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Manufacturability of gas sensor with ZnO nanoparticles suspension deposited by ink jet printing

Véronique Conédéra 1 P. Yoboué Fabien Mesnilgrente 1 Norbert Fabre 1 Philippe Menini 2
1 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique
LAAS - Laboratoire d'analyse et d'architecture des systèmes
2 LAAS-MICA - Équipe MICrosystèmes d'Analyse
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : Zinc oxide is used in many applications thanks to its various characteristics as well as photoresistivity, piezoelectricity, wide band gap for power components but also its capability for gas detection. In this article, we first present new process based on ZnO nanoparticles from Sigma Aldrich manufacturer; a stable ink obtained by mixing 10% weight of commercial powder with ethylene glycol, has been deposited by ink-jet printing on a silicon oxide substrate covered by platinum interdigitated electrodes. To obtain homogeneous deposits of nanoparticles, the working area of the sensor was bounded by functionalisation by the n-Octadecyltrichlorosilane. These deposits were optimized at 65°C. Then, the study was focused on the correlation between parameters of deposit and global resistance and gas sensitivity: conductivity for different operating temperatures under methane and isopropyl alcohol vapours. The best results have been obtained for thicknesses in the range of 0.5 and 2.5 μm. The ZnO resistance is stable under gas from 200°C and the relative sensitivity to methane and isopropyl alcohol are maximum and opposite at 225°C and 300°C respectively. This work shows that ink-jet is a promising technique to manufacture a new generation of low cost gas sensors at lower temperature deposition.
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Véronique Conédéra, P. Yoboué, Fabien Mesnilgrente, Norbert Fabre, Philippe Menini. Manufacturability of gas sensor with ZnO nanoparticles suspension deposited by ink jet printing. SPIE MOEMS-MEMS-NEMS, Jan 2010, San Francisco, United States. pp.75900M, ⟨10.1117/12.840417⟩. ⟨hal-02083327⟩



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