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Fabrication and characterization of Si3N4-MIS structures on p-type diamond

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hal-03445543 , version 1 (24-11-2021)

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  • HAL Id : hal-03445543 , version 1

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Lya Fontaine, Karine Isoird, Josiane Tasselli, Emmanuel Scheid, Patrick Austin, et al.. Fabrication and characterization of Si3N4-MIS structures on p-type diamond. 31st International Conference on Diamond and Carbon Materials, Sep 2021, On line, Spain. ⟨hal-03445543⟩
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