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Advanced thermopile IR dual line sensor for smart home

Abstract : This article presents all steps between the advanced design and the production of CMOS compatible thermoelectric effect infrared sensors dedicated to smart home applications. It will start by making a comparison between thermopile, bolometer and pyroelectric technologies. Although sensitivity performances available with bolometers appear to be better at first sight, it is found that thermopiles have non-negligible advantages that make them more suitable for this application field. Then the different steps necessary for the design will be described , starting from the thermoelectric model of the sensor (temperature gradient , electrical sensitivity, etc.) and considering all steps up to technological manufacturing in a clean room. The results obtained on the structures produced on a specific computer-controlled measurement bench (temperature regulation with an onboard pre amplification card) will be presented. Finally, the results prove that the square structures have better performances (S = 82V/W and NETD = 208mK).
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Submitted on : Friday, November 16, 2018 - 6:18:20 PM
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Christophe Escriba, Julien Roux, Georges Soto-Romero, Pascal Acco, David Bourrier, et al.. Advanced thermopile IR dual line sensor for smart home. Journal of Sensor Technology, Scientific Research, 2018, 8 (4), ⟨10.4236/jst.2018.84006⟩. ⟨hal-01916914⟩



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