Shock Tube Characterization of Air Blast Pressure Sensor Based on Ultra-Miniature Silicon Membrane and Piezoresistive Gauges - LAAS - Laboratoire d'Analyse et d'Architecture des Systèmes Accéder directement au contenu
Communication Dans Un Congrès Année : 2021

Shock Tube Characterization of Air Blast Pressure Sensor Based on Ultra-Miniature Silicon Membrane and Piezoresistive Gauges

Résumé

The damage of a blast wave is associated with the peak static overpressure. In order to measure accurately this parameter, transducers with reaction time < 1 µs are required. To fulfill these specifications, transducers must have very small sensing dimension (<100µm) as well as a high fundamental resonant frequency. A pressure transducer, designed for air blast monitoring, was manufactured. It is based on ultra-miniature silicon membrane whose deflection is monitored through silicon gauges. Shock tube measurement in the reflected configuration (i.e. when shock wave front is parallel to the transducer surface) indicates a sensor reaction time smaller than 0.5 µs.
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Dates et versions

hal-03670162 , version 1 (17-05-2022)

Identifiants

  • HAL Id : hal-03670162 , version 1

Citer

Jérôme Riondet, Anthony Coustou, Achour Bilel, Aurélie Lecestre, Samuel Charlot, et al.. Shock Tube Characterization of Air Blast Pressure Sensor Based on Ultra-Miniature Silicon Membrane and Piezoresistive Gauges. Micro and Nano Engineering Conference, Sep 2021, Turin, Italy. ⟨hal-03670162⟩
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