Nouvelles architectures de composants photoniques par l'ingénierie du confinement électrique et optique

Gaël Lafleur 1
1 LAAS-PHOTO - Équipe Photonique
LAAS - Laboratoire d'analyse et d'architecture des systèmes [Toulouse]
Abstract : Optical and electrical confinement using Al(Ga)As layer oxidation is a key milestone in the fabrication of active and passive GaAs-based photonic components. To optimize those devices, through the control of the optical and electrical confinements, a better modelling of oxidation process and a better understanding of optical properties of aluminum oxide (AlOx) is required. One part of this work is focusing on a throughout experimental study of AlGaAs oxidation kinetics, where I studied different important parameters such as wafer temperature, gallium composition, atmospheric pressure and mesa geometry. Then, I developed a new predictive model taking into account the process anisotropy, thus allowing a better temporal and spatial of AlAs oxidation front evolution. Finally, I could exploit this technological process to realize whispering gallery mode microdisks as well as slot optical waveguides, and I have characterized this latter photonic devices.
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Optique / photonique. Université Paul Sabatier - Toulouse III, 2016. Français. 〈NNT : 2016TOU30263〉
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Gaël Lafleur. Nouvelles architectures de composants photoniques par l'ingénierie du confinement électrique et optique. Optique / photonique. Université Paul Sabatier - Toulouse III, 2016. Français. 〈NNT : 2016TOU30263〉. 〈tel-01449561v2〉

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