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Deposition of self-assembled monolayers in supercritical CO2

L. Rabbia V. Perrut P. Pons Philippe Menini 1 J.Y. Clavier
1 LAAS-MICA - Équipe MICrosystèmes d'Analyse
LAAS - Laboratoire d'analyse et d'architecture des systèmes
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https://hal.laas.fr/hal-02172203
Contributor : Philippe Menini Connect in order to contact the contributor
Submitted on : Wednesday, July 3, 2019 - 3:38:33 PM
Last modification on : Thursday, June 10, 2021 - 3:03:03 AM

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  • HAL Id : hal-02172203, version 1

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L. Rabbia, V. Perrut, P. Pons, Philippe Menini, J.Y. Clavier. Deposition of self-assembled monolayers in supercritical CO2. Journée nationale sur les technologies émergentes en Micro-nanofabrication, May 2013, Evian, France. ⟨hal-02172203⟩

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