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Conference papers

Transient response of miniaturized piezoresistive sensors for side-on pressure shockwave

Abstract : Transient response of a miniaturized silicon piezoresistive sensor is simulated here for the first time when a pressure shock wave propagates along the sensor's surface, or equivalently, for side-on pressure shock wave in air. These mechanical simulations show that it is possible to reduce the sensor's reaction time by a factor about 10 from carefully adjusting the membrane dimensions.
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https://hal.laas.fr/hal-02083205
Contributor : Pons Patrick <>
Submitted on : Thursday, March 28, 2019 - 6:32:20 PM
Last modification on : Wednesday, June 24, 2020 - 4:18:56 PM

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Citation

J Veyrunes, Jérôme Riondet, André Ferrand, M Lavayssière, Alexandre Lefrancois, et al.. Transient response of miniaturized piezoresistive sensors for side-on pressure shockwave. Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP), May 2019, Paris, France. ⟨10.1109/DTIP.2019.8752911⟩. ⟨hal-02083205⟩

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