Skip to Main content Skip to Navigation
Journal articles

Electro-Absorption Modulator vertically integrated on a VCSEL: microstrip-based high-speed electrical injection on top of a BCB layer

Abstract : Vertical-Cavity Surface-Emitting Lasers with vertically-integrated electro-absorption modulators (EAM-VCSELs) potentially can reach higher modulation bandwidths than directly current-modulated VCSELs. The aforementioned device modulation capabilities are however currently restricted by their electrical contact parasitics. It thus becomes critical to optimize their access line to improve performance. In this paper, we numerically and experimentally demonstrate that a microstrip (MS) access line using a planarized BCB layer exhibits improved high-frequency characteristics compared to the coplanar waveguide (CPW) access line used to-date since it reduces the losses induced by the doped substrates. We also use this opportunity to introduce an innovative technique for BCB-layer planarization which is not only compatible with the EAM-VCSEL double-mesa structure but is also independent of the device pitch. The resulting BCB layer dielectric permittivity and losses are measured up to 100 GHz and a side-by-side comparison of the electrical response of three-electrodes MS and CPW access lines is subsequently carried out. Finally, using the measured pad and access line RF responses and the EAM modulation characteristics, the devices with MS access are shown to be no longer limited by their electrode parasitics but by the modulator internal impedance.
Complete list of metadata

https://hal.laas.fr/hal-03012166
Contributor : Guilhem Almuneau <>
Submitted on : Wednesday, November 18, 2020 - 2:08:11 PM
Last modification on : Thursday, June 10, 2021 - 3:04:22 AM
Long-term archiving on: : Friday, February 19, 2021 - 7:42:21 PM

File

FINAL VERSION.pdf
Files produced by the author(s)

Identifiers

Citation

Ludovic Marigo-Lombart, Christophe Viallon, Alexandre Rumeau, Alexandre Arnoult, Aurelie Lecestre, et al.. Electro-Absorption Modulator vertically integrated on a VCSEL: microstrip-based high-speed electrical injection on top of a BCB layer. Journal of Lightwave Technology, Institute of Electrical and Electronics Engineers (IEEE)/Optical Society of America(OSA), 2019, 37 (15), pp.3861-3868. ⟨10.1109/jlt.2019.2921806⟩. ⟨hal-03012166⟩

Share

Metrics

Record views

75

Files downloads

97