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Structuration de collecteurs de courant d'or pour la réalisation de micro-supercondensateurs à base d'oxyde de ruthénium

Anaïs Ferris 1
1 LAAS-ISGE - Équipe Intégration de Systèmes de Gestion de l'Énergie
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : The increasing importance of portable and wearable electronics as well as embedded wireless sensor networks has made energy autonomy a critical issue. Micro-energy autonomy solutions based on the combination of energy harvesting and storage may play a decisive role. However, the short lifetime of micro-batteries is problematic. Micro-supercapacitors are a promising solution in terms of energy storage for embedded systems on the account of their important lifetime. In this work we have focused on the optimization of the performances of micro-supercapacitors in terms of energy and power density. As the capacitance is directly related to the accessible surface area of the electrodes, we have investigated the structuration of the current collectors in order to improve the performances of ruthenium oxide-based micro-supercapacitors. Two mains technics have been studied to obtain three dimensional structures. In a first phase, the oblique angle physical vapor deposition (OAD) has been investigated to fabricate a columnar gold structure, subsequently covered by an electrochemical ruthenium oxide. In a second phase, a highly porous gold architecture has been studied using electrodeposition via a hydrogen bubbles dynamic template. The ruthenium oxide electrodeposited on the resulting mesoporous gold structure shows good compatibility, in terms of homogeneous deposition, with a significant capacitance at slow rate (> and an important cyclability. As proof of concept, a device has been designed in a stack configuration with good performances. Moreover, the technology finalized for electrodes fabrication has been transferred to the micro-scale on planar interdigitated devices using a suitable photolithography process.
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Submitted on : Wednesday, April 5, 2017 - 11:20:32 AM
Last modification on : Tuesday, October 19, 2021 - 11:17:54 PM
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  • HAL Id : tel-01502210, version 1


Anaïs Ferris. Structuration de collecteurs de courant d'or pour la réalisation de micro-supercondensateurs à base d'oxyde de ruthénium. Micro et nanotechnologies/Microélectronique. Université Toulouse 3 Paul Sabatier, 2017. Français. ⟨tel-01502210v1⟩



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