, pp.2551-2553, 2004.
DOI : 10.1364/OL.29.002551

S. P. Nabanja, L. A. Kolodziejski, and G. S. Petrich, Lateral Oxidation of AlAs for Circular and Inverted Mesa Saturable Bragg Reflectors, IEEE Journal of Quantum Electronics, vol.49, issue.9, pp.731-738, 2013.
DOI : 10.1109/JQE.2013.2268536

F. Chouchane, H. Makhloufi, S. Calvez, C. Fontaine, and G. Almuneau, Photoluminescence from InGaAs/GaAs quantum well regrown on a buried patterned oxidized AlAs layer, Applied Physics Letters, vol.104, issue.6, p.61912, 2014.
DOI : 10.1063/1.3691251

S. Calvez, G. Lafleur, A. Larrue, P. Calmon, A. Arnoult et al., Vertically Coupled Microdisk Resonators Using AlGaAs/AlOx Technology, IEEE Photonics Technology Letters, vol.27, issue.9, pp.982-985, 2015.
DOI : 10.1109/LPT.2015.2405031

A. B. Fallahkhair, K. S. Li, and T. E. Murphy, Vector Finite Difference Modesolver for Anisotropic Dielectric Waveguides, Journal of Lightwave Technology, vol.26, issue.11, pp.1423-1431, 2008.
DOI : 10.1109/JLT.2008.923643

M. J. Cich, R. Zhao, E. H. Anderson, and E. R. Weber, Influence of gas transport on the oxidation rate of aluminum arsenide, Journal of Applied Physics, vol.66, issue.1, p.121, 2002.
DOI : 10.1063/1.1421037

G. Almuneau, R. Bossuyt, P. Collière, L. Bouscayrol, M. Condé et al., monitoring of wet thermal oxidation for precise confinement in VCSELs, Semiconductor Science and Technology, vol.23, issue.10, p.105021, 2008.
DOI : 10.1088/0268-1242/23/10/105021

F. Chouchane, G. Almuneau, N. Cherkashin, A. Arnoult, G. Lacoste et al., Local stress-induced effects on AlGaAs/AlOx oxidation front shape, Applied Physics Letters, vol.105, issue.4, p.41909, 2014.
DOI : 10.1088/0022-3727/42/17/175105

D. Liang and D. C. Hall, Reduction of etched AlGaAs sidewall roughness by oxygen-enhanced wet thermal oxidation, Applied Physics Letters, vol.2, issue.6, p.61110, 2007.
DOI : 10.1116/1.589862

B. W. Hakki and T. L. Paoli, cw degradation at 300??K of GaAs double???heterostructure junction lasers. II. Electronic gain, Journal of Applied Physics, vol.1, issue.9, pp.4113-4119, 1973.
DOI : 10.1103/PhysRev.127.768

C. Ozanam, M. Savanier, L. Lanco, X. Lafosse, G. Almuneau et al., Toward an AlGaAs/AlOx near-infrared integrated optical parametric oscillator, Journal of the Optical Society of America B, vol.31, issue.3, pp.542-550, 2014.
DOI : 10.1364/JOSAB.31.000542

P. Ku, J. Hernandez, and C. Chang-hasnain, Buried selectively-oxidized AlGaAs structures grown on nonplanar substrates, Optics Express, vol.10, issue.19, p.1003, 2002.
DOI : 10.1364/OE.10.001003

C. Guang-hua-duan, A. Jany, A. Le-liepvre, M. Accard, D. Lamponi et al., Hybrid III--V on Silicon Lasers for Photonic Integrated Circuits on Silicon, IEEE Journal of Selected Topics in Quantum Electronics, vol.20, issue.4, pp.158-170, 2014.
DOI : 10.1109/JSTQE.2013.2296752