C. Jiang, Fabrication of thick electroforming micro mould using a KMPR negative tone photoresist

, Thick photoresists for electroforming metallic microcomponents X Wei 1 , C-H Lee 1, Z Jiang, vol.2, p.1

, Improved registration technique for fabricating thick film

, Wet releasing and stripping SU-8 structures with a nanoscale sacrificial layer Peihong Wanga,b, Katsuhiko Tanaka c, Susumu Sugiyama d

, A comparative study of different thick photoresists for MEMS applications

, Optimized piranha etching process for SU-8-based MEMS and MOEMS construction Matthew Holmes1, Jared Keeley1, Katherine Hurd1, Holger Schmidt2 and Aaron Hawkins1

, Ultrathick SU-8 mold formation and removal, and its application to the fabrication of LIGA-like micromotors with embedded roots Chien-Hung Hoa,*, Kan-Ping China, Chii-Rong Yangb

L. C. Integrated, D. C. Filter-on-silicon-for, M. Artillan, D. Brunet, J. P. Bourrier et al.,

-. High and . Su, Based Above-IC Inductors for RF Power Devices Ayad Ghannam 1, David Bourrier 1, Christophe Viallon 1,2, Jean-Marie Boulay 3, Thierry Parra, vol.3, issue.8