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On the anomalous generation of {0 0 1} loops during laser annealing of ion-implanted silicon

Abstract : We combine focused experiments with molecular dynamics simulations to investigate in detail the formation of {0 0 1} loops in nanosecond laser-annealed silicon. We demonstrate that at temperatures close to the melting point, self-interstitial rich silicon is driven into dense liquid-like droplets that are highly mobile within the solid crystalline matrix. These liquid droplets grow by a coalescence mechanism and eventually transform into {0 0 1} loops through a liquid-to-solid phase transition in the nanosecond timescale.
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https://hal.laas.fr/hal-02360279
Contributor : Fuccio Cristiano <>
Submitted on : Tuesday, November 12, 2019 - 5:17:27 PM
Last modification on : Thursday, June 10, 2021 - 3:06:24 AM

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Luis Marques, María Aboy, Iván Santos, Pedro López, Fuccio Cristiano, et al.. On the anomalous generation of {0 0 1} loops during laser annealing of ion-implanted silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Elsevier, 2019, 458, pp.179-183. ⟨10.1016/j.nimb.2018.09.030⟩. ⟨hal-02360279⟩

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