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Conference Papers Year : 2017

Spin crossover materials for MEMS actuation: Film integration and characterization

Abstract

This work describes the integration of molecular spin crossover (SCO) compound [Fe(H2B(pz)2)2(phen)] 1 (H2B(pz)2 = dihydrobis(pyrazolyl)borate, phen = 1,10phenantroline) into silicon MEMS with the aim to determine the mechanical properties of the SCO thin film. Analytical methods using the experimental resonance frequency before and after deposition of 1 are used to extract the elastic modulus (E) and residual stress (σ) induced by the film deposition, leading to values of E = 6.9 ± 0.1 GPa and σ = 74.8 MPa respectively. Additional mechanical parameters as a consequence of the expected spin transition were also predicted. These results provide a step towards the integration of SCO materials for future applications as actuators in MEMS/NEMS devices.
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Dates and versions

hal-01816366 , version 1 (15-06-2018)

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Maria Dolores Manrique-Juarez, Sylvain Rat, Laurent Mazenq, Fabrice Mathieu, Isabelle Séguy, et al.. Spin crossover materials for MEMS actuation: Film integration and characterization. 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), Jun 2017, Kaohsiung, Taiwan. ⟨10.1109/TRANSDUCERS.2017.7994294⟩. ⟨hal-01816366⟩
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