R. Puers, Capacitive Sensors : When to use them, Sensors and Actuators, pp.93-105, 1993.

W. G. Alwang, Mechanical Sensors, 1994.

R. F. Wolffenbuttel, Silicon Sensors and Circuits, 1996.

Y. S. Lee and K. D. Wise, A Batch-Fabricated Silicon Capacitive Pressure Transducer With Low Temperature Sensitivity, IEEE Transaction on Electronic Devices, vol.29, pp.42-48, 1982.

W. H. Ko, M. H. Bao, and Y. D. Hong, A High Sensitivity Integrated Circuit Capacitive Pressure Sensor With Frequency-Modulated Output, Sensors and Actuators, pp.345-351, 1986.

M. J. Smith, L. Bowman, and J. D. Meindl, Analysis Design and Performance of a Capacitive Pressure Sensor IC, IEEE Transaction on Biomedical Engineering, pp.163-174, 1986.

A. Jornod and F. Rudolf, High-Precision Capacitive Absolute Pressure Sensor, Sensors and Actuators, vol.17, pp.415-421, 1989.

B. Puers, E. Peeters, A. Van-den-boosche, and W. Sansen, A Capacitive Pressure Sensor With Low Impedance Output and Active Suppression of Parasitic Effects, Sensors and Actuators, pp.108-114, 1990.

A. Hanneborg and P. Ohlkers, A Capacitive Silicon Pressure Sensor With Low TCO and High Long-term Stability, Sensors and Actuators, A 21-23, pp.151-154, 1990.

T. Nagata, H. Terabe, S. Kuwahara, and S. Sakurai, Digital Compensated Capacitive Pressure Sensor Using CMOS Technology, Sensors and Actuators, A, vol.34, pp.173-177, 1992.

D. Catling, High-Sensitivity Silicon Capacitive Sensors for Measuring Medium-Vacuum Gaz Pressure, Sensors and Actuators, A 64, pp.157-164, 1998.

J. A. Plaza, J. Esteve, and E. Lora-tomayo, Simple Technology for Bulk Accelerometer Based on Bond and Etch Back Silicon on Insulator Wafers, Sensors and Actuators, A 68, pp.299-302, 1998.

J. Jordan, K. Peter, D. Renshaw, and D. Kent, A Capacitance Ratio to Frequency Ratio Converter Using Switched-Capacitor Techniques, Sensors and Actuators, A, vol.29, pp.133-139, 1991.

G. Blasquez, P. Pons, P. Menini, D. Herbst, M. Schulz et al., Capacitive Pressure Sensor Mockup Without Compensation Circuits, Transducers, vol.95, pp.628-631, 1995.
URL : https://hal.archives-ouvertes.fr/hal-02060535

G. Blasquez, Y. Naciri, N. Ben-moussa, and P. Pons, Static Response of Miniature Pressure Sensors with Square or Rectangular Silicon Diaphragm, Revue Phys. Appl, Nº22, pp.505-510, 1987.
URL : https://hal.archives-ouvertes.fr/jpa-00245566

X. Chauffleur, G. Blasquez, and P. Pons, Influence of the Bonding Conditions on the Response of Capacitive Pressure Sensors, Sensors and Actuators, vol.46, pp.121-124, 1995.

G. Wallis and D. I. Pomerantz, Field Assisted Glass-Metal Sealing, Journal of Appl. Phy, vol.40, pp.3946-3950, 1969.

W. H. Ko, J. T. Suminto, and G. J. Yeh, Bonding Techniques for Microsensors Micromachining and Micropackaging of Transducers, pp.41-61, 1985.

T. Rogers and J. Kowal, Selection of Glass, Anodic Bonding Conditions and material Compatibility for Silicon Glass Capacitive Sensors, Sensors and Actuators, pp.113-120, 1995.

A. Cozma and B. Puers, Characterization of the Electrostatic Bonding of Silicon and Pyrex Glass, Journal of Micromechanic and Microengineering, pp.98-102, 1995.