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Book Section Year : 2021

Materials science issues related to the fabrication of highly doped junctions by laser annealing of Group IV semiconductors

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Micro and nanotechnologies/Microelectronics Materials Science [cond-mat.mtrl-sci]

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Submitted on : Friday, September 10, 2021-3:19:47 PM

Last modification on : Monday, April 17, 2023-6:32:11 PM

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hal-03341171 , version 1 (10-09-2021)

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  • HAL Id : hal-03341171 , version 1

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Ray Duffy, Enrico Napolitani, Fuccio Cristiano. Materials science issues related to the fabrication of highly doped junctions by laser annealing of Group IV semiconductors. Laser Annealing Processes in Semiconductor Technology. Theory, Modeling and Applications in Nanoelectronics, Chapter 5, Elsevier, pp.175-250, 2021, 9780128202555. ⟨hal-03341171⟩

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