H. Nieminem, V. Ermolov, K. Nybergh, S. Silanto, and T. Ryhanen, Microelectromechanical capacitors for RF applications, Journal of Micromechanics and Microengineering, vol.12, issue.2, pp.177-186, 2002.
DOI : 10.1088/0960-1317/12/2/312

. Seonho-seok, . Wonseo-choi, and . Kukjin-chun, A novel linearly tunable MEMS variable capacitor, Journal of Micromechanics and Microengineering, issue.1, pp.82-86, 2002.

O. A. Fedder-g, RF CMOS-MEMS capacitor having large tuning range", Transducers, Solid-State Sensors, Actuators and Microsystems, 12th International Conference, 2003.

H. Nguyen, D. Had, P. R. Patterson, and W. Piywattanametha, Angular Vertical Comb-Driven Tunable Capacitor With High-Tuning Capabilities, Journal of Microelectromechanical Systems, vol.13, issue.3, pp.406-413, 2004.
DOI : 10.1109/JMEMS.2004.828741

L. Gu and X. Li, Rotational Driven RF Variable Capacitors With Post-CMOS Processes, IEEE Electron Device Letters, vol.29, issue.2, pp.195-197, 2008.
DOI : 10.1109/LED.2007.914106

N. Habbachi, H. Boussetta, A. Boukabache, M. A. Kallala, P. Pons et al., Tunable MEMS capacitor: influence of fluids, Electronics Letters, vol.53, issue.2, 2016.
DOI : 10.1049/el.2016.3756
URL : https://hal.archives-ouvertes.fr/hal-01415341

N. Habbachi, H. Boussetta, A. Boukabache, M. A. Kallala, P. Pons et al., Fabrication and Modeling of a Capacitor Microfluidically Tuned by Water, IEEE Electron Device Letters, 2016.
DOI : 10.1109/LED.2016.2644540
URL : https://hal.archives-ouvertes.fr/hal-01838581

E. Gmati, I. Calmon, P. F. Boukabache, A. Pons, P. Fulcrand et al., Fabrication and evaluation of an on-chip liquid micro-variable inductor, Journal of Micromechanics and Microengineering, vol.21, issue.2, p.25018, 2011.
DOI : 10.1088/0960-1317/21/2/025018

S. Pinon, D. L. Diedhiou, A. M. Gué, N. Fabre, G. Prigent et al., Development of a microsystem based on a microfluidic network to tune and reconfigure RF circuits, Journal of Micromechanics and Microengineering, vol.22, issue.7, p.74005, 2012.
DOI : 10.1088/0960-1317/22/7/074005
URL : https://hal.archives-ouvertes.fr/hal-00855589