Development of integrated smart nose based on WO3 gas sensors
Résumé
This article deals with the conception and realisation of a new architecture of integrated electronic nose based on silicon microhotplates and WO 3 thin films. The first part of this work describes technological choices to elaborate a single gas sensor with low consumption (˜100 mW to reach 600°C), low thermal inertia (˜30ms), above all with a good heater stability. By consideration of response times and relative resistance variations from sensor response curves, it is possible firstly to discriminate different gas mixtures and secondly to evaluate gas concentrations by using mathematical analysis.
Origine : Fichiers produits par l'(les) auteur(s)
Loading...