Liquid-Crystal alignment by a nanoimprinted grating for wafer-scale fabrication of tunable devices

Abstract : A simple technology is demonstrated for wafer-scale fabrication of liquid-crystal (LC) microcells that can be integrated in active optoelectronic devices. Fabrication of 1.55µm tunable Fabry-Perot optical micro-filter arrays is achieved owing to the insertion of a single nanoimprinted polymer grating dedicated to LC alignment and to the soft thermal transfer of a dry thick resist film between two highly reflective mirrors. The filter exhibits a spectral tuning range of 102nm with only 18V applied, as well as negligible internal loss, which makes it suitable for being inserted in a laser cavity. This constitutes a key step toward large-scale integration of widely-tunable photonic devices such as VCSELs using LC technology.
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IEEE Photonics Technology Letters, Institute of Electrical and Electronics Engineers, 2018, 30 (15), pp.1388-1391. 〈10.1109/LPT.2018.2849641〉
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Benattou Sadani, Benjamin Boisnard, Xavier Lafosse, Thierry Camps, Jean-Baptiste Doucet, et al.. Liquid-Crystal alignment by a nanoimprinted grating for wafer-scale fabrication of tunable devices. IEEE Photonics Technology Letters, Institute of Electrical and Electronics Engineers, 2018, 30 (15), pp.1388-1391. 〈10.1109/LPT.2018.2849641〉. 〈hal-01839878〉

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