K. Strimbu and J. A. Tavel, What are biomarkers?, Curr. Opin. HIV AIDS, vol.5, issue.6, pp.463-466, 2010.

S. Nahavandi, Microfluidic platforms for biomarker analysis, Lab Chip, vol.14, issue.9, pp.1496-1514, 2014.

J. M. Heather and B. Chain, The sequence of sequencers: The history of sequencing DNA, Genomics, vol.107, issue.1, pp.1-8, 2016.

R. C. Mcglennen, Miniaturization Technologies for Molecular Diagnostics, Clin. Chem, issue.3, p.10, 2001.

S. Y. Lee, D. Lee, and T. Y. Kim, Systems biotechnology for strain improvement, Trends Biotechnol, vol.23, issue.7, pp.349-358, 2005.

L. Hood, R. Balling, and C. Auffray, Revolutionizing medicine in the 21st century through systems approaches, Biotechnol. J, vol.7, issue.8, pp.992-1001, 2012.

A. J. De-mello and N. Beard, Focus. Dealing with 'real' samples: sample pre-treatment in microfluidic systems, Lab Chip, vol.3, issue.1, pp.11-20, 2003.

D. Mark, S. Haeberle, G. Roth, F. Stetten, and R. Zengerle, Microfluidic lab-on-a-chip platforms: requirements, characteristics and applications, Chem. Soc. Rev, vol.39, issue.3, p.1153, 2010.

I. Schimke, Quality and timeliness in medical laboratory testing, Anal. Bioanal. Chem, vol.393, issue.5, pp.1499-1504, 2009.

A. St-john and C. P. Price, Existing and Emerging Technologies for Point-of-Care Testing, Clin. Biochem. Rev, vol.35, issue.3, pp.155-167, 2014.

L. Gervais, N. De-rooij, and E. Delamarche, Microfluidic Chips for Point-of-Care Immunodiagnostics, Adv. Mater, vol.23, issue.24, pp.151-176, 2011.

, Freestyle

L. Benesova, Mutation-based detection and monitoring of cell-free tumor DNA in peripheral blood of cancer patients, Anal. Biochem, vol.433, issue.2, pp.227-234, 2013.

C. Kohler, Z. Barekati, R. Radpour, and X. Y. Zhong, Cell-free DNA in the Circulation as a Potential Cancer Biomarker, ANTICANCER Res, p.6, 2011.

R. Malbec, Microfluidic system µLAS for the analysis of residual DNA : Application to the diagnostic of Huntington's disease and the analysis of circulating DNA, INSA de Toulouse, 2018.

J. Cho and H. Sung, Proteomic approaches in lung cancer biomarker development, Expert Rev. Proteomics, vol.6, issue.1, pp.27-42, 2009.

K. Shigeyasu, S. Toden, T. J. Zumwalt, Y. Okugawa, and A. Goel, Emerging Role of MicroRNAs as Liquid Biopsy Biomarkers in Gastrointestinal Cancers, Clin. Cancer Res, vol.23, issue.10, pp.2391-2399, 2017.

R. L. Siegel, K. D. Miller, and A. , Cancer statistics, vol.66, pp.7-30, 2016.

V. Moutardier, M. Giovannini, V. Magnin, F. Viret, B. Lelong et al., Comment améliorer le traitement des adénocarcinomes de la tête du pancréas résécables ?, Gastroentérologie Clin. Biol, vol.28, issue.11, pp.1083-1091, 2004.

J. P. Neoptolemos, ESPAC-4: A multicenter, international, open-label randomized controlled phase III trial of adjuvant combination chemotherapy of gemcitabine (GEM) and capecitabine (CAP) versus monotherapy gemcitabine in patients with resected pancreatic ductal adenocarcinoma, J. Clin. Oncol, vol.34, issue.18_suppl, pp.4006-4006, 2016.

C. C. Pritchard, H. H. Cheng, and M. Tewari, MicroRNA profiling: approaches and considerations, Nat. Rev. Genet, vol.13, issue.5, pp.358-369, 2012.

J. A. Weber, The MicroRNA Spectrum in 12 Body Fluids, Clin. Chem, vol.56, issue.11, pp.1733-1741, 2010.

M. C. Du-rieu, MicroRNA-21 Is Induced Early in Pancreatic Ductal Adenocarcinoma Precursor Lesions, Clin. Chem, vol.56, issue.4, pp.603-612, 2010.
URL : https://hal.archives-ouvertes.fr/inserm-00480878

L. Buscail, First-in-man Phase 1 Clinical Trial of Gene Therapy for Advanced Pancreatic Cancer: Safety, Biodistribution, and Preliminary Clinical Findings, Mol. Ther, vol.23, issue.4, pp.779-789, 2015.
URL : https://hal.archives-ouvertes.fr/hal-01926961

M. Humeau, Salivary MicroRNA in Pancreatic Cancer Patients, PLOS ONE, vol.10, issue.6, p.130996, 2015.

P. S. Mitchell, Circulating microRNAs as stable blood-based markers for cancer detection, Proc. Natl. Acad. Sci, vol.105, pp.10513-10518, 2008.

K. A. Cissell and S. K. Deo, Trends in microRNA detection, Anal. Bioanal. Chem, vol.394, issue.4, pp.1109-1116, 2009.

J. Cacheux, Development of an autonomous system for the detection and quantification of microRNAs with a nanofluidic platform for the management of pancreatic cancer, Université Toulouse 3 Paul Sabatier (UT3 Paul Sabatier), 2018.

A. P. Turner, Biosensors: sense and sensibility, Chem. Soc. Rev, vol.42, issue.8, p.3184, 2013.

J. L. Arlett, E. B. Myers, and M. L. Roukes, Comparative advantages of mechanical biosensors, Nat. Nanotechnol, vol.6, issue.4, pp.203-215, 2011.

B. D. Pendley and E. Lindner, Medical Sensors for the Diagnosis and Management of Disease: The Physician Perspective, ACS Sens, vol.2, issue.11, pp.1549-1552, 2017.

B. N. Johnson and R. Mutharasan, Biosensor-based microRNA detection: techniques, design, performance, and challenges, The Analyst, vol.139, issue.7, p.1576, 2014.

S. Das, H. Vikalo, and A. Hassibi, On scaling laws of biosensors: A stochastic approach, J. Appl. Phys, vol.105, issue.10, p.102021, 2009.

M. J. Madou and R. Cubicciotti, Scaling issues in chemical and biological sensors, Proc. IEEE, vol.91, pp.830-838, 2003.

N. L. Anderson and N. G. Anderson, The Human Plasma Proteome: History, Character, and Diagnostic Prospects, vol.1, pp.845-867, 2002.

R. Mishra and M. Hegner, Effect of non-specific species competition from total RNA on the static mode hybridization response of nanomechanical assays of oligonucleotides, Nanotechnology, vol.25, issue.22, p.225501, 2014.

S. Nie, An automated integrated platform for rapid and sensitive multiplexed protein profiling using human saliva samples, Lab. Chip, vol.14, issue.6, p.1087, 2014.

G. Luka, Microfluidics Integrated Biosensors: A Leading Technology towards Lab-on-a-Chip and Sensing Applications, vol.15, pp.30011-30031, 2015.

P. Yager, Microfluidic diagnostic technologies for global public health, Nature, vol.442, issue.7101, pp.412-418, 2006.

C. D. Chin, V. Linder, and S. K. Sia, Lab-on-a-chip devices for global health: Past studies and future opportunities, Lab Chip, vol.7, issue.1, pp.41-57, 2007.

J. D. Cohen, Detection and localization of surgically resectable cancers with a multi-analyte blood test, Science, vol.359, issue.6378, pp.926-930, 2018.

J. Ko, S. N. Baldassano, P. Loh, K. Kording, B. Litt et al., Machine learning to detect signatures of disease in liquid biopsies -a user's guide, Lab. Chip, vol.18, issue.3, pp.395-405, 2018.

X. Li, M. Mauro, and Z. Williams, Comparison of plasma extracellular RNA isolation kits reveals kit-dependent biases, BioTechniques, vol.59, issue.1, 2015.

W. S. Mielczarek, E. A. Obaje, T. T. Bachmann, and M. Kersaudy-kerhoas, Microfluidic blood plasma separation for medical diagnostics: is it worth it?, Lab. Chip, vol.16, issue.18, pp.3441-3448, 2016.

J. Kim, M. Johnson, P. Hill, and B. K. Gale, Microfluidic sample preparation: cell lysis and nucleic acid purification, Integr. Biol, vol.1, issue.10, p.574, 2009.

R. Mariella, Sample preparation: the weak link in microfluidics-based biodetection, Biomed. Microdevices, vol.10, issue.6, pp.777-784, 2008.

X. Duan, Y. Li, N. K. Rajan, D. A. Routenberg, Y. Modis et al., Quantification of the affinities and kinetics of protein interactions using silicon nanowire biosensors, Nat. Nanotechnol, vol.7, issue.6, pp.401-407, 2012.

C. Ayela and L. Nicu, Micromachined piezoelectric membranes with high nominal quality factors in newtonian liquid media: A Lamb's model validation at the microscale, Sens. Actuators B Chem, vol.123, issue.2, pp.860-868, 2007.

B. N. Johnson and R. Mutharasan, Sample Preparation-Free, Real-Time Detection of microRNA in Human Serum Using Piezoelectric Cantilever Biosensors at Attomole Level, Anal. Chem, vol.84, issue.23, pp.10426-10436, 2012.

I. A. Zaporozhchenko, A phenol-free method for isolation of microRNA from biological fluids, Anal. Biochem, vol.479, pp.43-47, 2015.

L. Moldovan, K. E. Batte, J. Trgovcich, J. Wisler, C. B. Marsh et al., Methodological challenges in utilizing miRNAs as circulating biomarkers, J. Cell. Mol. Med, vol.18, issue.3, pp.371-390, 2014.

L. Nicu and T. Leïchlé, Biosensors and tools for surface functionalization from the macro-to the nanoscale: The way forward, J. Appl. Phys, vol.104, issue.11, p.111101, 2008.

E. K. Sackmann, A. L. Fulton, and D. J. Beebe, The present and future role of microfluidics in biomedical research, Nature, vol.507, issue.7491, pp.181-189, 2014.

O. S. Wolfbeis, Editorial: Probes, Sensors, and Labels: Why is Real Progress Slow?, Angew. Chem. Int. Ed, vol.52, issue.38, pp.9864-9865, 2013.

I. Sarangadharan, High sensitivity cardiac troponin I detection in physiological environment using AlGaN/GaN High Electron Mobility Transistor (HEMT) Biosensors, Biosens. Bioelectron, vol.100, pp.282-289, 2018.

G. M. Whitesides, The origins and the future of microfluidics, Nature, vol.442, issue.7101, pp.368-373, 2006.

S. C. Terry, J. H. Jerman, and J. B. Angell, A gas chromatographic air analyzer fabricated on a silicon wafer, IEEE Trans. Electron Devices, vol.26, issue.12, pp.1880-1886, 1979.

D. R. Reyes, D. Iossifidis, P. Auroux, and A. Manz, Micro Total Analysis Systems. 1. Introduction, Theory, and Technology, Anal. Chem, vol.74, issue.12, pp.2623-2636, 2002.

C. Wei, Using a microfluidic device for 1 l DNA microarray hybridization in 500 s, Nucleic Acids Res, vol.33, issue.8, pp.78-78, 2005.

C. Rivet, H. Lee, A. Hirsch, S. Hamilton, and H. Lu, Microfluidics for medical diagnostics and biosensors, Microfluid. Eng, vol.66, issue.7, pp.1490-1507, 2011.

S. Haeberle and R. Zengerle, Microfluidic platforms for lab-on-a-chip applications, Lab. Chip, vol.7, issue.9, p.1094, 2007.

G. M. Whitesides, What Comes Next?, Lab Chip, vol.11, issue.2, pp.191-193, 2011.

J. Edel, A. , P. O'brien, and N. , , 2009.

T. Tsukahara, K. Mawatari, and T. Kitamori, Integrated extended-nano chemical systems on a chip, Chem. Soc. Rev, vol.39, issue.3, p.1000, 2010.

C. Chou, Sorting biomolecules with microdevices, ELECTROPHORESIS, vol.21, issue.1, pp.81-90, 1999.

J. Fu, R. B. Schoch, A. L. Stevens, S. R. Tannenbaum, and J. Han, A patterned anisotropic nanofluidic sieving structure for continuous-flow separation of DNA and proteins, Nat. Nanotechnol, vol.2, issue.2, pp.121-128, 2007.

Y. Wang, A. L. Stevens, and J. Han, Million-fold Preconcentration of Proteins and Peptides by Nanofluidic Filter, Anal. Chem, vol.77, issue.14, pp.4293-4299, 2005.

S. J. Kim, Y. Song, and J. Han, Nanofluidic concentration devices for biomolecules utilizing ion concentration polarization: theory, fabrication, and applications, Chem. Soc. Rev, vol.39, issue.3, p.912, 2010.

J. O. Tegenfeldt, Micro-and nanofluidics for DNA analysis, Anal. Bioanal. Chem, vol.378, issue.7, pp.1678-1692, 2004.

J. Yeh, A. Taloni, Y. Chen, and C. Chou, Entropy-Driven Single Molecule Tug-of-War of DNA at Micro?Nanofluidic Interfaces, Nano Lett, vol.12, issue.3, pp.1597-1602, 2012.

M. Foquet, J. Korlach, W. R. Zipfel, W. W. Webb, and H. G. Craighead, Focal Volume Confinement by Submicrometer-Sized Fluidic Channels, Anal. Chem, vol.76, issue.6, pp.1618-1626, 2004.

M. J. Shon and A. E. Cohen, Mass Action at the Single-Molecule Level, J. Am. Chem. Soc, vol.134, issue.35, pp.14618-14623, 2012.

L. Rubinovich and M. Polak, The Intrinsic Role of Nanoconfinement in Chemical Equilibrium: Evidence from DNA Hybridization, Nano Lett, vol.13, issue.5, pp.2247-2251, 2013.

C. J. Galvin, K. Shirai, A. Rahmani, K. Masaya, and A. Q. Shen, Total Capture, Convection-Limited Nanofluidic Immunoassays Exhibiting Nanoconfinement Effects, Anal. Chem, vol.90, issue.5, pp.3211-3219, 2018.

R. Riehn, M. Lu, Y. Wang, S. F. Lim, E. C. Cox et al., Restriction mapping in nanofluidic devices, Proc. Natl. Acad. Sci, vol.102, issue.29, pp.10012-10016, 2005.

Y. M. Wang, Single-molecule studies of repressor-DNA interactions show long-range interactions, Proc. Natl. Acad. Sci, vol.102, pp.9796-9801, 2005.

W. Reisner, Single-molecule denaturation mapping of DNA in nanofluidic channels, Proc. Natl. Acad. Sci, vol.107, issue.30, pp.13294-13299, 2010.

E. T. Lam, Genome mapping on nanochannel arrays for structural variation analysis and sequence assembly, Nat. Biotechnol, vol.30, issue.8, pp.771-776, 2012.

T. Osaki, H. Suzuki, B. L. Pioufle, and S. Takeuchi, Multichannel Simultaneous Measurements of Single-Molecule Translocation in ?-Hemolysin Nanopore Array, Anal. Chem, vol.81, issue.24, pp.9866-9870, 2009.
URL : https://hal.archives-ouvertes.fr/hal-00599956

A. Han, Label-free detection of single protein molecules and protein? protein interactions using synthetic nanopores, Anal. Chem, vol.80, issue.12, pp.4651-4658, 2008.

M. Van-den-hout, G. M. Skinner, S. Klijnhout, V. Krudde, and N. H. Dekker, The Passage of Homopolymeric RNA through Small Solid-State Nanopores, Small, vol.7, issue.15, pp.2217-2224, 2011.

A. P. Ivanov, DNA tunneling detector embedded in a nanopore, Nano Lett, vol.11, issue.1, pp.279-285, 2010.

S. M. Iqbal, D. Akin, and R. Bashir, Solid-state nanopore channels with DNA selectivity, Nat. Nanotechnol, vol.2, issue.4, pp.243-248, 2007.

R. Wei, V. Gatterdam, R. Wieneke, R. Tampé, and U. Rant, Stochastic sensing of proteins with receptor-modified solid-state nanopores, Nat. Nanotechnol, vol.7, issue.4, pp.257-263, 2012.

S. Y. Yang, DNA-Functionalized Nanochannels for SNP Detection, Nano Lett, vol.11, issue.3, pp.1032-1035, 2011.

K. Shirai, K. Mawatari, and T. Kitamori, Extended Nanofluidic Immunochemical Reaction with Femtoliter Sample Volumes, Small, vol.10, issue.8, pp.1514-1522, 2014.

R. Karnik, K. Castelino, R. Fan, P. Yang, and A. Majumdar, Effects of Biological Reactions and Modifications on Conductance of Nanofluidic Channels, Nano Lett, vol.5, issue.9, pp.1638-1642, 2005.

R. B. Schoch, L. F. Cheow, and J. Han, Electrical Detection of Fast Reaction Kinetics in Nanochannels with an Induced Flow, Nano Lett, vol.7, issue.12, pp.3895-3900, 2007.

N. F. Durand and P. Renaud, Label-free determination of protein-surface interaction kinetics by ionic conductance inside a nanochannel, Lab Chip, vol.9, issue.2, pp.319-324, 2009.

, Bionano Genomics | Genome Mapping Reveals True Genome Structure, p.8, 2018.

. Oxford-nanopore-technologies, , p.8, 2018.

, Abionic plateforme de dépistage biomédical -Abionic, p.8, 2018.

R. B. Schoch, J. Han, and P. Renaud, Transport phenomena in nanofluidics, Rev. Mod. Phys, vol.80, issue.3, pp.839-883, 2008.

Q. Xia, K. J. Morton, R. H. Austin, and S. Y. Chou, Sub-10 nm Self-Enclosed Self-Limited Nanofluidic Channel Arrays, Nano Lett, vol.8, issue.11, pp.3830-3833, 2008.

Y. H. Cho, S. W. Lee, B. J. Kim, and T. Fujii, Fabrication of silicon dioxide submicron channels without nanolithography for single biomolecule detection, Nanotechnology, vol.18, issue.46, p.465303, 2007.

C. Lee, E. H. Yang, N. V. Myung, and T. George, A Nanochannel Fabrication Technique without Nanolithography, Nano Lett, vol.3, issue.10, pp.1339-1340, 2003.

H. Cao, Fabrication of 10 nm enclosed nanofluidic channels, Appl. Phys. Lett, vol.81, issue.1, pp.174-176, 2002.

B. Yang and S. W. Pang, Multiple level nanochannels fabricated using reversal UV nanoimprint, J. Vac. Sci. Technol. B Microelectron. Nanometer Struct, vol.24, issue.6, p.2984, 2006.

J. J. Dumond, H. Y. Low, and I. Rodriguez, Isolated, sealed nanofluidic channels formed by combinatorial-mould nanoimprint lithography, Nanotechnology, vol.17, issue.8, 1975.

L. J. Guo, X. Cheng, and C. Chou, Fabrication of Size-Controllable Nanofluidic Channels by Nanoimprinting and Its Application for DNA Stretching, Nano Lett, vol.4, issue.1, pp.69-73, 2004.

M. Y. Balakirev, Photochemical Patterning of Biological Molecules Inside a Glass Capillary, Anal. Chem, vol.77, issue.17, pp.5474-5479, 2005.

B. He, T. J. Morrow, and C. D. Keating, Nanowire sensors for multiplexed detection of biomolecules, Curr. Opin. Chem. Biol, vol.12, issue.5, pp.522-528, 2008.

J. R. Lepock, Protein denaturation in intact hepatocytes and isolated cellular organelles during heat shock, J. Cell Biol, vol.122, issue.6, pp.1267-1276, 1993.

T. Ito, K. Sobue, and S. Ohya, Water glass bonding for micro-total analysis system, Sens. Actuators B Chem, vol.81, issue.2-3, pp.187-195, 2002.

L. Chen, Bonding of glass-based microfluidic chips at low-or room-temperature in routine laboratory, Sens. Actuators B Chem, vol.119, issue.1, pp.335-344, 2006.

J. Gu, R. Gupta, C. Chou, Q. Wei, and F. Zenhausern, A simple polysilsesquioxane sealing of nanofluidic channels below 10 nm at room temperature, Lab. Chip, vol.7, issue.9, p.1198, 2007.

T. Leichlé, Y. Lin, P. Chiang, S. Hu, K. Liao et al., Biosensor-compatible encapsulation for pre-functionalized nanofluidic channels using asymmetric plasma treatment, Sens. Actuators B Chem, vol.161, issue.1, pp.805-810, 2012.

T. Leïchlé and C. Chou, Biofunctionalized nanoslits for wash-free and spatially resolved realtime sensing with full target capture, Biomicrofluidics, vol.9, issue.3, p.34103, 2015.

P. Teerapanich, Fluorescence-based nanofluidic biosensor platform for real-time measurement of protein binding kinetics, 2015.
URL : https://hal.archives-ouvertes.fr/tel-01285405

T. M. Squires, R. J. Messinger, and S. R. Manalis, Making it stick: convection, reaction and diffusion in surface-based biosensors, Nat. Biotechnol, vol.26, issue.4, pp.417-426, 2008.

T. Gervais and K. F. Jensen, Mass transport and surface reactions in microfluidic systems, Chem. Eng. Sci, vol.61, issue.4, pp.1102-1121, 2006.

M. Zimmermann, E. Delamarche, M. Wolf, and P. Hunziker, Modeling and Optimization of High-Sensitivity, Low-Volume Microfluidic-Based Surface Immunoassays, Biomed. Microdevices, vol.7, issue.2, pp.99-110, 2005.

G. P. Acuna, Distance Dependence of Single-Fluorophore Quenching by Gold Nanoparticles Studied on DNA Origami, ACS Nano, vol.6, issue.4, pp.3189-3195, 2012.

P. Teerapanich, M. Pugnière, C. Henriquet, Y. Lin, C. Chou et al., Nanofluidic Fluorescence Microscopy (NFM) for real-time monitoring of protein binding kinetics and affinity studies, Biosens. Bioelectron, vol.88, pp.25-33, 2017.
URL : https://hal.archives-ouvertes.fr/hal-01964833

U. Piran and W. J. Riordan, Dissociation rate constant of the biotin-streptavidin complex, J. Immunol. Methods, vol.133, issue.1, pp.141-143, 1990.

W. K. Coltro, R. Neves, A. Motheo, J. A. Da-silva, and E. Carrilho, Microfluidic devices with integrated dual-capacitively coupled contactless conductivity detection to monitor binding events in real time, Sens. Actuators B Chem, vol.192, pp.239-246, 2014.

R. Agata, G. Grasso, and G. Spoto, Real-Time Binding Kinetics Monitored with Surface Plasmon Resonance Imaging in a Diffusion-Free Environment, Open Spectrosc. J, vol.2, issue.1, pp.1-9, 2008.

M. Srisa-art, E. C. Dyson, A. J. , and J. B. Edel, Monitoring of Real-Time Streptavidin?Biotin Binding Kinetics Using Droplet Microfluidics, Anal. Chem, vol.80, issue.18, pp.7063-7067, 2008.

K. Hosokawa, M. Omata, K. Sato, and M. Maeda, Power-free sequential injection for microchip immunoassay toward point-of-care testing, Lab Chip, vol.6, issue.2, pp.236-241, 2006.

K. Lee, Y. Su, S. Chen, F. Tseng, and G. Lee, Microfluidic systems integrated with two-dimensional surface plasmon resonance phase imaging systems for microarray immunoassay, Biosens. Bioelectron, vol.23, issue.4, pp.466-472, 2007.

A. T. Pereira, P. Novo, D. M. Prazeres, V. Chu, and J. P. Conde, Heterogeneous immunoassays in microfluidic format using fluorescence detection with integrated amorphous silicon photodiodes, Biomicrofluidics, vol.5, issue.1, p.14102, 2011.

R. L. Rich, J. G. Quinn, T. Morton, J. D. Stepp, and D. G. Myszka, Biosensor-based fragment screening using FastStep injections, Anal. Biochem, vol.407, issue.2, pp.270-277, 2010.

J. G. Quinn, Modeling Taylor dispersion injections: Determination of kinetic/affinity interaction constants and diffusion coefficients in label-free biosensing, Anal. Biochem, vol.421, issue.2, pp.391-400, 2012.

O. Nahshol, V. Bronner, A. Notcovich, L. Rubrecht, D. Laune et al., Parallel kinetic analysis and affinity determination of hundreds of monoclonal antibodies using the ProteOn XPR36, Anal. Biochem, vol.383, issue.1, pp.52-60, 2008.

P. Teerapanich, Nanofluidic fluorescence microscopy with integrated concentration gradient generation for one-shot parallel kinetic assays, Sens. Actuators B Chem, vol.274, pp.338-342, 2018.
URL : https://hal.archives-ouvertes.fr/hal-01964831

S. Kim, H. J. Kim, and N. L. Jeon, Biological applications of microfluidic gradient devices, Integr. Biol, vol.2, issue.11, p.584, 2010.

M. Humeau, J. Torrisani, and P. Cordelier, miRNA in clinical practice: Pancreatic cancer, Clin. Biochem, vol.46, issue.10, pp.933-936, 2013.

J. Cacheux, M. Brut, A. Bancaud, P. Cordelier, and T. Leïchlé, Spatial Analysis of Nanofluidic-Embedded Biosensors for Wash-Free Single-Nucleotide Difference Discrimination, ACS Sens, vol.3, issue.3, pp.606-611, 2018.
URL : https://hal.archives-ouvertes.fr/hal-01762631

H. R. Yoon, J. M. Lee, J. Jung, C. Lee, B. H. Chung et al., Highly improved specificity for hybridization-based microRNA detection by controlled surface dissociation, The Analyst, vol.139, issue.1, pp.259-265, 2014.

C. Chou, T. Leichle, Y. Lin, and P. Teerapanich, Sensing device, and sensing system and sensing method using the same, vol.9958396, 2018.

C. Chou, T. Leichle, Y. Lin, and P. Teerapanich, Sensing device, and sensing system and sensing method using the same, vol.16, 2015.

?. ???, ?. , ?. , and &. ??????????????????, , 2015.

S. Núñez, J. Venhorst, and C. G. Kruse, Target-drug interactions: first principles and their application to drug discovery, Drug Discov. Today, vol.17, issue.1-2, pp.10-22, 2012.

Y. Lin, Y. Huang, P. Teerapanich, T. Leïchlé, and C. Chou, Multiplexed immunosensing and kinetics monitoring in nanofluidic devices with highly enhanced target capture efficiency, Biomicrofluidics, vol.10, issue.3, p.34114, 2016.
URL : https://hal.archives-ouvertes.fr/hal-01964838

A. Agarwal, G. Snyder, and D. Ressler, The current and future state of companion diagnostics, Pharmacogenomics Pers. Med, p.99, 2015.

J. Lichtenberg, Sample pretreatment on microfabricated devices, Talanta, vol.56, issue.2, pp.233-266, 2002.

R. H. Liu, J. Yang, R. Lenigk, J. Bonanno, and P. Grodzinski, Self-Contained, Fully Integrated Biochip for Sample Preparation, Polymerase Chain Reaction Amplification, and DNA Microarray Detection, Anal. Chem, vol.76, issue.7, pp.1824-1831, 2004.

E. Zonta, Multiplex Detection of Rare Mutations by Picoliter Droplet Based Digital PCR: Sensitivity and Specificity Considerations, PLOS ONE, vol.11, issue.7, p.159094, 2016.
URL : https://hal.archives-ouvertes.fr/inserm-02299556

J. Yang, A microfluidic device for rapid quantification of cell-free DNA in patients with severe sepsis, Lab. Chip, vol.15, issue.19, pp.3925-3933, 2015.

B. C. Giordano, D. S. Burgi, S. J. Hart, and A. Terray, On-line sample pre-concentration in microfluidic devices: A review, Anal. Chim. Acta, vol.718, pp.11-24, 2012.

B. J. Sanghavi, Ultrafast immunoassays by coupling dielectrophoretic biomarker enrichment in nanoslit channel with electrochemical detection on graphene, Lab. Chip, vol.15, issue.24, pp.4563-4570, 2015.

E. Bisceglia, A generic and label free method based on dielectrophoresis for the continuous separation of microorganism from whole blood samples, Sens. Actuators B Chem, vol.212, pp.335-343, 2015.
URL : https://hal.archives-ouvertes.fr/hal-01121775

Y. Wang and J. Han, Pre-binding dynamic range and sensitivity enhancement for immunosensors using nanofluidic preconcentrator, Lab. Chip, vol.8, issue.3, p.392, 2008.

R. Kwak, S. J. Kim, and J. Han, Continuous-Flow Biomolecule and Cell Concentrator by Ion Concentration Polarization, Anal. Chem, vol.83, issue.19, pp.7348-7355, 2011.

A. Persat, L. A. Marshall, and J. G. Santiago, Purification of Nucleic Acids from Whole Blood Using Isotachophoresis, Anal. Chem, vol.81, issue.22, pp.9507-9511, 2009.

J. Pipper, Y. Zhang, P. Neuzil, and T. Hsieh, Clockwork PCR Including Sample Preparation, Angew. Chem. Int. Ed, vol.47, issue.21, pp.3900-3904, 2008.

J. Ducrée, S. Haeberle, S. Lutz, S. Pausch, F. Stetten et al., The centrifugal microfluidic Bio-Disk platform, J. Micromechanics Microengineering, vol.17, issue.7, pp.103-115, 2007.

C. Chen, P. Lin, and C. Chung, Microfluidic chip for plasma separation from undiluted human whole blood samples using low voltage contactless dielectrophoresis and capillary force, Lab. Chip, vol.14, issue.12, p.1996, 2014.

C. Szydzik, K. Khoshmanesh, A. Mitchell, and C. Karnutsch, Microfluidic platform for separation and extraction of plasma from whole blood using dielectrophoresis, Biomicrofluidics, vol.9, issue.6, p.64120, 2015.

L. Van-heirstraeten, Integrated DNA and RNA extraction and purification on an automated microfluidic cassette from bacterial and viral pathogens causing communityacquired lower respiratory tract infections, Lab Chip, vol.14, issue.9, pp.1519-1526, 2014.

J. Kim, J. Cho, and S. Paek, Functional Membrane-Implanted Lab-on-a-Chip for Analysis of Percent HDL Cholesterol, Anal. Chem, vol.77, issue.24, pp.7901-7907, 2005.

C. C. Striemer, T. R. Gaborski, J. L. Mcgrath, and P. M. Fauchet, Charge-and size-based separation of macromolecules using ultrathin silicon membranes, Nature, vol.445, issue.7129, pp.749-753, 2007.

H. Wei, Particle sorting using a porous membrane in a microfluidic device, Lab Chip, vol.11, issue.2, pp.238-245, 2011.

R. S. Foote, J. Khandurina, S. C. Jacobson, and J. M. Ramsey, Preconcentration of Proteins on Microfluidic Devices Using Porous Silica Membranes, Anal. Chem, vol.77, issue.1, pp.57-63, 2005.

R. T. Kelly, Y. Li, and A. T. Woolley, Phase-Changing Sacrificial Materials for Interfacing Microfluidics with Ion-Permeable Membranes To Create On-Chip Preconcentrators and Electric Field Gradient Focusing Microchips, Anal. Chem, vol.78, issue.8, pp.2565-2570, 2006.

J. H. Lee, Y. Song, and J. Han, Multiplexed proteomic sample preconcentration device using surface-patterned ion-selective membrane, Lab. Chip, vol.8, issue.4, p.596, 2008.

J. Jong, R. G. Lammertink, and M. Wessling, Membranes and microfluidics: a review, Lab. Chip, vol.6, issue.9, p.1125, 2006.

B. Chueh, D. Huh, C. R. Kyrtsos, T. Houssin, N. Futai et al., Leakage-Free Bonding of Porous Membranes into Layered Microfluidic Array Systems, Anal. Chem, vol.79, issue.9, pp.3504-3508, 2007.

J. Ou, Integration of Dialysis Membranes into a Poly(dimethylsiloxane) Microfluidic Chip for Isoelectric Focusing of Proteins Using Whole-Channel Imaging Detection, Anal. Chem, vol.80, issue.19, pp.7401-7407, 2008.

J. Moorthy and D. J. Beebe, In situ fabricated porous filters for microsystems, Lab. Chip, vol.3, issue.2, p.62, 2003.

S. Song, A. K. Singh, and B. J. Kirby, Electrophoretic Concentration of Proteins at Laser-Patterned Nanoporous Membranes in Microchips, Anal. Chem, vol.76, issue.15, pp.4589-4592, 2004.

R. W. Tjerkstra, J. G. Gardeniers, and J. J. Kelly, Multi-Walled Microchannels: Free-Standing Porous Silicon Membranes for Use in _TAS, J. MICROELECTROMECHANICAL Syst, vol.9, issue.4, p.7, 2000.

L. J. Heyderman, High volume fabrication of customised nanopore membrane chips, Microelectron. Eng, pp.208-213, 2003.

E. Leclerc, Y. Sakai, and T. Fujii, Cell Culture in 3-Dimensional Micro¯uidic Structure of PDMS ( polydimethylsiloxane), p.6

J. Leng, B. Lonetti, P. Tabeling, M. Joanicot, and A. Ajdari, Microevaporators for Kinetic Exploration of Phase Diagrams, Phys. Rev. Lett, vol.96, issue.8, 2006.
URL : https://hal.archives-ouvertes.fr/hal-00016965

L. Canham, Porous Silicon Application Survey, Handbook of Porous Silicon, pp.1-10, 2017.

T. Leïchlé, Porous Silicon and Microfluidics, Handbook of Porous Silicon, pp.1-12, 2016.

P. Steiner and W. Lang, Micromachining applications of porous silicon, Thin Solid Films, vol.255, issue.1-2, pp.52-58, 1995.

S. Yao, A. M. Myers, J. D. Posner, K. A. Rose, and J. G. Santiago, Electroosmotic Pumps Fabricated From Porous Silicon Membranes, J. Microelectromechanical Syst, vol.15, issue.3, pp.717-728, 2006.

J. Z. Wallner, N. Nagar, C. R. Friedrich, and P. L. Bergstrom, Macro porous silicon as pump media for electro-osmotic pumps, Phys. Status Solidi A, vol.204, issue.5, pp.1327-1331, 2007.

J. L. Snyder, High-performance, low-voltage electroosmotic pumps with molecularly thin silicon nanomembranes, Proc. Natl. Acad. Sci, vol.110, pp.18425-18430, 2013.

T. Laurell, G. Marko-varga, S. Ekström, M. Bengtsson, and J. Nilsson, Microfluidic components for protein characterization, Rev. Mol. Biotechnol, vol.82, issue.2, pp.161-175, 2001.

K. P. Nichols, S. Azoz, and H. J. Gardeniers, Enzyme Kinetics by Directly Imaging a Porous Silicon Microfluidic Reactor Using Desorption/Ionization on Silicon Mass Spectrometry, Anal. Chem, vol.80, issue.21, pp.8314-8319, 2008.

A. Splinter, J. Stuèrmann, O. Bartels, and W. Benecke, Micro membrane reactor: a ¯ow-through membrane for gas pre-combustion, p.6, 2002.

E. H. Camara, C. Pijolat, J. Courbat, P. Breuil, D. Briand et al., Microfluidic Channels in Porous Silicon Filled with a Carbon Absorbent for GAS Preconcentration, TRANSDUCERS 2007 -2007 International Solid-State Sensors, Actuators and Microsystems Conference, pp.249-252, 2007.

M. Miu, Development of a new microfluidic analysis system based on porous silicon as sensitive element, Phys. Status Solidi C, vol.4, issue.6, pp.2093-2097, 2007.

Y. Fintschenko, A. Van-den, and . Berg, Silicon microtechnology and microstructures in separation science, J. Chromatogr. A, vol.819, issue.1-2, pp.3-12, 1998.

D. Clicq, R. W. Tjerkstra, J. G. Gardeniers, A. Van-den, G. V. Berg et al., Porous silicon as a stationary phase for shear-driven chromatography, J. Chromatogr. A, vol.1032, issue.1-2, pp.185-191, 2004.

V. Lehmann, Porous silicon matrix for chemical synthesis and chromatograpy, Phys. Status Solidi A, vol.202, issue.8, pp.1365-1368, 2005.

X. Chen, D. Cui, and C. Liu, Porous Matrix based Microfluidic Chip for DNA Extraction, 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems, pp.739-742, 2006.

E. Méry, C. Malhaire, B. Remaki, and D. Barbier, Electrical study of microfluidic channels isolated with chemically modified porous silicon, Phys. Status Solidi C, vol.4, issue.6, pp.2098-2102, 2007.

T. Metke, A. S. Westover, R. Carter, L. Oakes, A. Douglas et al., Particulate-free porous silicon networks for efficient capacitive deionization water desalination, Sci. Rep, vol.6, issue.1, 2016.

J. Z. Wallner and P. L. Bergstrom, A porous silicon based particle filter for microsystems, Phys. Status Solidi A, vol.204, issue.5, pp.1469-1473, 2007.

D. G. Johnson, Ultrathin Silicon Membranes for Wearable Dialysis, Adv. Chronic Kidney Dis, vol.20, issue.6, pp.508-515, 2013.

K. Grigoras, S. Franssila, T. Sikanen, T. Kotiaho, and R. Kostiainen, Fabrication of porous membrane filter from p-type silicon, Phys. Status Solidi A, vol.202, issue.8, pp.1624-1628, 2005.

G. Lammel and P. Renaud, Free-standing, mobile 3D porous silicon microstructures, Sens. Actuators Phys, vol.85, issue.1-3, pp.356-360, 2000.

D. N. Pagonis and A. G. Nassiopoulou, Free-standing macroporous silicon membranes over a large cavity for filtering and lab-on-chip applications, Microelectron. Eng, vol.83, issue.4-9, pp.1421-1425, 2006.

F. Saharil, Dry adhesive bonding of nanoporous inorganic membranes to microfluidic devices using the OSTE(+) dual-cure polymer, J. Micromechanics Microengineering, vol.23, issue.2, p.25021, 2013.

Y. He, Lateral porous silicon membranes for planar microfluidic applications, 2016.
URL : https://hal.archives-ouvertes.fr/tel-01445669

M. J. Sailor, Porous silicon in practice: preparation, characterization and applications, 2012.

C. S. Cojocaru, Conformal Anodic Oxidation of Aluminum Thin Films, Nano Lett, vol.5, issue.4, pp.675-680, 2005.
URL : https://hal.archives-ouvertes.fr/hal-01068521

M. Gowtham, Controlled fabrication of patterned lateral porous alumina membranes, Nanotechnology, vol.19, issue.3, p.35303, 2008.
URL : https://hal.archives-ouvertes.fr/hal-00795369

C. J. Eijkel, J. Branebjerg, M. Elwenspoek, and F. C. Van-de-pol, A new technology for micromachining of silicon: dopant selective HF anodic etching for the realization of low-doped monocrystalline silicon structures, IEEE Electron Device Lett, vol.11, issue.12, pp.588-589, 1990.

T. Leïchlé and D. Bourrier, Integration of lateral porous silicon membranes into planar microfluidics, Lab. Chip, vol.15, issue.3, pp.833-838, 2015.

Y. He and T. Leïchlé, Fabrication of lateral porous silicon membranes for planar microfluidics by means of ion implantation, Sens. Actuators B Chem, vol.239, pp.628-634, 2017.
URL : https://hal.archives-ouvertes.fr/hal-01964834

W. Ludurczak, Image processing for the characterization of porous silicon nanostructure, Phys. Status Solidi C, vol.6, issue.7, pp.1675-1679, 2009.
URL : https://hal.archives-ouvertes.fr/hal-00382265

A. Plecis, R. B. Schoch, and P. Renaud, Ionic Transport Phenomena in Nanofluidics: Experimental and Theoretical Study of the Exclusion-Enrichment Effect on a Chip, Nano Lett, vol.5, issue.6, pp.1147-1155, 2005.

A. A. Ensafi, M. M. Abarghoui, and N. Ahmadi, Porous Silicon Electrochemical Biosensors: Basic Principles and Detection Strategies, Handbook of Porous Silicon, pp.1-17, 2016.

C. Roychaudhuri and N. Das, Porous Silicon Electrochemical Biosensors: Performance and Commercial Prospects, Handbook of Porous Silicon, L. Canham, pp.1-21, 2016.

G. Shtenberg and E. Segal, Porous Silicon Optical Biosensors, Handbook of Porous Silicon, L. Canham, pp.1-11, 2014.

V. S. Lin, A Porous Silicon-Based Optical Interferometric Biosensor, Science, vol.278, issue.5339, pp.840-843, 1997.

A. Janshoff, Macroporous p-Type Silicon Fabry?Perot Layers. Fabrication, Characterization, and Applications in Biosensing, J. Am. Chem. Soc, vol.120, issue.46, pp.12108-12116, 1998.

J. Yakovleva, Microfluidic Enzyme Immunoassay Using Silicon Microchip with Immobilized Antibodies and Chemiluminescence Detection, Anal. Chem, vol.74, issue.13, pp.2994-3004, 2002.

L. Stefano, Integrated silicon-glass opto-chemical sensors for lab-on-chip applications, Sens. Actuators B Chem, vol.114, issue.2, pp.625-630, 2006.

L. Stefano, E. Orabona, A. Lamberti, I. Rea, and I. Rendina, Microfluidics assisted biosensors for label-free optical monitoring of molecular interactions, Sens. Actuators B Chem, vol.179, pp.157-162, 2013.

C. Escobedo, A. G. Brolo, R. Gordon, and D. Sinton, Flow-Through vs Flow-Over: Analysis of Transport and Binding in Nanohole Array Plasmonic Biosensors, Anal. Chem, vol.82, issue.24, pp.10015-10020, 2010.

N. Kumar, E. Froner, R. Guider, M. Scarpa, and P. Bettotti, Investigation of non-specific signals in nanoporous flow-through and flow-over based sensors, The Analyst, vol.139, issue.6, p.1345, 2014.

Y. Zhao, G. Gaur, R. L. Mernaugh, P. E. Laibinis, and S. M. Weiss, Comparative Kinetic Analysis of Closed-Ended and Open-Ended Porous Sensors, Nanoscale Res. Lett, vol.11, issue.1, 2016.

Y. Zhao, G. Gaur, S. T. Retterer, P. E. Laibinis, and S. M. Weiss, Flow-Through Porous Silicon Membranes for Real-Time Label-Free Biosensing, Anal. Chem, vol.88, issue.22, pp.10940-10948, 2016.

S. Mariani, L. Pino, L. M. Strambini, L. Tedeschi, and G. Barillaro, 10 000-Fold Improvement in Protein Detection Using Nanostructured Porous Silicon Interferometric Aptasensors, ACS Sens, vol.1, issue.12, pp.1471-1479, 2016.

X. Fan, I. M. White, S. I. Shopova, H. Zhu, J. D. Suter et al., Sensitive optical biosensors for unlabeled targets: A review, Anal. Chim. Acta, vol.620, issue.1-2, pp.8-26, 2008.

J. Wang, Electrochemical biosensors: Towards point-of-care cancer diagnostics, Biosens. Bioelectron, vol.21, issue.10, pp.1887-1892, 2006.

G. Zhang and Y. Ning, Silicon nanowire biosensor and its applications in disease diagnostics: A review, Anal. Chim. Acta, vol.749, pp.1-15, 2012.

K. Länge, B. E. Rapp, and M. Rapp, Surface acoustic wave biosensors: a review, Anal. Bioanal. Chem, vol.391, issue.5, pp.1509-1519, 2008.

J. Tamayo, P. M. Kosaka, J. J. Ruz, Á. Paulo, and M. Calleja, Biosensors based on nanomechanical systems, Chem Soc Rev, vol.42, issue.3, pp.1287-1311, 2013.

J. W. Ndieyira, Surface-stress sensors for rapid and ultrasensitive detection of active free drugs in human serum, Nat. Nanotechnol, vol.9, issue.3, pp.225-232, 2014.

A. K. Naik, M. S. Hanay, W. K. Hiebert, X. L. Feng, and M. L. Roukes, Towards single-molecule nanomechanical mass spectrometry, Nat. Nanotechnol, vol.4, issue.7, pp.445-450, 2009.

P. E. Sheehan and L. J. Whitman, Detection Limits for Nanoscale Biosensors, Nano Lett, vol.5, issue.4, pp.803-807, 2005.

T. P. Burg, Weighing of biomolecules, single cells and single nanoparticles in fluid, Nature, vol.446, issue.7139, pp.1066-1069, 2007.

V. Agache, G. Blanco-gomez, F. Baleras, and P. Caillat, An embedded microchannel in a MEMS plate resonator for ultrasensitive mass sensing in liquid, Lab. Chip, vol.11, issue.15, p.2598, 2011.

B. N. Johnson, H. Sharma, and R. Mutharasan, Torsional and Lateral Resonant Modes of Cantilevers as Biosensors: Alternatives to Bending Modes, Anal. Chem, vol.85, issue.3, pp.1760-1766, 2013.

J. Linden, A. Thyssen, and E. Oesterschulze, Suspended plate microresonators with high quality factor for the operation in liquids, Appl. Phys. Lett, vol.104, issue.19, p.191906, 2014.

T. Alava, F. Mathieu, L. Mazenq, C. Soyer, D. Remiens et al., Silicon-based micromembranes with piezoelectric actuation and piezoresistive detection for sensing purposes in liquid media, J. Micromechanics Microengineering, vol.20, issue.7, p.75014, 2010.
URL : https://hal.archives-ouvertes.fr/hal-00549532

T. Xu, Z. Wang, J. Miao, L. Yu, and C. M. Li, Micro-machined piezoelectric membrane-based immunosensor array, Biosens. Bioelectron, vol.24, issue.4, pp.638-643, 2008.

M. Cha, Biomolecular detection with a thin membrane transducer, Lab. Chip, vol.8, issue.6, p.932, 2008.

X. Lu, Q. Guo, Z. Xu, W. Ren, and Z. Cheng, Biosensor platform based on stress-improved piezoelectric membrane, Sens. Actuators Phys, vol.179, pp.32-38, 2012.

K. L. Ekinci and M. L. Roukes, Nanoelectromechanical systems, Rev. Sci. Instrum, vol.76, issue.6, p.61101, 2005.

R. Puers, Capacitive sensors: When and how to use them, Sens. Actuators Phys, pp.93-105, 1993.

A. Rollier, B. Legrand, D. Collard, and L. Buchaillot, The stability and pull-in voltage of electrostatic parallel-plate actuators in liquid solutions, J. Micromechanics Microengineering, vol.16, issue.4, pp.794-801, 2006.

M. Bao and H. Yang, Squeeze film air damping in MEMS, Sens. Actuators Phys, vol.136, issue.1, pp.3-27, 2007.

A. S. Ergun, G. G. Yaralioglu, and B. T. Khuri-yakub, Capacitive Micromachined Ultrasonic Transducers: Theory and Technology, J. Aerosp. Eng, vol.16, issue.2, pp.76-84, 2003.

N. Tas, T. Sonnenberg, H. Jansen, R. Legtenberg, and M. Elwenspoek, Stiction in surface micromachining, J. Micromechanics Microengineering, vol.6, issue.4, pp.385-397, 1996.

A. S. Erguri, Y. Huang, X. Zhuang, O. Oralkan, G. G. Yarahoglu et al., Capacitive micromachined ultrasonic transducers: fabrication technology, IEEE Trans. Ultrason. Ferroelectr. Freq. Control, vol.52, issue.12, pp.2242-2258, 2005.

A. Carlson, A. M. Bowen, Y. Huang, R. G. Nuzzo, and J. A. Rogers, Transfer Printing Techniques for Materials Assembly and Micro/Nanodevice Fabrication, Adv. Mater, vol.24, issue.39, pp.5284-5318, 2012.

J. , Three-Dimensional and Multilayer Nanostructures Formed by Nanotransfer Printing, Nano Lett, vol.3, issue.9, pp.1223-1227, 2003.

A. Javey, R. S. Nam, H. Friedman, C. M. Yan, and . Lieber, Layer-by-Layer Assembly of Nanowires for Three-Dimensional, Multifunctional Electronics, Nano Lett, vol.7, issue.3, pp.773-777, 2007.

J. Yeom and M. A. Shannon, Detachment Lithography of Photosensitive Polymers: A Route to Fabricating Three-Dimensional Structures, Adv. Funct. Mater, vol.20, issue.2, pp.289-295, 2010.

S. Kim, Microstructured elastomeric surfaces with reversible adhesion and examples of their use in deterministic assembly by transfer printing, Proc. Natl. Acad. Sci, vol.107, pp.17095-17100, 2010.

Y. Zhang, H. Keum, K. Park, R. Bashir, and S. Kim, Micro-Masonry of MEMS Sensors and Actuators, J. Microelectromechanical Syst, vol.23, issue.2, pp.308-314, 2014.

A. Bhaswara, Fabrication of suspended plate MEMS resonator by micro-masonry, 2015.
URL : https://hal.archives-ouvertes.fr/tel-01291780

A. Bhaswara, Fabrication of nanoplate resonating structures via micro-masonry, J. Micromechanics Microengineering, vol.24, issue.11, p.115012, 2014.
URL : https://hal.archives-ouvertes.fr/hal-01687810

A. Bhaswara, A Simple Fabrication Process Based on Micro-masonry for the Realization of Nanoplate Resonators with Integrated Actuation and Detection Schemes, Front. Mech. Eng, vol.2, 2016.
URL : https://hal.archives-ouvertes.fr/hal-01960876

J. A. Rogers, M. G. Lagally, and R. G. Nuzzo, Synthesis, assembly and applications of semiconductor nanomembranes, Nature, vol.477, issue.7362, pp.45-53, 2011.

W. K. Schomburg, Introduction to microsystem design, 2011.

M. Bao, H. Yang, H. Yin, and Y. Sun, Energy transfer model for squeeze-film air damping in low vacuum, J. Micromechanics Microengineering, vol.12, issue.3, pp.341-346, 2002.

L. Nicu and M. , , 2013.

A. Bietsch, J. Zhang, M. Hegner, H. P. Lang, and C. Gerber, Rapid functionalization of cantilever array sensors by inkjet printing, Nanotechnology, vol.15, issue.8, pp.873-880, 2004.

R. Mckendry, Multiple Label-Free Biodetection and Quantitative DNA-Binding Assays on a Nanomechanical Cantilever Array, Proc. Natl. Acad. Sci. U. S. A, vol.99, issue.15, pp.9783-9788, 2002.

A. C. Pease, D. Solas, E. J. Sullivan, M. T. Cronin, C. P. Holmes et al., Light-Generated Oligonucleotide Arrays for Rapid DNA Sequence Analysis, Proc. Natl. Acad. Sci. U. S. A, vol.91, issue.11, pp.5022-5026, 1994.

J. C. Harper, R. Polsky, S. M. Dirk, D. R. Wheeler, and S. M. Brozik, Electroaddressable Selective Functionalization of Electrode Arrays: Catalytic NADH Detection Using Aryl Diazonium Modified Gold Electrodes, Electroanalysis, vol.19, issue.12, pp.1268-1274, 2007.

E. Delamarche, A. Bernard, H. Schmid, A. Bietsch, B. Michel et al., Microfluidic Networks for Chemical Patterning of Substrates: Design and Application to Bioassays, J. Am. Chem. Soc, vol.120, issue.3, pp.500-508, 1998.

A. Meister, M. Liley, J. Brugger, R. Pugin, and H. Heinzelmann, Nanodispenser for attoliter volume deposition using atomic force microscopy probes modified by focused-ion-beam milling, Appl. Phys. Lett, vol.85, issue.25, pp.6260-6262, 2004.

D. S. Ginger, H. Zhang, and C. A. Mirkin, The Evolution of Dip-Pen Nanolithography, Angew. Chem. Int. Ed, vol.43, issue.1, pp.30-45, 2004.

T. Leichle, M. Lishchynska, F. Mathieu, J. Pourciel, D. Saya et al., A Microcantilever-Based Picoliter Droplet Dispenser With Integrated Force Sensors and Electroassisted Deposition Means, J. Microelectromechanical Syst, vol.17, issue.5, pp.1239-1253, 2008.

N. Berthet-duroure, Interaction of biomolecules sequentially deposited at the same location using a microcantilever-based spotter, Biomed. Microdevices, vol.10, issue.4, pp.479-487, 2008.
URL : https://hal.archives-ouvertes.fr/hal-01848509

V. , Fabrication and characterization of microlens arrays using a cantilever-based spotter, Opt. Express, vol.15, issue.11, p.6900, 2007.

V. , Spotted Custom Lenses to Tailor the Divergence of Vertical-Cavity Surface-Emitting Lasers, IEEE Photonics Technol. Lett, vol.22, issue.21, pp.1592-1594, 2010.

T. Leïchlé, Nanostructuring surfaces with conjugated silica colloids deposited using silicon-based microcantilevers, Nanotechnology, vol.16, issue.4, pp.525-531, 2005.

A. Valsesia, Deposition of Nanobead Hexagonal Crystals Using Silicon Microcantilevers, Small, vol.2, issue.12, pp.1444-1447, 2006.

T. Leïchlé, Copper electrodeposition localized in picoliter droplets using microcantilever arrays, Appl. Phys. Lett, vol.88, issue.25, p.254108, 2006.

E. Descamps, Fabrication of Oligonucleotide Chips by Using Parallel Cantilever-Based Electrochemical Deposition in Picoliter Volumes, Adv. Mater, vol.19, issue.14, pp.1816-1821, 2007.

F. Vandevelde, T. Leïchlé, C. Ayela, C. Bergaud, L. Nicu et al., Direct Patterning of Molecularly Imprinted Microdot Arrays for Sensors and Biochips, Langmuir, vol.23, issue.12, pp.6490-6493, 2007.
URL : https://hal.archives-ouvertes.fr/hal-00172754

Y. Roupioz, Individual Blood-Cell Capture and 2D Organization on Microarrays, Small, vol.5, issue.13, pp.1493-1497, 2009.
URL : https://hal.archives-ouvertes.fr/inserm-00369217

E. Descamps, Functionalization of optical nanotip arrays with an electrochemical microcantilever for multiplexed DNA detection, Lab. Chip, vol.13, issue.15, p.2956, 2013.

D. Dezest, Nanosystèmes électromécaniques pour la biodétection : intégration d'un moyen de transduction et stratégies de biofonctionnalisation, 2015.

S. Guillon, Biological functionalization of massively parallel arrays of nanocantilevers using microcontact printing, Sens. Actuators B Chem, vol.161, issue.1, pp.1135-1138, 2012.
URL : https://hal.archives-ouvertes.fr/hal-01767603

S. Salomon, Arrays of nanoelectromechanical biosensors functionalized by microcontact printing, Nanotechnology, vol.23, issue.49, p.495501, 2012.
URL : https://hal.archives-ouvertes.fr/hal-01767601

Y. Xia and G. M. Whitesides, Soft Lithography, Angew. Chem. Int. Ed, vol.37, issue.5, pp.550-575, 1998.

A. Bernard, J. P. Renault, B. Michel, H. R. Bosshard, and E. Delamarche, Microcontact Printing of Proteins, Adv. Mater, vol.12, issue.14, pp.1067-1070, 2000.

J. Chalmeau, C. Thibault, F. Carcenac, and C. Vieu, Self-aligned patterns of multiple biomolecules printed in one step, Appl. Phys. Lett, vol.93, issue.13, p.133901, 2008.
URL : https://hal.archives-ouvertes.fr/hal-01767619

K. Haupt, Peer Reviewed: Molecularly Imprinted Polymers: The Next Generation, Anal. Chem, vol.75, issue.17, pp.376-383, 2003.

D. Dezest, Multiplexed functionalization of nanoelectromechanical systems with photopatterned molecularly imprinted polymers, J. Micromechanics Microengineering, 2018.
URL : https://hal.archives-ouvertes.fr/hal-02392367

W. Tan, K. Wang, and T. J. Drake, Molecular beacons, Curr. Opin. Chem. Biol, vol.8, issue.5, pp.547-553, 2004.

H. Du, M. D. Disney, B. L. Miller, and T. D. Krauss, Hybridization-Based Unquenching of DNA Hairpins on Au Surfaces: Prototypical 'Molecular Beacon' Biosensors, J. Am. Chem. Soc, vol.125, issue.14, pp.4012-4013, 2003.

M. Boulade, J. Moreau, and T. Livache, Imagerie par résonance des plasmons de surface : application en microbiologie, pp.24-27, 2016.

K. Lee and P. Wei, Enhancing Surface Plasmon Detection Using Ultrasmall Nanoslits and a Multispectral Integration Method, Small, vol.6, issue.17, pp.1900-1907, 2010.

K. Lee, J. Huang, J. Chang, S. Wu, and P. Wei, Ultrasensitive Biosensors Using Enhanced Fano Resonances in Capped Gold Nanoslit Arrays, Sci. Rep, vol.5, issue.1, 2015.

M. Pan, K. Lee, S. Lo, and P. Wei, Resonant position tracking method for smartphone-based surface plasmon sensor, Anal. Chim. Acta, vol.1032, pp.99-106, 2018.

C. Pacholski, M. Sartor, M. J. Sailor, F. Cunin, and G. M. Miskelly, Biosensing Using Porous Silicon Double-Layer Interferometers: Reflective Interferometric Fourier Transform Spectroscopy, J. Am. Chem. Soc, vol.127, issue.33, pp.11636-11645, 2005.
URL : https://hal.archives-ouvertes.fr/hal-00381982

L. M. Bonanno and L. A. Delouise, Whole blood optical biosensor, Biosens. Bioelectron, vol.23, issue.3, pp.444-448, 2007.

V. Krivitsky, Si Nanowires Forest-Based On-Chip Biomolecular Filtering, Separation and Preconcentration Devices: Nanowires Do it All, Nano Lett, vol.12, issue.9, pp.4748-4756, 2012.

C. Wu and M. J. Sailor, Selective Functionalization of the Internal and the External Surfaces of Mesoporous Silicon by Liquid Masking, ACS Nano, vol.7, issue.4, pp.3158-3167, 2013.

C. Ayela, High quality factors of silicon membranes with piezoelectric actuation and detection scheme for biosensing purpose in liquid media, IEEE International Frequency Control Symposium and Exposition, pp.123-128, 2006.
URL : https://hal.archives-ouvertes.fr/hal-00147730

P. and N. Setter, PIEZOELECTRIC CANTILEVER BEAMS ACTUATED BY PZT SOL-GEL THIN FILM, p.4

D. Saya, Fabrication and characterization of mechanical resonators integrating microcontact printed PZT films, 2017 Joint IEEE International Symposium on the Applications of Ferroelectric (ISAF)/International Workshop on Acoustic Transduction Materials and Devices (IWATMD)/Piezoresponse Force Microscopy (PFM), pp.89-92, 2017.
URL : https://hal.archives-ouvertes.fr/hal-01816372

M. T. Boudjiet, Geometry optimization of uncoated silicon microcantilever-based gas density sensors, Sens. Actuators B Chem, vol.208, pp.600-607, 2015.
URL : https://hal.archives-ouvertes.fr/hal-01082346

D. J. Bell, T. J. Lu, N. A. Fleck, and S. M. Spearing, MEMS actuators and sensors: observations on their performance and selection for purpose, J. Micromechanics Microengineering, vol.15, issue.7, pp.153-164, 2005.

R. E. Hetrick, A vibrating cantilever magnetic-field sensor, Sens. Actuators, vol.16, issue.3, pp.197-207, 1989.

C. Van?ura, Y. Li, J. Lichtenberg, K. Kirstein, A. Hierlemann et al., Liquid-Phase Chemical and Biochemical Detection Using Fully Integrated Magnetically Actuated Complementary Metal Oxide Semiconductor Resonant Cantilever Sensor Systems, Anal. Chem, vol.79, issue.4, pp.1646-1654, 2007.

B. Legrand, A. Rollier, D. Collard, and L. Buchaillot, Suppression of the pull-in instability for parallel-plate electrostatic actuators operated in dielectric liquids, Appl. Phys. Lett, vol.88, issue.3, p.34105, 2006.
URL : https://hal.archives-ouvertes.fr/hal-00128662

D. P. Arnold and N. Wang, Permanent Magnets for MEMS, J. Microelectromechanical Syst, vol.18, issue.6, pp.1255-1266, 2009.

Y. Li, J. Kim, M. Kim, A. Armutlulu, and M. G. Allen, Thick Multilayered Micromachined Permanent Magnets With Preserved Magnetic Properties, J. Microelectromechanical Syst, vol.25, issue.3, pp.498-507, 2016.

T. Budde and H. H. Gatzen, Thin film SmCo magnets for use in electromagnetic microactuators, J. Appl. Phys, vol.99, issue.8, pp.8-304, 2006.

D. L. Roy, Fabrication and characterization of polymer membranes with integrated arrays of high performance micro-magnets, Mater. Today Commun, vol.6, pp.50-55, 2016.
URL : https://hal.archives-ouvertes.fr/hal-01950201

Y. Chikuba, M. Oryoshi, A. Yamashita, M. Nakano, T. Yanai et al., Nd-Fe-B film magnets with the thickness above 100 ?m deposited on Si substrates, 2015 IEEE Magnetics Conference (INTERMAG), pp.1-1, 2015.

N. Jackson, F. J. Pedrosa, A. Bollero, A. Mathewson, and O. Z. Olszewski, Integration of Thick-Film Permanent Magnets for MEMS Applications, J. Microelectromechanical Syst, vol.25, issue.4, pp.716-724, 2016.

Y. Soumare, Kinetically Controlled Synthesis of Hexagonally Close-Packed Cobalt Nanorods with High Magnetic Coercivity, Adv. Funct. Mater, vol.19, issue.12, pp.1971-1977, 2009.

M. Han, Z. Li, X. Sun, and H. Zhang, Analysis of an in-plane electromagnetic energy harvester with integrated magnet array, Sens. Actuators Phys, vol.219, pp.38-46, 2014.

Y. Tan, Y. Dong, and X. Wang, Review of MEMS Electromagnetic Vibration Energy Harvester, J. Microelectromechanical Syst, vol.26, issue.1, pp.1-16, 2017.

M. Rais-zadeh, Gallium Nitride as an Electromechanical Material, J. Microelectromechanical Syst, vol.23, issue.6, pp.1252-1271, 2014.

A. Ansari, V. J. Gokhale, J. Roberts, and M. Rais-zadeh, Monolithic integration of GaN-based micromechanical resonators and HEMTs for timing applications, 2012 International Electron Devices Meeting, 2012.

B. W. Bahr, L. C. Popa, and D. Weinstein, 16.8 1GHz GaN-MMIC monolithically integrated MEMS-based oscillators, 2015 IEEE International Solid-State Circuits Conference -(ISSCC) Digest of Technical Papers, pp.1-3, 2015.

V. Cimalla, J. Pezoldt, and O. Ambacher, Group III nitride and SiC based MEMS and NEMS: materials properties, technology and applications, J. Phys. Appl. Phys, vol.40, issue.20, pp.6386-6434, 2007.

F. Crispoldi, New Fabrication Process to Manufacture RF-MEMS and HEMT on GaN/Si Substrate, p.4

F. Crispoldi, Full integrated process to manufacture RF-MEMS and MMICs on GaN/Si substrate, Int. J. Microw. Wirel. Technol, vol.2, issue.3-4, pp.333-339, 2010.

S. Davies, T. S. Huang, M. H. Gass, A. J. Papworth, T. B. Joyce et al., Fabrication of GaN cantilevers on silicon substrates for microelectromechanical devices, Appl. Phys. Lett, vol.84, issue.14, pp.2566-2568, 2004.

G. Fischer, W. Eckl, and G. Kaminski, RF-MEMS and SiC/GaN as enabling technologies for a reconfigurable multi-band/multi-standard radio, Bell Labs Tech. J, vol.7, issue.3, pp.169-189, 2003.

G. Vanko, Bulk micromachining of SiC substrate for MEMS sensor applications, Microelectron. Eng, vol.110, pp.260-264, 2013.

Y. Wang, T. Sasaki, T. Wu, F. Hu, and K. Hane, Comb-drive GaN micro-mirror on a GaN-onsilicon platform, J. Micromechanics Microengineering, vol.21, issue.3, p.35012, 2011.

S. Davies, Fabrication of epitaxial III-nitride cantilevers on silicon (1 1 1) substrates, J. Mater. Sci. Mater. Electron, vol.15, issue.11, pp.705-710, 2004.

K. Brueckner, Two-dimensional electron gas based actuation of piezoelectric AlGaN/GaN microelectromechanical resonators, Appl. Phys. Lett, vol.93, issue.17, p.173504, 2008.

K. Brueckner, Resonant Piezoelectric ALGaN/GaN MEMS Sensors in Longitudinal Mode Operation, 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems, pp.927-930, 2009.

L. C. Popa and D. Weinstein, Switchable piezoelectric transduction in AlGaN/GaN MEMS resonators, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII), pp.2461-2464, 2013.

B. S. Kang, Electrical detection of immobilized proteins with ungated AlGaN/ GaN highelectron-mobility Transistors, Appl Phys Lett, p.4

M. S. Makowski and A. Ivanisevic, Molecular Analysis of Blood with Micro-/Nanoscale Field-Effect-Transistor Biosensors, Small, vol.7, issue.14, pp.1863-1875, 2011.

Y. Wang, Botulinum toxin detection using AlGaN / GaN high electron mobility transistors, Appl Phys Lett, p.4

X. Xu, V. Jindal, F. Shahedipour-sandvik, M. Bergkvist, and N. C. Cady, Direct immobilization and hybridization of DNA on group III nitride semiconductors, Appl. Surf. Sci, vol.255, issue.11, pp.5905-5909, 2009.

I. Cimalla, AlGaN/GaN biosensor-effect of device processing steps on the surface properties and biocompatibility, Sens. Actuators B Chem, vol.123, issue.2, pp.740-748, 2007.

A. Podolska, Biocompatibility of semiconducting AlGaN/GaN material with living cells, Sens. Actuators B Chem, vol.169, pp.401-406, 2012.

P. Sahoo, S. Suresh, S. Dhara, G. Saini, S. Rangarajan et al., Direct label free ultrasensitive impedimetric DNA biosensor using dendrimer functionalized GaN nanowires, Biosens. Bioelectron, vol.44, pp.164-170, 2013.

G. Steinhoff, O. Purrucker, M. Tanaka, M. Stutzmann, and M. Eickhoff, AlxGa1-xN-A New Material System for Biosensors, Adv. Funct. Mater, vol.13, issue.11, pp.841-846, 2003.

A. H. Rajabi, M. Jaffe, and T. L. Arinzeh, Piezoelectric materials for tissue regeneration: A review, Acta Biomater, vol.24, pp.12-23, 2015.

Y. Tang, C. Wu, Z. Wu, L. Hu, W. Zhang et al., Fabrication and in vitro biological properties of piezoelectric bioceramics for bone regeneration, Sci. Rep, vol.7, issue.1, 2017.

M. Vaezi, H. Seitz, and S. Yang, A review on 3D micro-additive manufacturing technologies, Int. J. Adv. Manuf. Technol, vol.67, issue.5-8, pp.1721-1754, 2013.

Y. Zhang, L. Chen, J. Zeng, K. Zhou, and D. Zhang, Aligned porous barium titanate/hydroxyapatite composites with high piezoelectric coefficients for bone tissue engineering, Mater. Sci. Eng. C, vol.39, pp.143-149, 2014.

A. Marino, Two-Photon Lithography of 3D Nanocomposite Piezoelectric Scaffolds for Cell Stimulation, ACS Appl. Mater. Interfaces, vol.7, issue.46, pp.25574-25579, 2015.

O. Guillaume, Surface-enrichment with hydroxyapatite nanoparticles in stereolithography-fabricated composite polymer scaffolds promotes bone repair, Acta Biomater, vol.54, pp.386-398, 2017.

K. Kim, 3D Optical Printing of Piezoelectric Nanoparticle-Polymer Composite Materials, ACS Nano, vol.8, issue.10, pp.9799-9806, 2014.

N. Voelcker and S. P. Low, Cell Culture on Porous Silicon, Handbook of Porous Silicon, L. Canham, pp.1-15, 2014.

J. L. Coffer, Porous Silicon and Tissue Engineering Scaffolds, Handbook of Porous Silicon, L. Canham, pp.1-7, 2014.

K. C. Mcgilvray, Implantable microelectromechanical sensors for diagnostic monitoring and post-surgical prediction of bone fracture healing: IMPLANTABLE MICROELECTROMECHANICAL SENSORS FOR DIAGNOSTIC MONITORING, J. Orthop. Res, vol.33, issue.10, pp.1439-1446, 2015.

J. Liu, J. Wen, Z. Zhang, H. Liu, and Y. Sun, Voyage inside the cell: Microsystems and nanoengineering for intracellular measurement and manipulation, Microsyst. Nanoeng, vol.1, issue.1, 2015.

M. T. Chorsi, Piezoelectric Biomaterials for Sensors and Actuators, Adv. Mater, vol.31, issue.1, p.1802084, 2019.

H. Cui, Three-dimensional printing of piezoelectric materials with designed anisotropy and directional response, Nat. Mater, vol.18, issue.3, pp.234-241, 2019.

J. U. Lind, Instrumented cardiac microphysiological devices via multimaterial threedimensional printing, Nat. Mater, vol.16, issue.3, pp.303-308, 2017.

S. Y. Chin, Additive manufacturing of hydrogel-based materials for next-generation implantable medical devices, Sci. Robot, vol.2, issue.2, p.6451, 2017.

W. Hynes, Micropatterning of 3D Microenvironments for Living Biosensor Applications, Biosensors, vol.4, issue.1, pp.28-44, 2014.

H. Kang, S. J. Lee, I. K. Ko, C. Kengla, J. J. Yoo et al., A 3D bioprinting system to produce human-scale tissue constructs with structural integrity, Nat. Biotechnol, vol.34, issue.3, pp.312-319, 2016.

M. S. Mannoor, 3D Printed Bionic Ears, Nano Lett, vol.13, issue.6, pp.2634-2639, 2013.

J. C. Kenry, C. T. Yeo, and . Lim, Emerging flexible and wearable physical sensing platforms for healthcare and biomedical applications, Microsyst. Nanoeng, vol.2, issue.1, 2016.

D. Moe, Evaluation of CardioMEMS Heart Failure Device, p.42

M. Luo, W. Shen, and M. G. Allen, Microfabricated PLGA/PVA-based completely biodegradable passive RF pressure sensors, 2015 Transducers -2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), pp.101-104, 2015.

K. J. Yu, Bioresorbable silicon electronics for transient spatiotemporal mapping of electrical activity from the cerebral cortex, Nat. Mater, vol.15, issue.7, pp.782-791, 2016.

M. Deterre, Energy Harvesting System for Cardiac Implant Applications, p.5, 2011.

M. Tsang, A. Armutlulu, A. W. Martinez, S. A. Allen, and M. G. Allen, Biodegradable magnesium/iron batteries with polycaprolactone encapsulation: A microfabricated power source for transient implantable devices, Microsyst. Nanoeng, vol.1, issue.1, 2015.

J. S. Ho, Wireless power transfer to deep-tissue microimplants, Proc. Natl. Acad. Sci, vol.111, issue.22, pp.7974-7979, 2014.

F. Mateen, C. Maedler, S. Erramilli, and P. Mohanty, Wireless actuation of micromechanical resonators, Microsyst. Nanoeng, vol.2, issue.1, 2016.

H. Aubert, RFID technology for human implant devices, Comptes Rendus Phys, vol.12, issue.7, pp.675-683, 2011.
URL : https://hal.archives-ouvertes.fr/hal-00599304

C. A. Mandon, L. J. Blum, and C. A. Marquette, Adding Biomolecular Recognition Capability to 3D Printed Objects, Anal. Chem, vol.88, issue.21, pp.10767-10772, 2016.
URL : https://hal.archives-ouvertes.fr/hal-01408589

T. Ayari, Gas sensors boosted by two-dimensional h-BN enabled transfer on thin substrate foils: towards wearable and portable applications, Sci. Rep, vol.7, issue.1, 2017.
URL : https://hal.archives-ouvertes.fr/hal-01830844

, Master of Science in Electrical and Computer Engineering, minor in Bioengineering, Georgia Institute of Technology (USA), 1999.

. Diplôme-d'ingénieur-génie-physique and . Toulouse,

E. De-recherche and . Janvier, Développement d'outils de biodétection basés sur les micro-et nanotechnologies : activités liées aux méthodes de transduction électromécanique, A ce jour Chercheur CNRS / Responsable d'équipe, 2010.

, Academia Sinica (Taipei, Taïwan), sous la direction du professeur Chia-Fu Chou. Manipulation de biomolécules et étude d'interactions moléculaires à l'aide de systèmes nanofluidiques et réalisation de pièges à molécules par diélectrophorèse. Obtention d'un fellowship de l'Academia Sinica, 2007.

, Liviu Nicu et Dr. Christian Bergaud. Conception et réalisation d'un microsystème de dépôt de gouttes pour la fonctionnalisation localisée de surfaces en vue de la miniaturisation des biopuces. Intégration de capteurs de force piézorésistifs et utilisation des phénomènes d'électromouillage et d'électrochimie, Novembre 2003-Juillet 2007 Doctorant et Post-doctorant : Groupe Nanobiosystèmes, 2003.

, sous la direction du professeur William Hunt. Conception et test de capteurs acoustiques pour détections immunologiques en phase liquide, 1999.

. Assistant-de-recherche and . Étudiant-en-master, sous la direction du professeur Mark Allen. Conception, fabrication et test d'une micro-boussole résonante à faible consommation. Intégration de matériaux magnétiques et réalisation du capteur par micro-usinage de surface

, Congé Parental : Juillet 2014-Janvier, 2015.

, Octobre 1999-Février, Sujet : Développement et intégration de membranes en silicium poreux dans des systèmes fluidiques Devenir : Post-doc à l'Université de Fudan, 2001.

, Financement : Bourse LAAS-Carnot / Taux d'encadrement : 30% Sujet : Séparation et concentration de molécules circulantes sous champ électrique dans des nanocanaux Devenir : Ingénieur chez Gene Diffusion, 2014.

J. Thèse-de and . Cacheux, Financement : IDEX et INCA / Taux d'encadrement : 50% Sujet : Biocapteurs MEMS pour la détection de micro-ARN circulants Devenir : Post-doc à IMDEA Nanoscience, 2014.

, Financement : IDEX / Taux d'encadrement : 30% Sujet : Développement de Nano-Aimants pour l'Actionnement Magnétique Intégré de Biocapteurs MEMS Résonants, 2016.

, Financement : Bourse ministérielle / Taux d'encadrement : 100% Sujet : Membranes de silicium poreux latérales comme solution générique de préparation d'échantillon et biodétection pour les laboratoires sur puce, 2016.

R. Thèse-de and . Riesco, Développement de matrices polymériques piézo-électriques par impression 3D pour la stimulation et l'étude de la régénération osseuse 10, Financement : ANR / Taux d'encadrement : 100% Sujet : Développement d'une plateforme fluidique multi-échelle sur réseaux de pores 2D Devenir : CR CNRS LAAS-CNRS, 2017.

, Financement : Investissements d'avenir / Taux d'encadrement : 100% Sujet : Développement de MEMS résonants pour la détection d'hydrogène 12, 2018.

S. Cdds,

E. Apazoglou and F. Cdd-ingénieur-de-recherche-sur-le-projet,

. Stage-m2-de-frédéric-véron, Réalisation de matrices polymériques piézo-électriques par impression 3D pour la stimulation et l'étude de la régénération osseuse, 2017.

. Stage-m2-de-pierre and . Moritz, Caractérisation et optimisation de résonateurs MEMS à actionnement magnétique et détection piézorésistive en milieu liquide, 2016.

. Stage-m2-de-jean-cacheux, Nanocanaux pour la détection ultra-sensible de miARN circulants, 2014.

. Stage-m2-de-fabrice and . Dubosc, Réalisation de membranes pour la fluidique planaire, 2011.

. Stage-m1-de-priscilia and . Gazulès, Fonctionnalisation de pores 2D, Dosage de micro-ARNs dans des dispositifs nanofluidiques 19. Stage M1 de Thibaut Rageade, 2014.

. Stage-m1-de-mariem and . Nefzi, Modélisation d'un capteur biologique à nanofentes, 2012.

R. Malbec, B. Chami, L. Aeschbach, G. A. Ruiz-buendia, M. Socol et al., µLAS: Sizing of expanded trinucleotide repeats with femtomolar sensitivity in less than 5 minutes, Scientific Reports, vol.9, issue.23, 2019.

D. Dezest, T. Leichle, P. Teerapanich, F. Mathieu, J. Bui et al., Multiplexed functionalization of nanoelectromechanical systems with photopatterned molecularly imprinted polymers, Journal of Micromechanics and Microengineering, 2018.
URL : https://hal.archives-ouvertes.fr/hal-02392367

R. Malbec, J. Cacheux, P. Cordelier, T. Leichlé, P. Joseph et al., Microfluidics for minute DNA sample analysis: open challenges for genetic testing of cell-free circulating DNA in blood plasma, vol.1, pp.25-32, 2018.
URL : https://hal.archives-ouvertes.fr/hal-02338521

P. Teerapanich, M. Pugnière, C. Henriquet, Y. Lin, A. Naillon et al., Nanofluidic fluorescence microscopy with integrated concentration gradient generation for one-shot parallel kinetic assays, Sensors and Actuators B, vol.274, pp.338-342, 2018.
URL : https://hal.archives-ouvertes.fr/hal-01964831

M. Mikolasek, M. Manrique-juarez, H. Shepherd, K. Ridier, S. Rat et al., Complete Set of Elastic Moduli of a Spin-Crossover Solid: Spin-State Dependence and Mechanical Actuation, Journal of the American Chemical Society, vol.140, issue.28, pp.8970-8979, 2018.
URL : https://hal.archives-ouvertes.fr/hal-01961781

M. Manrique-juárez, F. Mathieu, A. Laborde, S. Rat, V. Shalabaeva et al., Micromachining-Compatible, Facile Fabrication of Polymer Nanocomposite Spin Crossover Actuators, Advanced Functional Materials, vol.28, issue.29, p.1801970, 2018.

J. Cacheux, M. Brut, A. Bancaud, P. Cordelier, and T. Leïchlé, Spatial Analysis of Nanofluidic-Embedded Biosensors for Wash-Free Single-Nucleotide Difference Discrimination, ACS Sensors, vol.3, issue.3, pp.606-611, 2018.
URL : https://hal.archives-ouvertes.fr/hal-01762631

H. Ranchon, J. Cacheux, B. Reig, O. Liot, P. Teerapanich et al., Accelerated Transport of Particles in Confined Channels with a High Roughness Amplitude, Langmuir, vol.34, issue.4, pp.1394-1399, 2018.

M. D. Manrique-juarez, F. Mathieu, V. Shalabaeva, J. Cacheux, S. Rat et al., A Bistable Microelectromechanical System Actuated by Spin Crossover Molecules, Angewandte Chemie International Edition, vol.56, pp.8074-8078, 2017.
URL : https://hal.archives-ouvertes.fr/hal-01687804

P. Teerapanich, M. Pugnière, C. Henriquet, Y. Lin, C. Chou et al., Nanofluidic Fluorescence Microscopy (NFM) for real-time monitoring of protein binding kinetics and affinity studies, Biosensors & Bioelectronics, vol.88, pp.25-33, 2017.
URL : https://hal.archives-ouvertes.fr/hal-01964833

Y. He and T. Leïchlé, Fabrication of lateral porous silicon membranes for planar microfluidics by means of ion implantation, Sensors and Actuators B, vol.239, pp.628-634, 2017.
URL : https://hal.archives-ouvertes.fr/hal-01964834

M. D. Manrique-juarez, S. Rat, F. Mathieu, D. Saya, I. Séguy et al., Microelectromechanical systems integrating molecular spin crossover actuators, Applied Physics Letters, vol.109, p.61903, 2016.
URL : https://hal.archives-ouvertes.fr/hal-01687800

C. Lefter, S. Rat, J. Costa, M. D. Manrique-juárez, C. M. Quintero et al., Current switching coupled to molecular spin-states in large-area junctions, Advanced Materials, vol.28, issue.34, pp.7508-7514, 2016.
URL : https://hal.archives-ouvertes.fr/hal-01471630

Y. Lin, Y. Huang, P. Teerapanich, T. Leïchlé, and C. Chou, Multiplexed immunosensing and kinetics monitoring in nanofluidic devices with highly enhanced target capture efficiency, Biomicrofluidics, vol.10, p.34114, 2016.
URL : https://hal.archives-ouvertes.fr/hal-01964838

H. Ranchon, R. Malbec, V. Picot, A. Boutonnet, P. Teerapanich et al., DNA separation and enrichment using electro-hydrodynamic bidirectional flows in viscoelastic liquids, pp.1243-1253, 2016.
URL : https://hal.archives-ouvertes.fr/hal-01306024

A. Bhaswara, H. Keum, F. Mathieu, B. Legrand, S. Kim et al., A simple fabrication process based on micro-masonry for the realization of nanoplate resonators with integrated actuation and detection schemes, Frontiers in Mechanical Engineering, vol.2, pp.1-7, 2016.
URL : https://hal.archives-ouvertes.fr/hal-01960876

T. Leïchlé and C. Chou, Biofunctionalized nanoslits for wash-free and spatially resolved realtime sensing with full target capture, BMF Editor's pick, vol.9, p.34103, 2015.

T. Leïchlé and D. Bourrier, Integration of lateral porous silicon membranes into planar microfluidics, vol.15, pp.833-838, 2015.

M. T. Boudjiet, J. Bertrand, F. Mathieu, L. Nicu, L. Mazenq et al., Geometry optimization of uncoated silicon microcantilever-based gas density sensors, Sensors and Actuators B, vol.208, pp.600-607, 2015.
URL : https://hal.archives-ouvertes.fr/hal-01082346

A. Bhaswara, H. Keum, S. Rhee, B. Legrand, F. Mathieu et al., Fabrication of nanoplate resonating structures via micro-masonry, IOP Select -2014 Highlights, vol.24, p.115012, 2014.
URL : https://hal.archives-ouvertes.fr/hal-01687810

E. Descamps, N. Duroure, F. Deiss, T. Leichlé, C. Adam et al., Functionalization of optical nanotip arrays with and electrochemical microcantilever for multiplexed DNA detection, vol.13, pp.2956-2962, 2013.

S. Salomon, T. Leïchlé, D. Dezest, F. Seichepine, S. Guillon et al., Arrays of nanoelectromechanical biosensors functionalized by microcontact printing, Nanotechnology, vol.23, issue.49, p.495501, 2012.
URL : https://hal.archives-ouvertes.fr/hal-01767601

S. Guillon, S. Salomon, F. Seichepine, D. Dezest, F. Mathieu et al., Biological functionalization of massively parallel arrays of nanocantilevers using microcontact printing, Sensors and Actuators B, vol.161, issue.1, pp.1135-1138, 2012.
URL : https://hal.archives-ouvertes.fr/hal-01767603

T. Leïchlé, Y. Lin, P. Chiang, S. Hu, K. Liao et al., Biosensor-compatible encapsulation for pre-functionalized nanofluidic channels using asymmetric plasma treatment, Sensors and Actuators B, vol.161, issue.1, pp.805-810, 2012.

S. Salomon, T. Leïchlé, and L. Nicu, A dielectrophoretic continuous flow sorter using integrated microelectrodes coupled to a channel constriction, Electrophoresis, vol.32, pp.1508-1514, 2011.

V. Bardinal, B. Reig, T. Camps, C. Levallois, E. Daran et al., Spotted custom lenses to tailor the divergence of vertical-cavity surface-emitting lasers, IEEE Photonics Technology Letters, vol.22, issue.21, pp.1592-1594, 2010.
URL : https://hal.archives-ouvertes.fr/hal-00589356

Y. Roupioz, N. Berthet-duroure, T. Leïchlé, J. Pourciel, P. Mailley et al., Individual blood-cell capture and 2D organization on microarrays, Small, vol.5, issue.13, pp.1493-1497, 2009.
URL : https://hal.archives-ouvertes.fr/inserm-00369217

L. Nicu and T. Leïchlé, Biosensors and tools for surface functionalization from the macro-to the nanoscale: the way forward, Journal of Applied Physics, vol.104, p.111101, 2008.

T. Leïchlé, M. Lishchynska, F. Mathieu, J. Pourciel, D. Saya et al., A microcantileverbased picoliter droplet dispenser with integrated force sensors and electroassisted deposition means, Journal of Microelectromechanical Systems, vol.17, issue.5, pp.1239-1253, 2008.

N. Berthet-duroure, T. Leïchlé, J. Pourciel, C. Martin, J. Bausells et al., Interaction of biomolecules sequentially deposited at the same location using a microcantilever-based spotter, Biomedical Microdevices, vol.10, issue.4, pp.479-487, 2008.
URL : https://hal.archives-ouvertes.fr/hal-01848509

D. Saya, T. Leïchlé, J. Pourciel, F. Mathieu, C. Bergaud et al., Contact force control of piezoresistive cantilevers with in-plane nanotips for femtoliter droplet deposition, Microelectronic Engineering, vol.85, pp.1341-1345, 2008.

M. Lishchynska, T. Leïchlé, and L. Nicu, Semi-empirical model for longitudinal piezoresistive sensitivity of microcantilevers, Microelectronic Engineering, vol.85, pp.1321-1325, 2008.

C. Martin, A. Llobera, T. Leïchlé, G. Villanueva, A. Voigt et al., Novel methods to pattern polymers for microfluidics, Microelectronic Engineering, vol.85, pp.972-975, 2008.

M. Lishchynska, T. Leïchlé, and L. Nicu, FEM assisted calibration of a MEMS-based dispensing system with integrated piezoresistive force sensors, Journal of Micromechanics and Microengineering, vol.18, p.15010, 2008.

T. Leïchlé, L. Tanguy, and L. Nicu, Electrowetting-assisted drop deposition for controlled spotting, Applied Physics Letters, vol.91, p.224102, 2007.

E. Descamps, T. Leïchlé, B. Corso, S. Laurent, P. Mailley et al., Fabrication of oligonucleotide chips by using parallel cantilever-based electrochemical deposition in picoliter volumes, Advanced Materials, vol.19, issue.14, pp.1816-1821, 2007.

F. Vandevelde, T. Leïchlé, C. Ayela, C. Bergaud, L. Nicu et al., Direct patterning of molecularly imprinted microdot arrays for sensors and biochips, Langmuir, vol.23, issue.12, pp.6490-6493, 2007.
URL : https://hal.archives-ouvertes.fr/hal-00172754

V. Bardinal, E. Daran, T. Leïchlé, C. Vergnenègre, C. Levallois et al., Fabrication and characterization of microlens arrays using a cantilever-based spotter, Optics Express, vol.15, issue.11, pp.6900-6907, 2007.
URL : https://hal.archives-ouvertes.fr/hal-00490862

L. Tanguy, T. Leïchlé, and L. Nicu, Dynamic spreading of a liquid finger driven by electrowetting: theory and experimental validation, Journal of Applied Physics, vol.101, p.44907, 2007.

D. Saya, T. Leïchlé, J. Pourciel, C. Bergaud, and L. Nicu, Collective fabrication of an in-plane silicon nanotip for parallel femtoliter droplet deposition, Journal of Micromechanics and Microengineering, vol.17, issue.1, pp.1-5, 2007.

A. Valsesia, T. Leïchlé, L. Lacroix, L. Nicu, F. Bretagnol et al., Deposition of nanobead hexagonal crystals using silicon microcantilevers, Small, vol.2, issue.12, pp.1444-1447, 2006.

T. Leïchlé, D. Saya, J. Pourciel, F. Mathieu, L. Nicu et al., Liquid loading of siliconbased cantilevers using electrowetting actuation for microspotting applications, Sensors and Actuators A, vol.132, pp.590-596, 2006.

T. Leïchlé, L. Nicu, E. Descamps, B. Corso, P. Mailley et al., Copper electrodeposition localized in picoliter droplets using microcantilever arrays, Applied Physics Letters, vol.88, p.254108, 2006.

T. Leïchlé, M. Silvan, P. Belaubre, A. Valsesia, G. Ceccone et al., Nanostructuring surfaces with conjugated silica colloids deposited using silicon-based microcantilevers, Nanotechnology, vol.16, issue.4, pp.525-531, 2005.

T. C. Leïchlé, M. Arx, S. Reiman, I. Zana, W. Ye et al., A low-power resonant micromachined compass, Journal of Micromechanics and Microengineering, vol.14, issue.4, pp.462-470, 2004.

C. Internationales,

Y. He, D. Silva-de-vasconcellos, V. Bardinal, D. Bourrier, E. Imbernon et al., Lateral porous silicon interferometric transducer for sensing applications, IEEE Sensors, 2018.

P. Teerapanich, M. Pugnière, C. Henriquet, P. Joseph, C. Chou et al., Nanofluidic fluorescence microscopy with integrated concentration diluter for parallel kinetic assay, XIV Conference on Optical Chemical Sensors and Biosensors, pp.72-165, 2018.

Y. He, D. Silva-de-vasconcellos, V. Bardinal, D. Bourrier, E. Imbernon et al., Optical interferometry on lateral porous silicon, pp.8-9, 2018.

J. Cacheux, P. Cordelier, and T. Leichle, Towards circulating microRNA detection using fluorescence-based nanofluidic platform for the early diagnosis of pancreatic cancer, 49 st Meeting of European Pancreatic Club, p.15, 2017.
URL : https://hal.archives-ouvertes.fr/hal-01699252

J. Cacheux, M. Brut, A. Bancaud, P. Cordelier, and T. Leichlé, Rapid discrimination of singlenucleotide differences through spatial analysis of a nanofluidic-embedded biosensor, Proceeding of the 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS), pp.541-542, 2017.
URL : https://hal.archives-ouvertes.fr/hal-01699274

M. Manrique-juarez, S. Rat, L. Mazenq, F. Mathieu, I. Séguy et al., Spin crossover materials for MEMS actuation: Film integration and characterization, Proceedings of the 19th International Conference on Solid-State Sensors, Actuators and Microsystems, pp.1300-1303, 2017.
URL : https://hal.archives-ouvertes.fr/hal-01816366

D. Saya, D. Dezest, T. Leïchlé, F. Mathieu, L. Nicu et al., Fabrication and characterization of mechanical resonators integrating microcontact printed PZT films, Joint IEEE International Symposium on the Applications of Ferroelectric (ISAF)/International Workshop on Acoustic Transduction Materials and Devices (IWATMD)/Piezoresponse Force Microscopy (PFM), pp.89-92, 2017.
URL : https://hal.archives-ouvertes.fr/hal-01816372

Y. He, D. Bourrier, E. Imbernon, and T. Leïchlé, Lateral porous silicon membranes with size and charge selectivity, Proceedings of the 12 th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, p.4, 2017.

J. Cacheux, A. Bancaud, P. Cordelier, and T. Leichlé, Fast single-nucleotide polymorphism (SNP) discrimination using a fluorescence-based nanofluidic platform, Proceedings of the 20 th Annual European Conference on Micro & Nanoscale Technologies for the Life Science, pp.27-28, 2016.
URL : https://hal.archives-ouvertes.fr/hal-01857479

R. Malbec, P. Joseph, T. Leichlé, E. Trofimenko, L. Aeschbach et al., Enrichment, separation and characterization of CAG repeats for Huntington's disease diagnosis, Proceedings of the 20 th International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS), p.16313, 2016.

A. Bhaswaraa, H. Keum, F. Mathieu, B. Legrand, S. Kim et al., Micro-masonry for the simple fabrication of nanoplate resonators with integrated electrostatic transduction, Proceedings of the 42 nd International Conference on Micro-and Nano-Engineering (MNE2016), p.1, 2016.

P. Teerapanich, M. Pugnière, Y. L. Lin, C. F. Chou, and T. Leïchlé, A real-time affinity biosensor based on nanofluidic fluorescence microscopy for the determination of protein binding kinetics, Biosensors, 2016.

Y. He and T. Leïchlé, Lateral porous silicon membranes integrated to planar microfluidics for filtering applications, Proceedings of the 10 th Conference on Porous Semiconductors -Science and Technology (PSST 2016), pp.316-317, 2016.

C. Fuinel, K. Daffe, A. Laborde, O. Thomas, L. Mazenq et al., High-K thin films as dielectric transducers for flexural M/NEMS resonators, Proceedings of the 29 th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016), pp.4-16029, 2016.
URL : https://hal.archives-ouvertes.fr/hal-01279717

Y. He, D. Bourrier, E. Imbernon, A. Bhaswara, X. Dollat et al., Lateral porous silicon membranes with tunable pore size for on-chip separation, Proceedings of the 29 th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016), pp.4-497, 2016.

Y. He, D. Bourrier, and T. Leïchlé, Lateral porous silicon membranes fabricated within 2D microchannels through local ion implantation, Proceedings of the 41 st International Conference on Micro-and Nano-Engineering (MNE2015), p.15401, 2015.

A. Bhaswara, D. Dezest, L. Nicu, T. Leichle, and B. Legrand, Determination of the effective mass and stiffness of a micro resonator from a single optical characterization, Proceedings of the 18 th International Conference on Solid-State Sensors, Actuators and Microsystems, pp.2200-2203, 2015.
URL : https://hal.archives-ouvertes.fr/hal-01687809

D. Bourrier, Y. He, and T. Leichle, Porous silicon membranes integrated into planar microfluidics for on-chip sample filtration, Biosensors, 2014.

P. Teerapanich, M. Pugniere, Y. L. Lin, C. F. Chou, and T. Leichle, Determination of protein binding kinetics using a simple slit-like nanofluidic biosensor, Biosensors, 2014.

M. Boudjiet, J. Bertrand, L. Mazenq, T. Leïchlé, L. Nicu et al., Sensivity optimization of silicon microcantilever-based density sensor for hydrogen detection, 11 th Annual International Workshop on Nanomechanical Sensing, 2014.

P. Teerapanich, M. Pugniere, Y. L. Lin, C. F. Chou, and T. Leichle, Biofunctionalized nanoslits for fluorescence monitoring of protein binding kinetics, XII Conference on Optical Chemical Sensors and Biosensors, 2014.

H. Keum, Y. Zhang, D. Dezest, Z. Yang, F. Mathieu et al., Micro-Masonry for small batch processing of suspended MEMS structures, Workshop on Enabling Nanofabrication for Rapid Innovation, 2013.

S. Salomon, T. Leichlé, D. Dezest, F. Seichepine, and L. Nicu, A Modified Microcontact Printing Method for the Biofunctionalization of Nanocantilever Arrays, th International Conference on Materials for Advanced Technologies (ICMAT 2013), 2013.

L. Laplatine, L. Leroy, R. Calemczuk, Y. Roupioz, T. Leichlé et al., High resolution prismcoupled-SRPi for single cell studies, Nanobio Europe, p.108, 2013.

F. Dubosc, D. Bourrier, and T. Leïchlé, Fabrication of lateral porous silicon membranes for planar microfluidic devices, Procedia Engineering, vol.47, pp.801-804, 2012.

L. Nicu, T. Alava, T. Leïchlé, D. Saya, J. Pourciel et al., Integrative technology-based approach of microelectromechanical systems (MEMS) for biosensing applications, 34 th Annual International IEEE EMBC Conference of the IEEE Engineering in Medicine and Biology Society, 2012.
URL : https://hal.archives-ouvertes.fr/hal-00802629

S. Guillon, S. Salomon, F. Seichepine, D. Dezest, F. Mathieu et al., Single-Step, high-throughput biofunctionalization of nanoelectromechanical systems by means of nanocontact printing method, Proceedings of the 25 th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2012), pp.1348-1351, 2012.

Y. Lin, T. Leïchlé, and C. Chou, Nanofluidics-based antibody microarray for application of single cell immunoassay, Annual Meeting of the American-Society-for-Cell-Biology (ASCB), vol.2, 1935.

T. Leïchlé and C. Chou, Nanoslit biosensor with single-pixel resolved kinetics capability: finite element method and experimental results, Proceedings of the 16 th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers'11), pp.2263-2266, 2011.

T. Leïchlé and C. Chou, Real-time sensing with single-pixel resolved kinetics using roomtemperature bonded biofunctional nanoslits, Proceedings of the 6 th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, pp.729-732, 2011.

S. Salomon, T. Leïchlé, R. Fulcrand, D. Bourrier, A. Boukabache et al., A simple fabrication process for an efficient constriction-based dielectrophoretic continuous flow sorter, Proceedings of the 6 th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, pp.84-87, 2011.

S. Salomon, T. Leïchlé, R. Fulcrand, D. Bourrier, A. Boukabache et al., A simple fabrication process for an efficient constriction-based dielectrophoretic continuous flow sorter, The Second Conference on Advances in Microfluidics and Nanofluidics & Asia?Pacific International Symposium on Lab on Chip, 2011.

T. Leichlé, K. Liao, and C. Chou, Shortening the diffusion length: Real-time sensing with single-pixel resolved kinetics using room-temperature bonded biofunctional nanoslits, Proceedings of the 14 th International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS), pp.494-496, 2010.

L. Nicu, T. Alava, T. Leichle, D. Saya, J. Pourciel et al., Integrative technology-based approach of MEMS for biological applications, 2010.
URL : https://hal.archives-ouvertes.fr/hal-00865906

C. Ayela, H. Lalo, S. Guillon, T. Leichle, F. Vandevelde et al., Micro and nanopatterning tools to produce biomimetic chips based on molecularly imprinted polymers, MRS Fall Meeting, 2009.
URL : https://hal.archives-ouvertes.fr/hal-00493040

K. Liao, T. Leichle, C. Chou, and N. Swami, Ultrafast protein preconcentration by nanoscale molecular traps, Proceedings of the Conference on Advances in Microfluidics and Nanofluidics, pp.132-134, 2009.

T. Leïchlé, F. Mathieu, J. Pourciel, and L. Nicu, An electroassisted picoliter droplet dispenser, Proceedings of the 1 st International Workshop on Tip-based Nanofabrication (TBN 2008), p.3, 2008.

Y. Roupioz, T. Leïchlé, E. Descamps, P. Mailley, N. Duroure et al., Micro-electrochemical functionalization of biochips with pyrroles-modified molecular probes: a versatile route toward densely grafted microarrays, Biosensors, 2008.

C. Levallois, V. Bardinal, C. Vergnenègre, T. Leïchlé, T. Camps et al., VCSEL collimation using self-aligned integrated polymer microlenses, Proceedings of SPIE, Photonic Europe, vol.6992, 2008.
URL : https://hal.archives-ouvertes.fr/hal-00489082

M. Lishchynska, T. Leïchlé, and L. Nicu, Piezoresistive sensitivity of MEMS-based liquid dispensing system with built-in force sensors, Proceedings of the 33 rd International Conference on Micro-and Nano-Engineering (MNE'07), p.2, 2007.

C. Martin, A. Llobera, T. Leïchlé, G. Villanueva, A. Voigt et al., Novel methods to pattern polymers for microfluidics, Proceedings of the 33 rd International Conference on Micro-and Nano-Engineering (MNE'07), pp.3-5, 2007.

D. Saya, T. Leïchlé, J. Pourciel, F. Mathieu, C. Bergaud et al., Contact force control of piezoresistive cantilevers with in-plane nanotips for femtoliter droplet deposition, Proceedings of the 33 rd International Conference on Micro-and Nano-Engineering (MNE'07), pp.4-7, 2007.

T. Leïchlé, F. Mathieu, J. Pourciel, D. Saya, C. Bergaud et al., Bioplume: A MEMS-based femtoliter dispenser with electrospotting means for patterning surfaces at the micro-and the nanometer scales, MRS 2007, Spring Meeting, 2007.

E. Descamps, P. Mailley, T. Livache, K. Nguyen, A. Filoramo et al., Pyrrole nano-electrochemistry: from fabrication of ODN chip to the generation of ODN scaffolds, XIX th International Symposium on Bioelectrochemistry and Bioenergetics, 2007.

N. Berthet, T. Leïchlé, E. Trévisiol, J. Pourciel, D. Saya et al., Spot-in-spot" hybridization of oligonucleotides deposited on a glass slide by a microcantileverbased device, Proceedings of the 10 th International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS), pp.1217-1219, 2006.

T. Leïchlé, E. Descamps, B. Corso, S. Laurent, P. Mailley et al., MEMS-based picoliter electrochemical cell array for the fabrication of oligonucleotide chips, Proceedings of the 10 th International Conference on Miniaturized Systems for Chemistry and Life Sciences (µTAS), pp.774-776, 2006.

D. Saya, T. Leïchlé, J. Pourciel, C. Bergaud, and L. Nicu, Collective fabrication of in-plane silicon nanotip for parallel femtoliter droplet deposition, Proceedings of the 32 nd International Conference on Micro-and Nano-Engineering (MNE'06), pp.47-48, 2006.

P. Mailley, E. Descamps, E. Fortin, S. Szunerits, T. Livache et al., Substrate microstructuration by biologically functionnalised conducting polymers using localised electrochemical methods, 4 th International Workshop on Scanning Electrochemical Microscopy (SECM), 2006.

E. Descamps, T. Leïchlé, L. Nicu, C. Bergaud, T. Livache et al., Microarrays' fabrication using electrochemical femtocell, 11 th International Conference on Electroanalysis (ESEAC 2006), 2006.

C. Ayela, T. Leïchlé, C. Bergaud, E. Cattan, C. Soyer et al., High quality factors of silicon membranes with piezoelectric actuation and detection scheme for biosensing purpose in liquid media, Proceedings of the IEEE International Frequency Control Symposium and Exposition, vol.1, pp.123-128, 2006.
URL : https://hal.archives-ouvertes.fr/hal-00147730

L. Tanguy, T. Leïchlé, and L. Nicu, Theoretical considerations for continuous electrowetting in Ushaped channels, 5 th International Meeting on Electrowetting, 2006.

C. Bergaud, T. Leïchlé, D. Saya, L. Nicu, ;. Icem et al., Cantilever-based patterning methods: application to surface patterning from the micro to nanometer scale, 2006.

V. Bardinal, E. Daran, C. Vergnenègre, T. Leïchlé, Y. Segui et al., Design and fabrication of polymer microlenses arrays for VCSELs using a cantilever-based microsystem, Proceedings of SPIE, vol.6185, p.618510, 2006.

T. Leïchlé, D. Saya, J. Pourciel, F. Mathieu, C. Bergaud et al., A closed-loop MEMSbased spotter integrating position sensors with nanometric precision for the control of droplet uniformity, Proceedings of the 1 st IEEE International Conference on Nano/Micro Engineered and Molecular Systems, pp.730-733, 2006.

P. Belaubre, J. Pourciel, D. Saya, T. Leïchlé, F. Mathieu et al., First step towards a fully automated trim control for liquid deposition device at the microscale using piezoresistive cantilevers row, Proceedings of the 13 th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers'05), vol.1, pp.648-651, 2005.

T. Leïchlé, D. Saya, P. Belaubre, J. Pourciel, F. Mathieu et al., Liquid loading of silicon-based cantilevers using electrowetting actuation for microspotting applications, Proceedings of the 13 th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers'05), vol.1, pp.135-138, 2005.

T. C. Leïchlé, W. Ye, and M. G. Allen, A sub-µW micromachined magnetic compass, Proceedings of the 16 th IEEE International Conference on Micro Electro Mechanical Systems (MEMS'03), pp.514-517, 2003.

T. C. Leïchlé, M. Arx, and M. G. Allen, A micromachined resonant magnetic field sensor, Proceedings of the 14 th IEEE International Conference on Micro Electro Mechanical Systems (MEMS'01), pp.274-277, 2001.

T. C. Leïchlé, M. Arx, and M. G. Allen, Late News Poster Session, Supplemental Digest of the Solid-State Sensor and Actuator Workshop, pp.19-20, 2000.

C. Invités,

T. Leïchlé, Real-time monitoring of protein binding kinetics using a fluorescence-based nanofluidic immunosensor, Synergy Microfluidics & Biology SYMiBio Workshop, 2016.

L. Nicu and T. Leïchlé, Nanoelectromechanical systems for biology: where to go from now?, Proceedings of the 2012 International Semiconductor Conference, vol.1, pp.51-56, 2012.

T. Leïchlé, NanoElectroMechanical Systems for Biosensing Applications, International Conference and Exhibition on Integration Issues of Muniaturized Systems, 2012.

P. Cordelier and T. Leïchlé, Circulating microRNA detection using fluorescence-based nanofluidic platform for the management of pancreatic cancer, Microscale Affairs Conference Series, 2018.

T. Leichle, Challenges inherent to the miniaturization of resonant microelectromechanical biosensors, Congrès Biotrace, 9 ème édition, Les biocateurs: Défis technologiques pour le diagnostic de demain, 2014.

T. Leïchlé and L. Nicu, Electromechanical Biosensors: from MEMS to NEMS, LiMMS Workshop, Beyond Frontiers of Nanoscience and Biosystems, 2013.

C. Livre and . De-livre,

T. Leïchlé, Porous Silicon and Microfluidics, 2016.

L. Nicu and T. Leïchlé, Micro-and Nanoelectromechanical Biosensors, pp.978-979, 2014.

. Brevets,

P. Moritz, L. Lacroix, G. Viau, and T. Leichle, Procédé de fabrication d'un aimant permanent, 2018.

C. F. Chou, T. Leichle, Y. L. Lin, and P. Teerapanich, Sensing device, and sensing system and sensing method using the same, US Patent # 20150346104, 2018.

H. Ranchon, A. Bancaud, P. Teerapanich, and T. Leichle, Method and device for concentrating molecules or objects dissolved in solution, US Patent App. 15500508, EP App. 319495A1, JP App. 2017529522A, WO App. 2016016470A9, p.1457544, 2015.

G. Mark, T. C. Allen, and . Leïchlé, System and method for providing a resonant micro-compass, US Patent #, vol.6, p.652, 2002.

P. Teerapanich, M. Pugnière, C. Henriquet, Y. Lin, C. Chou et al., Nanofluidic Fluorescence Microscopy (NFM) for real-time monitoring of protein binding kinetics and affinity studies, Biosensors & Bioelectronics, vol.88, pp.25-33, 2017.
URL : https://hal.archives-ouvertes.fr/hal-01964833

P. Teerapanich, M. Pugnière, C. Henriquet, Y. Lin, A. Naillon et al., Nanofluidic fluorescence microscopy with integrated concentration gradient generation for one-shot parallel kinetic assays, Sensors and Actuators B, vol.274, pp.338-342, 2018.
URL : https://hal.archives-ouvertes.fr/hal-01964831

J. Cacheux, M. Brut, A. Bancaud, P. Cordelier, and T. Leïchlé, Spatial Analysis of Nanofluidic-Embedded Biosensors for Wash-Free Single-Nucleotide Difference Discrimination, ACS Sensors, vol.3, issue.3, pp.606-611, 2018.
URL : https://hal.archives-ouvertes.fr/hal-01762631

T. Leïchlé and D. Bourrier, Integration of lateral porous silicon membranes into planar microfluidics, vol.15, pp.833-838, 2015.

Y. He and T. Leïchlé, Fabrication of lateral porous silicon membranes for planar microfluidics by means of ion implantation, Sensors and Actuators B, vol.239, pp.628-634, 2017.
URL : https://hal.archives-ouvertes.fr/hal-01964834

A. Bhaswara, H. Keum, S. Rhee, B. Legrand, F. Mathieu et al., Fabrication of nanoplate resonating structures via micro-masonry, IOP Select -2014 Highlights, vol.24, p.115012, 2014.
URL : https://hal.archives-ouvertes.fr/hal-01687810

A. Bhaswara, H. Keum, F. Mathieu, B. Legrand, S. Kim et al., A simple fabrication process based on micro-masonry for the realization of nanoplate resonators with integrated actuation and detection schemes, Frontiers in Mechanical Engineering, vol.2, pp.1-7, 2016.
URL : https://hal.archives-ouvertes.fr/hal-01960876

S. Salomon, T. Leïchlé, D. Dezest, F. Seichepine, S. Guillon et al., Arrays of nanoelectromechanical biosensors functionalized by microcontact printing, Nanotechnology, vol.23, issue.49, p.495501, 2012.
URL : https://hal.archives-ouvertes.fr/hal-01767601

D. Dezest, T. Leichle, P. Teerapanich, F. Mathieu, J. Bui et al., Multiplexed functionalization of nanoelectromechanical systems with photopatterned molecularly imprinted polymers, Journal of Micromechanics and Microengineering, 2018.
URL : https://hal.archives-ouvertes.fr/hal-02392367