P. Abgrall, C. Lattes, V. Cone´de´ra, X. Dollat, C. S. et al., A novel fabrication method of flexible and monolithic 3D microfluidic structures using lamination of SU-8 films, Journal of Micromechanics and Microengineering, vol.16, issue.1, pp.113-121, 2006.
DOI : 10.1088/0960-1317/16/1/016

S. Chang and S. Sivoththaman, A Tunable RF MEMS Inductor on Silicon Incorporating an Amorphous Silicon Bimorph in a Low-Temperature Process, IEEE Electron Device Letters, vol.27, issue.11, pp.905-908, 2006.
DOI : 10.1109/LED.2006.884712

R. Fulcrand, D. Jugieu, C. Escriba, A. Bancaud, D. Bourrier et al., Development of a flexible microfluidic system integrating magnetic micro-actuators for trapping biological species, Journal of Micromechanics and Microengineering, vol.19, issue.10, 2009.
DOI : 10.1088/0960-1317/19/10/105019

, J Micromech Microeng, vol.19, p.105019

M. Gel, S. Takeuchi, and I. Shimoyama, Fabrication method for out-of-plane, micro-coil by surface micromachining, Sensors and Actuators A: Physical, vol.97, issue.98, pp.702-708, 2002.
DOI : 10.1016/S0924-4247(02)00007-9

Y. Ito, Y. Yoshihar, H. Sugawara, K. Okada, and K. Masu, A 1.3-2.8 GHz Wide Range CMOS LC-VCO Using Variable Inductor, 2005 IEEE Asian Solid-State Circuits Conference, pp.3-5, 2005.
DOI : 10.1109/ASSCC.2005.251716
URL : https://hal.archives-ouvertes.fr/hal-00995626

J. Kim and D. Peroulis, Tunable MEMS spiral inductors with optimized RF performance and integrated large-displacement electrothermal actuators, IEEE Trans Microw Theory Tech, vol.57, pp.2276-2283, 2009.

V. Lubecke, B. Barber, E. Chan, D. Lopez, M. Gross et al., Self-assembling MEMS variable and fixed RF inductors, IEEE Transactions on Microwave Theory and Techniques, vol.49, issue.11, pp.2093-2098, 2001.
DOI : 10.1109/22.963142

S. Lucyszun, I. Robertson, K. Okada, H. Sugawara, H. Ito et al., High performance MMIC Narrow band filter using tunable active inductors IEEE Microwave and Millimeter-wave monolithic circuits Symposium On-chip high-Q variable inductor using wafer-level chipscale package technology, IEEE Trans Electron Devices, vol.53, pp.2401-2406, 1994.

N. Sarkar, D. Yan, M. Ellis, E. Horne, J. B. Lee et al., , 2005.

, Microassembled tunable MEMS inductor Int Conf Micro Electro Mech Sys, pp.183-189

H. Sugawara, Y. Yoshihara, H. Ito, K. Okada, and K. Masu, Widerange RF variable inductor on Si CMOS chip with MEMS actuator, Proceedings of the 34th European Microwave Conf, pp.701-705, 2004.

C. Tassetti, G. Lissorgues, and J. Gilles, New tunable RF MEMS microinductors design, Journal of Micromechanics and Microengineering, vol.14, issue.9, pp.17-22, 2004.
DOI : 10.1088/0960-1317/14/9/003
URL : https://hal.archives-ouvertes.fr/hal-00692957

T. Velden, D. Stefan, and E. Obermeir, Micro-coil with movable core for application in an inductive displacement sensor, Journal of Micromechanics and Microengineering, vol.9, issue.2, pp.119-122, 1999.
DOI : 10.1088/0960-1317/9/2/004

Y. Yokoyama, T. Fukushige, S. Hata, K. Masu, and A. Shimokohbe, On-Chip Variable Inductor Using Microelectromechanical Systems Technology, Japanese Journal of Applied Physics, vol.42, issue.Part 1, No. 4B, pp.2190-2192, 2003.
DOI : 10.1143/JJAP.42.2190

Y. Yoshihara, H. Sugawara, H. Ito, K. Okada, and K. Masu, Wide Tuning Range LC-VCO Using Variable Inductor for Reconfigurable RF Circuit, IEICE Transactions on Fundamentals of Electronics, Communications and Computer Sciences, vol.88, issue.2, pp.507-512, 2005.
DOI : 10.1093/ietfec/E88-A.2.507

S. Zhou, X. Sun, and W. Carr, A monolithic variable inductor network using microrelays with combined thermal and electrostatic actuation, Journal of Micromechanics and Microengineering, vol.9, issue.1, pp.45-50, 1999.
DOI : 10.1088/0960-1317/9/1/305

I. Zine-el-abidine, M. Okoniewski, and J. Mcrory, A new class of tunable RF MEMS inductors, Proceedings International Conference on MEMS, NANO and Smart Systems, pp.114-115, 2003.
DOI : 10.1109/ICMENS.2003.1221976

I. Zine-el-abidine, M. Okoniewski, and J. Mcrory, Tunable radio frequency MEMS inductors with thermal bimorph actuators, Journal of Micromechanics and Microengineering, vol.15, issue.11, pp.2063-2068, 2005.
DOI : 10.1088/0960-1317/15/11/010