Deposition of self-assembled monolayers in supercritical CO2 - LAAS - Laboratoire d'Analyse et d'Architecture des Systèmes Access content directly
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Deposition of self-assembled monolayers in supercritical CO2

L. Rabbia
  • Function : Author
V. Perrut
  • Function : Author
P. Pons
  • Function : Author
Philippe Menini
Équipe MICrosystèmes d'Analyse
CV
J.Y. Clavier
  • Function : Author

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Micro and nanotechnologies/Microelectronics

Philippe Menini  : Connect in order to contact the contributor

https://hal.laas.fr/hal-02172203

Submitted on : Wednesday, July 3, 2019-3:38:33 PM

Last modification on : Monday, April 17, 2023-6:32:11 PM

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hal-02172203 , version 1 (03-07-2019)

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  • HAL Id : hal-02172203 , version 1

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L. Rabbia, V. Perrut, P. Pons, Philippe Menini, J.Y. Clavier. Deposition of self-assembled monolayers in supercritical CO2. Journée nationale sur les technologies émergentes en Micro-nanofabrication, May 2013, Evian, France. ⟨hal-02172203⟩

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