Micro-masonry for the simple fabrication of nanoplate resonators with integrated electrostatic transduction transduction - LAAS - Laboratoire d'Analyse et d'Architecture des Systèmes Access content directly
Conference Papers Year : 2016

Micro-masonry for the simple fabrication of nanoplate resonators with integrated electrostatic transduction transduction

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Micro and nanotechnologies/Microelectronics

Bernard Legrand  : Connect in order to contact the contributor

https://hal.laas.fr/hal-01962410

Submitted on : Thursday, December 20, 2018-3:44:34 PM

Last modification on : Monday, April 17, 2023-6:32:11 PM

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hal-01962410 , version 1 (20-12-2018)

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  • HAL Id : hal-01962410 , version 1

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Adhitya Bhaswara, Hohyun Keum, Fabrice Mathieu, Bernard Legrand, Seok Kim, et al.. Micro-masonry for the simple fabrication of nanoplate resonators with integrated electrostatic transduction transduction. 42nd International Conference on Micro and Nano Engineering, MNE 2016, Sep 2016, Vienne, Austria. ⟨hal-01962410⟩

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UNIV-TLSE2 CNRS INSA-TOULOUSE LAAS UT1-CAPITOLE LAAS-NBS LAAS-I2C LAAS-MICRO-NANO-BIO-TECHNOLOGIES LAAS-MEMS INSA-GROUPE TOULOUSE-INP UNIV-UT3 UT3-TOULOUSEINP
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