Effect of cylindrical geometry on the wet thermal oxidation of AlAs, Journal of Applied Physics, vol.84, issue.12, pp.6901-6905, 1998. ,
DOI : 10.1049/el:19970222
Lateral Oxidation of AlAs for Circular and Inverted Mesa Saturable Bragg Reflectors, IEEE Journal of Quantum Electronics, vol.49, issue.9, pp.731-738, 2013. ,
DOI : 10.1109/JQE.2013.2268536
Temperature and thickness dependence of steam oxidation of AlAs in cylindrical mesa structures, IEEE Photonics Technology Letters, vol.13, issue.7, pp.687-689, 2001. ,
DOI : 10.1109/68.930415
Thermal oxidation of AlGaAs: modeling and process control, IEEE J. Quantum Electron, vol.39, issue.4, pp.577-585, 2003. ,
Advances in selective wet oxidation of AlGaAs alloys, IEEE Journal of Selected Topics in Quantum Electronics, vol.3, issue.3, pp.916-926, 1997. ,
DOI : 10.1109/2944.640645
Vertically Coupled Microdisk Resonators Using AlGaAs/AlOx Technology, IEEE Photonics Technology Letters, vol.27, issue.9, pp.982-985, 2015. ,
DOI : 10.1109/LPT.2015.2405031
URL : https://hal.archives-ouvertes.fr/hal-01612502