Design optimisation of the deep trench termination for superjunction power devices

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Submitted on : Tuesday, January 8, 2019 - 12:27:18 PM
Last modification on : Friday, June 14, 2019 - 6:31:22 PM
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  • HAL Id : hal-01955656, version 1

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Sylvain Noblecourt, Frédéric Morancho, Karine Isoird, Patrick Austin, Josiane Tasselli. Design optimisation of the deep trench termination for superjunction power devices. International Journal of Microelectronics and Computer Science, Department of Microelectronics and Computer Science (DMCS) of Technical University of Łódź, 2015, 6 (4), pp.117-123. ⟨https://ijmcs.dmcs.pl/documents/10630/145671/IJMCS_4_2015-1.pdf⟩. ⟨hal-01955656⟩

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