F. Farhad, J. Ehsan, and Y. Seyed-jalil, Fabrication and Characterization of Fast Response Pyroelectric Sensors Based on Fe-Doped PZT Thin Films, Journal of Materials Science-Materials in Electronics, vol.27, pp.6578-6585, 2016.

,

C. Escriba, Journal of Sensor Technology

L. Cao, Y. Zhang, S. Sun, H. Guo, and Z. Zhang, Structure Design and Test of MEMS Thermocouple Infrared Detector. Microsystem Technologies Micro and Nanosystems Information Storage and Processing Systems, vol.24, pp.2463-2471, 2008.

M. Boutchich, K. Ziouche, . Ait-hammouda, M. Yala, P. Godts et al., Package-Free Infrared Micro Sensor Using Polysilicon Thermopile, Sensors and Actuators A, vol.121, pp.52-58, 2005.
DOI : 10.1016/j.sna.2005.01.016
URL : https://hal.archives-ouvertes.fr/hal-00125621

H. Wang, X. Yi, and S. Chen, Low Temperature Fabrication of Vanadium Oxide Films for Uncooled Bolometric Detectors, Infrared Physics & Technology, vol.47, pp.273-277, 2006.

S. Lim, J. Choi, R. Horowitz, and A. Majumdar, Design and Fabrication of a Novel Bimorph Micro-Optomechanical Sensor, Journal of Microelectromechanical Systems, vol.14, pp.683-690, 2005.

D. H. Xu, Y. L. Wang, B. Xiong, and T. Li, MEMS-Based Thermoelectric Infrared Sensors: A Review, Frontiers of Mechanical Engineering, vol.12, pp.557-566, 2017.

,

Y. Li, H. Zhou, T. Li, Y. Wang, Y. Liu et al., , p.8, 2010.

, × 2 Thermopile Array, Sensors and Actuators A, vol.161, pp.120-126

,

P. Jan, P. Roman, and S. Vojtech, Self-Compensating Method for Bolometer-Based IR Focal Plane Arrays, Sensors and Actuators A, vol.265, pp.40-46, 2017.

,

X. Qian, Y. P. Xu, and G. Karunasiri, Self-Heating Cancellation Circuits for Microbolometer, Sensors and Actuators, vol.111, pp.196-202, 2004.
DOI : 10.1016/j.sna.2003.10.035

,

C. S. Premachandran, S. C. Chong, T. C. Chai, and M. Iyer, Vacuum Packaging Development and Testing for an Uncooled IR Bolometer Device, 54th Electronic Components and Technology Conference, pp.951-955, 2004.

B. Fisette, M. Tremblay, and H. Oulachgaret, Novel Vacuum Packaged 384 x 288 Broadband Bolometer FPA with Enhanced Absorption in the 3-14 mu m Wavelength Range, Conference on Infrared Technology and Applications, pp.101771-10177, 2017.

E. Socher, O. Bochobza-degani, and Y. Nemirovsky, A Novel Spiral CMOS Compatible Micromachined Thermoelectric IR Microsensor, Journal of Micromechanics and Microengineering, vol.11, pp.574-576, 2001.

,

C. Hsun and K. Cheng, Optimization Criteria of CMOS Compatible Thermopile Sensors, Proceedings of SPIE, pp.116-126, 1999.

S. Kou and H. Akai, First-Principles Calculation of Transition-Metal Seebeck Coefficients, Solid State Communications, vol.276, pp.1-4, 2018.

,

F. Völklein and H. Baltes, Thermoelectric Properties of Polysilicon Films Doped with Phosphorus and Boron, Sensors and Materials, vol.3, pp.325-334, 1992.

C. Escriba, E. Campo, D. Estève, and J. Y. Fourniols, Complete Analytical Modeling and Analysis of Micromachined Thermoelectric Uncooled IR Sensors, Sensors and Actuators A, vol.120, pp.267-276, 2005.

T. Elbel, R. Lenggenhager, H. ;. Baltes, and . Escriba, Model of Thermoelectric Radiation Sensors Made by CMOS and Micromachining, Journal of Sensor Technology, vol.35, pp.101-106, 1992.

F. Volklein and H. Baltes, Optimization Tool for the Performance Parameters of Thermoelectric Microsensors, Sensors and Actuators A, vol.36, pp.65-71, 1993.

, , pp.80142-80146

U. Dillner, Thermal Modeling of Multilayer Membranes for Sensor Applications, Sensors and Actuators A, vol.41, pp.260-267, 1994.

, , pp.80121-80126

D. Xu, B. Xiong, and Y. Wang, Modeling of Front-Etched Micromachined Thermopile IR Detector by CMOS Technology, Journal of Microelectromechanical Systems, vol.19, pp.1331-1340, 2010.

F. Gaiseanu, D. Tsoukalas, J. Esteve, C. Postolache, D. Goustouridis et al., Chemical Etching Control during the Self-Limitation Process by Boron Diffusion in Silicon: Analytical Results, pp.247-250, 1997.

C. Rossi, E. Scheid, and D. Estève, Theoretical and Experimental Study of Silicon Micro Machined Micro Heater with Dielectric Stacked Membranes, Sensors and Actuators A, vol.63, pp.80503-80504, 1997.

T. Boyer, P. Rossi, C. Saint-etienne, E. Scheid, and E. , Residual Stress in Low Pressure Chemical Vaport Deposition SiN x Films Deposited from Silane and Ammonia, Journal of Vacuum Science & Technology, vol.16, pp.2003-2337, 1998.

,

C. Rossi, P. Temple-boyer, and D. Estève, Realization and Performance of Thin SiO 2 /SiN x Membrane for Microheater Applications, Sensors and Actuators A, vol.64, pp.241-245, 1998.

R. Iosub, C. Moldovan, and M. Modreanu, Silicon Membranes Fabrication by Wet Anisotropic Etching, Sensors and Actuators A, vol.99, pp.104-111, 2002.

, , pp.906-908

R. Bitter, T. Mohiuddin, and M. R. Nawrocki, LabVIEW: Advanced Programming Techniques, p.499, 2006.

Y. Kusuda, A 60 V Auto-Zero and Chopper Operational Amplifier with 800 kHz Interleaved Clocks and Input Bias Current Trimming, Journal of Solid State Circuits, vol.50, pp.2804-2813, 2015.

G. Souliotis, F. Plessas, and S. Vlassis, A High Accuracy Voltage Reference Generator, Microelectronics Journal, vol.75, pp.61-67, 2018.

J. Chacon, H. Vargas, and G. Farias, Architecture for Rapid Development of Remote Labs, IEEE Transactions on Learning Technologies, vol.8, pp.393-401, 2015.

G. Gaussorgues, La Thermographie Infrarouge: Principes, Technologies, 1999.

C. Shen and B. Wang, A High Performance CMOS Compatible Thermopile Based on Noise Added Mechanism, Sensors, pp.611-614, 2004.

Y. Liu, D. Shen, and Z. Zhu, The Design of Adding Heat Reflective Emitter Coating on the Cold Region of Infrared Thermopiles. 21st International Conference on Thermoelectrics, vol.21, pp.458-462, 2002.

A. Schaufelbühl, Uncooled Low-Cost Thermal Infrared Based on Micromachined CMOS Integrated Sensor Array, Journal of Micromechanics and Microengineering, vol.10, pp.503-510, 2001.

C. Escriba, Journal of Sensor Technology

T. Akin, Z. Olgun, O. Akar, and H. Kulah, An Integrated Thermopile Structure with High Responsivity Using Any Standard CMOS Process, vol.66, pp.38-45, 1998.

D. Pajani, Mesure par thermographie infrarouge, 1989.