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Intégration de dispositifs passifs 3D compacts et performants. Application à la réalisation d'une matrice de Butler 4x4 en bande Ka

Audrey Cayron 1
1 LAAS-MOST - Équipe Microondes et Opto-microondes pour Systèmes de Télécommunications
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : The complexity of embedded RF systems in consumer wireless applications is increasing, and requires to improve the integration of RF and microwave passive circuits. New solutions that offer more compactness and performance have to be developed, while maintaining a low manufacturing cost. Among Integrated Passive Devices (IPD) technologies, a 3 D technology has been developed at the LAAS CNRS and by 3DiS Technologies for several years. Results demonstrate that the manufactured solenoids exhibit high compactness and high-performance. This PhD thesis aims to develop the integration process of capacitors in order to evolve the technology towards the fabrication of complex passive RF functions. The manuscript is divided into three chapters. The first chapter reviews the technological processes that enable the manufacture of RF systems and highlights the challenges for integrating high-performance passive components. It also presents the advantages of a low-cost 3-D integration solution such as the one proposed. In the second chapter, we present the development of Metal Insulator Metal (MIM) capacitors. The characterization result show that capacitors present performances equivalent to those identified in the literature with high quality factors. We then manufacture two transformers matched to 50 Ω using capacitors. The technological process is described. The manufactured and measured circuits show that transmission losses are close to those obtained at the maximum available gain of the transformers. These results confirm the good performance of the developed capacitors since they introduce minimal losses for the manufactured circuits. No technological problems are encountered during the manufacturing of the two transformers, which validates the complete technological process for the integration of capacitors and solenoid. Based on these results, we present in the last chapter the development of a 4×4 Butler matrix dedicated to 5G beamforming applications. In a large bandwidth ranging from 24 GHz to 29 GHz, insertion losses for the four outputs of the matrix are under 3.5 dB and the phase difference between the outputs are reached with a deviation of less than 16°. The measured results are at the state of the art and overcome those of the existing IPD solutions, in particular for the occupied aera that does not exceed 0.84 mm2. These performances allow us to conclude on the potential of 3-D IPD technology to achieve an excellent compromise between integration density and performance.
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Submitted on : Monday, January 25, 2021 - 9:10:34 AM
Last modification on : Thursday, June 10, 2021 - 3:02:17 AM


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  • HAL Id : tel-03186003, version 2


Audrey Cayron. Intégration de dispositifs passifs 3D compacts et performants. Application à la réalisation d'une matrice de Butler 4x4 en bande Ka. Micro et nanotechnologies/Microélectronique. Institut national des sciences appliquées de Toulouse, 2020. Français. ⟨NNT : 2020ISAT0006⟩. ⟨tel-03186003v2⟩



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