Electrostatic forces and their effects on capacitive mechanical sensors, Sensors and Actuators, vol.56, pp.203-210, 1996. ,
DOI : 10.1016/s0924-4247(96)01310-6
Extending the travel range of analog-tuned electrostatic actuators, Journal of Microelectromechanical Systems, vol.8, issue.4, pp.497-505, 1999. ,
Influence of the temperature on the static and dynamic behavior of silicon capacitive pressure sensors, 2005. ,
A Capacitive Pressure Sensor With Low Impedance Output and Active Suppression of Parasitic Effects, Sensors and Actuators, pp.108-114, 1990. ,
Low-cost Highsensitivity Integrated Pressure and Temperature Sensor, Sensors and Actuators A, pp.398-401, 1994. ,
DOI : 10.1016/0924-4247(94)80020-0