Design of air blast pressure sensors based on miniature silicon membrane and piezoresistive gauges, Journal of Physics, vol.922, 2017. ,
URL : https://hal.archives-ouvertes.fr/hal-01570690
Q-factor and frequency shift of resonating silicon diaphragms in air, Sensors & Actuators A, vol.27, issue.1, pp.691-698, 1991. ,
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