Nanostructure Computational electromagnetic methods AFM Rare-earth ions Cathodoluminescence Atom probe tomography Infrared absorption Nanostructured materials Lifetime RF magnetron sputtering Si-rich silicon oxide Energy transfer Silicon photonics Reactive magnetron sputtering GENOMIQUE Irradiation Couches minces Rare-earth-doped materials Fluorescence Photoluminescence Rare earth Pulvérisation magnétron radiofréquence Thin film Oxygen vacancies High-k dielectrics Optical amplifiers Neodymium Hillocks Grazing incidence X-ray diffraction Raman scattering Cerium SiC Pulvérisation cathodique Rare-earth- doped materials Multilayers Waveguides Structural properties Magnetron sputtering Electroluminescence Hafnium silicates Microstructure physique M-lines Si nanocluster Terres rares Raman Down-conversion Silicon nanocrystals Laser pyrolysis Nanoparticules Rare-earth Microstructure physics Feature erasure Conductivity Liposomes CoMoS CO adsorption Guide d'onde Hafnium silicate Oxide interface PZT HR STEM-HAADF Films Erbium Semiconductors Silicon nitride Nanostructuring Refractive index Electron paramagnetic resonance Nanoparticles XRD Al2O3 Thin films Resistive Switching Couches minces semi-conductrices Silicon Photovoltaic Rare earths Nanostructures MoS2 ADE-FDTD Citric acid Silicon nanoclusters Oxide materials Epitaxy Doping Friction Phase transition Crystal structure Radiofrequency magnetron sputtering Matériaux hybrides IR spectroscopy Waveguide Luminescence Microstructure FTIR Sputtering Terbium Quantum-well Oxides Silicium