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, O2 (3 sccm), pression : 8.10 -3 mBar, puissance « ICP » : 450 W, puissance « bias » : 30 W. Plasma pour éliminer le reste de PMMA : 1 min, C4F8 (45 sccm), pp.3-35, 0200.
, Les échantillons sont immergés dans un bain d'acide fluorhydrique à 50 % en volume (KMG) pendant le temps de gravure spécifié dans le chapitre 2. Le bain est réalisé dans un bécher en téflon (environ 20 mL introduits) Lorsque plusieurs échantillons sont à graver, le même bain est utilisé pour tous les échantillons. 2 rinçages d'environ 10 secondes chacun sont réalisés en changeant la position de la pince entre les deux rinçages : le rinçage est effectué en
, oxyde natif formé : immersion pendant 30 secondes dans un bain de solution d'acide fluorhydrique à 5 % en volume (KMG), réalisée dans un bécher en téflon
, 10°C/min) jusqu'à 1000°C sous une atmosphère N2 (10 SLM)
, épaisseur d'oxyde thermique a été réalisée par ellipsométrie (profilomètre Horiba Jobin Yvon Uvisuel à modulation de phase) Les spectres sont acquis sur une plage de 0
, Cependant, afin de ne pas endommager les structures à observer, avec le faisceau d'ions utilisé lors du dépôt, un premier dépôt (épaisseur 300 nm) est réalisé par EBID (Electron Beam Induced Deposition) Pour l'EBID, la tension d'accélération est 5 kV et le courant associé au faisceau d'électrons est 22 nA. Pour l'IBID, la tension d'accélération est 30kV, le courant associé au faisceau d'ions 2,5 nA. La coupe a ensuite été réalisée avec une tension d'accélération de 30 kV
, SU-8 et silicium) du moule hydrophobe, ce qui est nécessaire pour faciliter le démoulage du PDMS après réticulation, une monocouche de FDTS (perfluorodécyltrichlorosilane)
, PDMS est ensuite coulé sur le(s) moule(s)
, diamètre nominal 80 nm), l'extrusion est réalisée en passant la suspension 31 fois (16 allers et 15 retours) au travers un filtre comprenant des pores de 100
, diamètre nominal 180 nm), l'extrusion est réalisée en passant la suspension 15 fois (8 allers et 7 retours
, mg/mL) est stockée à 4 °C et utilisée dans les trois jours. Les suspensions de concentration mentionnée dans le chapitre 4
, Des lamelles de microscopes (Fisher, épaisseur 0,13 mm) sont rincées à l'eau purifiée « Milli-Q » (obtenu avec un système de purification Milli-Q, Merck Millipore) puis à l'éthanol (KMG) puis à nouveau à l
, dans le cas où le premier nanopore scellé est le nanopore le plus éloigné de Rnanocanal (n°5 sur la Figure 6)