130-MHz Optomechanical Vibrating Sensor: Towards High Bandwidth / Ultrasensitive Measurements

Abstract : We show all-optical operation of a VLSI optomechanical micro-resonator designed for high resolution sensing applications. Mechanical resonance frequency is above 100 MHz with Q-factor of 1 000 in air, yielding measurement bandwidth above 100 kHz. We demonstrate low thermomechanical noise floor resolved with exquisite motion detection limit down to 4.10 -16 m.Hz -0.5 . This performance, enabled by optomechanical transduction, paves the way for very high-speed and ultra-sensitive sensing applications.
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https://hal.laas.fr/hal-02371188
Contributor : Bernard Legrand <>
Submitted on : Tuesday, November 19, 2019 - 5:43:00 PM
Last modification on : Friday, January 10, 2020 - 9:10:19 PM

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Lucien Schwab, Sebastien Hentz, Ivan Favero, Bernard Legrand, Pierre-Etienne Allain, et al.. 130-MHz Optomechanical Vibrating Sensor: Towards High Bandwidth / Ultrasensitive Measurements. IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS 2019), Jan 2019, Seoul, South Korea. pp.819-822, ⟨10.1109/MEMSYS.2019.8870718⟩. ⟨hal-02371188⟩

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