R. Puers and D. Lapadatu, Electrostatic forces and their effects on capacitive mechanical sensors, Sensors and Actuators, vol.56, pp.203-210, 1996.
DOI : 10.1016/s0924-4247(96)01310-6

E. S. Hung and S. D. Senturia, Extending the travel range of analog-tuned electrostatic actuators, Journal of Microelectromechanical Systems, vol.8, issue.4, pp.497-505, 1999.

M. and A. L. Bahri, Influence of the temperature on the static and dynamic behavior of silicon capacitive pressure sensors, 2005.

B. Puers, E. Peeters, A. Van-den-boosche, and W. Sansen, A Capacitive Pressure Sensor With Low Impedance Output and Active Suppression of Parasitic Effects, Sensors and Actuators, pp.108-114, 1990.

P. Pons and G. Blasquez, Low-cost Highsensitivity Integrated Pressure and Temperature Sensor, Sensors and Actuators A, pp.398-401, 1994.
DOI : 10.1016/0924-4247(94)80020-0