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RF MEMS continuous reversible variable inductor based on a microfluidic network

Abstract : In this work, RF MEMS continuous reversible variable inductor has been fabricated by using microelec-tronic technology and lamination process. We review, evaluate and compare this variable inductor with other work. The proposed inductor is a dual circular coil and has an inductance of few nH. The fundamental idea is to place a liquid droplet between the metal turns of a coil in order to modify the capacitive/resistive coupling between metal tracks and hence to change the stored magnetic energy. The SU-8 resin was used to realize the microfluidic channels and Au as metallic tracks. To prove the reversibility of the inductor, two cases were studied: filling and emptying of channels. The tuning range of the inductance is approximately 107 % at 1.6 GHz, making these devices very suitable as building blocks in many RF applications.
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https://hal.laas.fr/hal-01838459
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Submitted on : Friday, July 13, 2018 - 1:40:41 PM
Last modification on : Tuesday, October 20, 2020 - 6:48:06 PM
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Issam El Gmati, Pierre-François Calmon, Ali Boukabache, Patrick Pons, Hatem Boussetta, et al.. RF MEMS continuous reversible variable inductor based on a microfluidic network. Microsystem Technologies, Springer Verlag, 2014, 20 (6), pp.1085-1091. ⟨10.1007/s00542-013-1787-y⟩. ⟨hal-01838459⟩

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