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Conception et réalisation d'une nouvelle génération de nano-capteurs de gaz à base de nanofils semiconducteurs

Brieux Durand 1, 2
1 LAAS-MPN - Équipe Matériaux et Procédés pour la Nanoélectronique
LAAS - Laboratoire d'analyse et d'architecture des systèmes
2 LAAS-MICA - Équipe MICrosystèmes d'Analyse
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : In recent years, efforts of research and development for gas sensors converged to use nanomaterials to optimize performance. This new generation promises many advantages especially in miniaturization and reduction of energy consumption. Furthermore, the gas detection parameters (sensitivity, detection limit, response time ...) are improved due to the high surface/volume ratio of the sensitive part. Thus, this sensors can be integrated in ultrasensitive detection systems, autonomous, compact and transportable. In this thesis, we propose to use 3D semiconductor nanowires networks to create highly sensitive and selective gas sensors. The objective of this work is to provide a highly sensitive sensor, featuring a low detection limit (in the ppb range) and embeddable in CMOS devices. In addition process is generic and adaptable to many types of materials to discriminate several gas and converge to electronic nose. The first part of the dissertation is based on development of a large scale, reproducible, compatible with Si processing industry and conventional tools (CMOS), to obtain a sensor based on a 3D nanowire architecture. The device is composed by two symmetrical aluminum contacts at each extremity of the nanowires, including a top contact done by air bridge approach. The second part of this work presents the gas performances of components and working mechanisms associated. A very high response (30%) is obtained at 50 ppb of NO2, compare to the state of the art, 25% reached for 200 ppb. This approach can measure selectively very low concentrations of gas (<1 ppb) in real working conditions: moisture (tested up to 70% moisture) and mixing with other more concentrated gas (interfering gas). In addition, the reversibility of the sensor is natural and occurs at room temperature without requiring specific conditions.
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Contributor : Arlette Evrard <>
Submitted on : Thursday, December 15, 2016 - 3:14:01 PM
Last modification on : Thursday, June 10, 2021 - 3:01:31 AM
Long-term archiving on: : Thursday, March 16, 2017 - 3:54:02 PM


  • HAL Id : tel-01417316, version 1


Brieux Durand. Conception et réalisation d'une nouvelle génération de nano-capteurs de gaz à base de nanofils semiconducteurs. Micro et nanotechnologies/Microélectronique. UPS Toulouse - Université Toulouse 3 Paul Sabatier, 2016. Français. ⟨tel-01417316⟩



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