Vertically Coupled Microdisk Resonators Using AlGaAs/AlOx Technology

Stéphane Calvez 1 Gaël Lafleur 1 Alexandre Larrue 1 Pierre-François Calmon 2 Alexandre Arnoult 2 Guilhem Almuneau 1 Olivier Gauthier-Lafaye 1
1 LAAS-PHOTO - Équipe Photonique
LAAS - Laboratoire d'analyse et d'architecture des systèmes [Toulouse]
2 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique
LAAS - Laboratoire d'analyse et d'architecture des systèmes [Toulouse]
Abstract : In this letter, we report the first experimental demonstration of micro-disk resonators that are vertically-coupled to their buried access waveguides on III-V semiconductor epitaxial structures using an original fabrication process. The here-proposed and validated three-dimensional integration scheme exploits selective lateral thermal oxidation of aluminium-rich AlGaAs layers. Compared to the previously reported processing techniques, this new scheme is simpler as it does not require any planarization or substrate transfer steps. As a proof-of-principle demonstration of this approach, 250 µm-diameter micro-disk devices exhibiting quality factor reaching ~8500 have been successfully fabricated.
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Journal articles
IEEE Photonics Technology Letters, Institute of Electrical and Electronics Engineers, 2015, 27 (9), pp.982 - 985. 〈10.1109/LPT.2015.2405031〉
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Stéphane Calvez, Gaël Lafleur, Alexandre Larrue, Pierre-François Calmon, Alexandre Arnoult, et al.. Vertically Coupled Microdisk Resonators Using AlGaAs/AlOx Technology. IEEE Photonics Technology Letters, Institute of Electrical and Electronics Engineers, 2015, 27 (9), pp.982 - 985. 〈10.1109/LPT.2015.2405031〉. 〈hal-01612502〉

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