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Du transistor MOS aux capteurs et microsystèmes

Ali Boukabache 1
1 LAAS-MILE - Équipe Micro-Nanofluidique pour les sciences de la vie et de l’environnement
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : The research presented in this thesis is part of the general research conducted at the LAAS-CNRS by successive teams led by G.Blasquez, G.Sarrabayrouse, A.M.Gué, and which the title perfectly sums up. Thus, after a brief presentation of the approach used to generate, understand and identify the mechanisms of 1 / f noise generation in MOS devices, a work on developing MOS dosimeters has ensured a kind of continuity between research And industrial applications. An important part of this synthesis is devoted to a particular family of so-called 'membrane' sensors, in this case sensors for measuring biofilms and pressure. A kind of technological continuity links the two subjects treated, and the results obtained in terms of modeling and realization make them indispensable tools in any integration approach of microsystems. The third part is devoted to research on microfluidics and its applications in fields as varied as those of biology, telecommunications, water analysis or the vertical integration of Integrated Circuits
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Accreditation to supervise research
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  • HAL Id : tel-01482436, version 1

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Ali Boukabache. Du transistor MOS aux capteurs et microsystèmes. Micro et nanotechnologies/Microélectronique. UPS Toulouse - Université Toulouse 3 Paul Sabatier, 2016. ⟨tel-01482436⟩

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