J. Ward, O. Benson, S. Feng, T. Lei, H. Chen et al., WGM microresonators: sensing, lasing and fundamental optics with microspheres Silicon photonics: from a microresonator perspective Disorder of an AlAs-GaAs superlattice by impurity diffusion Molecular beam epitaxial growth of GaAs using trimethylgallium as a Ga source, Laser Photonics Rev. Laser Photonics Rev. Appl. Phys. Lett. J. Appl. Phys, vol.56, issue.55 8, pp.553-570, 1981.

M. Smit, Photonic Integrated Circuits Based on Quantum well Intermixing Techniques Integrated-optic ring resonators with two stacked layers of silica waveguide on Si, Monolithic Whispering-Gallery Mode Resonators With Vertically Coupled Integrated Bus Waveguides, pp.83001-107, 1992.

K. Djordjev, S. Choi, S. Choi, and P. D. Dapkus, High-Q vertically coupled InP microdisk resonators, IEEE Photonics Technology Letters, vol.14, issue.3, pp.331-333, 2002.
DOI : 10.1109/68.986803

F. Mandorlo, P. Romeo, J. Fedeli, H. Sohrab, and R. Orobtchouk, Mode Density Reduction and Coupling in Microdisk LASERs Processed on a 200-mm CMOS Pilot Line, IEEE Photonics Technology Letters, vol.23, issue.17, pp.1183-1185, 2011.
DOI : 10.1109/LPT.2011.2157335

P. P. Absil, J. V. Hryniewicz, B. E. Little, F. G. Johnson, and K. J. Ritter, Vertically coupled microring resonators using polymer wafer bonding, IEEE Photonics Technology Letters, vol.13, issue.1, pp.49-51, 2001.
DOI : 10.1109/68.903217

P. Koonath, T. Indukuri, and B. Jalali, Vertically-coupled micro-resonators realized usingthree-dimensional sculpting in silicon, Applied Physics Letters, vol.2, issue.6, p.1018, 2004.
DOI : 10.1109/68.68036

S. Calvez, Vertically Coupled Microdisk Resonators Using AlGaAs/AlOx Technology, IEEE Photonics Technology Letters, vol.27, issue.9, pp.982-985, 2015.
DOI : 10.1109/LPT.2015.2405031
URL : https://hal.archives-ouvertes.fr/hal-01612502

F. Mandorlo, P. Romeo, X. Letartre, R. Orobtchouk, and P. Viktorovitch, Compact modulated and tunable microdisk laser using vertical coupling and a feedback loop, Optics Express, vol.18, issue.19, pp.19612-19625, 2010.
DOI : 10.1364/OE.18.019612

M. Ghulinyan, Oscillatory Vertical Coupling between a Whispering-Gallery Resonator and a Bus Waveguide, Physical Review Letters, vol.110, issue.16, p.163901, 2013.
DOI : 10.1038/nphys2063

F. Turri, F. Ramiro-manzano, I. Carusotto, M. Ghulinyan, G. Pucker et al., Wavelength Dependence of a Vertically Coupled Resonator-Waveguide System, Journal of Lightwave Technology, vol.34, issue.23, pp.5385-5390, 2016.
DOI : 10.1109/JLT.2016.2615331

C. Arlotti, O. Gauthier-lafaye, A. Monmayrant, and S. Calvez, Achromatic critically coupled racetrack resonators, Journal of the Optical Society of America B, vol.34, issue.11, p.2343, 2017.
DOI : 10.1364/JOSAB.34.002343
URL : https://hal.archives-ouvertes.fr/hal-01619015

J. M. Dallesasse, N. El-zein, N. Holonyak, K. C. Hsieh, R. D. Burnham et al., As???GaAs quantum???well heterostructures, Journal of Applied Physics, vol.33, issue.5, pp.2235-2238, 1990.
DOI : 10.1063/1.90522

J. M. Dallesasse and N. Holonyak, Oxidation of Al-bearing III-V materials: A review of key progress, Journal of Applied Physics, vol.9, issue.5, p.51101, 2013.
DOI : 10.1063/1.2058213

T. Takamori, K. Takemasa, and T. Kamijoh, Interface structure of selectively oxidized AlAs/GaAs, Applied Physics Letters, vol.7, issue.5, pp.659-661, 1996.
DOI : 10.1063/1.117797

K. D. Choquette, Selective oxidation of buried AlGaAs versus AlAs layers, Applied Physics Letters, vol.30, issue.10, p.1385, 1996.
DOI : 10.1063/1.117589

J. W. Bae, Characterization of sidewall roughness of InP/InGaAsP etched using inductively coupled plasma for low loss optical waveguide applications, Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, vol.21, issue.6, p.2888, 2003.
DOI : 10.1116/1.1625956

J. Canny, A Computational Approach to Edge Detection, IEEE Trans. Pattern Anal. Mach. Intell, vol.8, issue.6, pp.679-698, 1986.

C. Shin, Line Edge Roughness (LER), " in Variation-Aware Advanced CMOS Devices and SRAM, pp.19-35

A. Yariv, Universal relations for coupling of optical power between microresonators and dielectric waveguides, Electronics Letters, vol.36, issue.4, pp.321-322, 2000.
DOI : 10.1049/el:20000340

C. Arlotti, G. Almuneau, O. Gauthier-lafaye, and S. Calvez, Coupled mode analysis of micro-disk resonators with an asymmetric-index-profile coupling region, Proc. of SPIE, pp.100901-100902, 2017.
URL : https://hal.archives-ouvertes.fr/hal-01612514

M. Krause, Finite-Difference Mode Solver for Curved Waveguides With Angled and Curved Dielectric Interfaces, Journal of Lightwave Technology, vol.29, issue.5, pp.691-699, 2011.
DOI : 10.1109/JLT.2011.2106763

M. A. Afromowitz, Refractive index of Ga1???xAlxAs, Solid State Communications, vol.15, issue.1, pp.59-63, 1974.
DOI : 10.1016/0038-1098(74)90014-3

K. J. Knopp, R. P. Mirin, D. H. Christensen, K. A. Bertness, A. Roshko et al., Optical constants of (Al0.98Ga0.02)xOy native oxides, Applied Physics Letters, vol.12, issue.24, pp.3512-3514, 1998.
DOI : 10.1364/JOSA.51.000123

M. Borselli, T. J. Johnson, and O. Painter, Beyond the Rayleigh scattering limit in high-Q silicon microdisks: theory and experiment, Optics Express, vol.13, issue.5, p.1515, 2005.
DOI : 10.1364/OPEX.13.001515

K. Okamoto, Fundamentals of optical waveguides, 2000.

R. Stoffer, K. R. Hiremath, M. Hammer, L. Prkna, and J. ?tyroký, Cylindrical integrated optical microresonators: Modeling by 3-D vectorial coupled mode theory, Optics Communications, vol.256, issue.1-3, pp.1-3, 2005.
DOI : 10.1016/j.optcom.2005.06.064

A. Hardy and W. Streifer, Coupled mode theory of parallel waveguides, Journal of Lightwave Technology, vol.3, issue.5, pp.1135-1146, 1985.
DOI : 10.1109/JLT.1985.1074291

B. E. Little and W. P. Huang, Coupled-mode theory for optical waveguides, Progress In Electromagnetics Research, vol.10, pp.217-270, 1995.

G. A. Porkolab, P. Apiratikul, B. Wang, S. H. Guo, and C. J. Richardson, Low propagation loss AlGaAs waveguides fabricated with plasma-assisted photoresist reflow, Optics Express, vol.22, issue.7, p.7733, 2014.
DOI : 10.1364/OE.22.007733