In this study, a microwave biosensor based on interdigitated electrode layout is evaluated as an on-chip electroporation system applicable to electroporation of adherent cell monolayers. The present device is designed in a manner that allows electrical microwave spectroscopy measurements in subsequent studies. We demonstrate the applicability of our device for electroporation-mediated molecule transfer of adherent cells in standard laboratory conditions. Application of electric pulses (6 V, 100 µs, 1 Hz) to the cells induces successful delivery of a fluorescent probe (∼98%), while maintaining a high viability rate (∼100%). The comparable delivery rate to existing systems along with the improved viability suggest that our proposed electroporation system has great potential in the research fields, considering that our system is conceived to perform electrical microwave spectroscopy measurements after electroporation.