L. M. Giovane, J. Wang, M. R. Murty, A. L. Harren, H. H. Chang et al., Volume Manufacturable High speed 850nm VCSEL for 100G Ethernet and Beyond, Optical Fiber Communication Conference, pp.1-3, 2016.
DOI : 10.1364/OFC.2016.Tu3D.5

M. Grabherr, New applications boost VCSEL quantities: recent developments at Philips

T. F. Krauss, R. M. Delarue, P. J. Laybourn, B. Vogele, and C. R. Stanley, Efficient semiconductor ring lasers made by a simple self-aligned fabrication process, IEEE Journal of Selected Topics in Quantum Electronics, vol.1, issue.2, pp.757-761, 1995.
DOI : 10.1109/2944.401268

M. C. Chang, P. M. Asbeck, K. C. Wang, G. J. Sullivan, N. H. Sheng et al., AlGaAs/GaAs heterojunction bipolar transistors fabricated using a self-aligned dual-lift-off process, IEEE Electron Device Letters, vol.8, issue.7, pp.303-305, 1987.
DOI : 10.1109/EDL.1987.26639

A. Al-omari and K. L. Lear, VCSELs with a self-aligned contact and copper-plated heatsink, IEEE Photonics Technology Letters, vol.17, issue.9, pp.17-1767, 2005.
DOI : 10.1109/LPT.2005.851938

C. L. Chua, R. L. Thornton, and D. W. Treat, Planar Laterally Oxided Vertical-Cavity Lasers for Low-Threshold High-Density Top-Surface-Emitting Arrays, Photonics Technology Letters, issue.98, pp.1060-1062, 1997.

E. M. Strzelecka, R. A. Morgan, Y. Liu, B. Walterson, J. Skogen et al., VCSEL-based modules for optical interconnects, Vertical-Cavity Surface-Emitting Lasers III, 1999.
DOI : 10.1117/12.347087

L. Marigo-lombart, A. Arnoult, L. Mazenq, P. Dubreuil, B. Reig et al., Single lithography-step self-aligned fabrication process for Vertical-Cavity Surface-Emitting Lasers, Materials Science in Semiconductor Processing, vol.61, pp.61-96, 2017.
DOI : 10.1016/j.mssp.2016.12.026