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Étude des potentialités de la transduction diélectrique de haute permittivité pour les résonateurs NEMS et MEMS

Cécile Fuinel 1
1 LAAS-MEMS - Équipe Microsystèmes électromécaniques
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : Since two decades now, microscopic electronic devices including moving parts, called MicroElectroMechanical Systems (MEMS) have had a growing impact on industry and daily lives. Their range of application is already wide: from actuators (inkjet print heads, digital cinema projectors, etc.) to mechanical sensors (microphones, accelerometers, etc.). There is a growing research effort in the biosensing field as well. One of the main challenges for this application is to integrate a miniaturized and robust element to a vibrating beam-like structure, in order to achieve electromechanical actuation and detection, i.e. to convert an electrical signal into vibration and vice versa. In this work, we studied the integration of three dielectric materials on silicon microcantilevers, and successfully demonstrated the feasibility of simultaneous flexural actuation and detection of the structures by mean of dielectric transduction. Those results are one step forward the elaboration of mature detection systems.
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https://hal.laas.fr/tel-02003088
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Submitted on : Friday, February 1, 2019 - 10:04:09 AM
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  • HAL Id : tel-02003088, version 1

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Cécile Fuinel. Étude des potentialités de la transduction diélectrique de haute permittivité pour les résonateurs NEMS et MEMS. Micro et nanotechnologies/Microélectronique. Université Toulouse 3 Paul Sabatier, 2018. Français. ⟨tel-02003088v1⟩

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