D. J. Young and B. Boser, A micromachined variable capacitor for monolithic low-noise VCOs Workshop Solid-State Sensor and Actuator pp, pp.3-6, 1996.

L. Dussopt and G. Rebeiz, High-Q millimeter-wave MEMS varactors: extended tuning range and discrete-position designs Int Conf on Microwave Symposium Digest, pp.1205-1208, 2002.

J. Zou, C. Liu, J. Schutt-aine, J. Chen, and S. Kang, Development of a wide tuning range MEMS tunable capacitor for wireless communication systems Int Conf on Electron Devices Meeting pp, pp.403-406, 2000.

H. Nieminen, V. Ermolov, K. Nybergh, S. Silanto, and T. Ryhänen, Microelectromechanical capacitors for RF applications, Journal of Micromechanics and Microengineering, vol.12, issue.2, pp.177-186, 2002.
DOI : 10.1088/0960-1317/12/2/312

S. Seok, W. Choi, and C. K. , , 2001.

. Micromech and . Microeng, , pp.82-86

S. Seok, C. Nam, and C. K. , MEMS variable capacitor for one-chip rf front end In International Symposium on Microelectronics and Assembly International Society for Optics and Photonics pp, pp.26-33, 2000.

L. Gu and X. Li, Rotational Driven RF Variable Capacitors With Post-CMOS Processes IEEE Electron Device Letters, pp.195-197, 2008.

J. B. Yoon and C. Nguyen, A high-Q tunable micromechanical capacitor with movable dielectric for RF applications Int Conf on Electron Devices Meeting pp, pp.489-492, 2000.

A. Ghannam, C. Viallon, D. Bourrier, and T. Parra, Dielectric microwave characterization of the SU-8 thick resin used in an above IC process Int Conf on European Microwave Conference pp, pp.1041-1044, 2009.

C. Wen, Coplanar Waveguide: A Surface Strip Transmission Line Suitable for Nonreciprocal Gyromagnetic Device Applications, IEEE Transactions on Microwave Theory and Techniques, vol.17, issue.12, pp.1087-1090, 1969.
DOI : 10.1109/TMTT.1969.1127105

W. Deal, Coplanar waveguide basics for MMIC and PCB design IEEE Microwave Magazine 9, pp.120-133, 2008.

S. Dalmia, S. Lee, V. Sundaram, S. Min, M. Swaminathan et al., CPW high Q inductors on organic substrates Int Conf on Electrical Performance of Electronic Packaging pp, 2001.