3-axis high Q MEMS accelerometer with simultaneous damping control

Abstract : The increasing demand of consumer market sensors involves a continuous development for the die size, cost and performances. In this context, the integration of both a 3-axis MEMS accelerometer and a gyroscope within the same low pressure cavity becomes attractive. Such a packaging results in MEMS with high quality factor Q, which reduces Brownian noise, thereby improving the achievable precision. However, contrary to gyroscopes, in such a configuration, the MEMS accelerometers need to be damped prior to measurement. Therefore, this paper presents a new damping control architecture for such high Q capacitive accelerometers. Damping is ensured by inserting electrostatic force feedback (EFF) phases between measurement phases. By simultaneously damping 3 axis of acceleration, the transducer settling time is improved. Model simulations results prove damping efficiency and figure out a tradeoff between system sampling frequency and circuit complexity.
Document type :
Conference papers
New Circuits and Systems Conference (NEWCAS), 2016 14th IEEE International, Jun 2016, Vancouver, Canada. New Circuits and Systems Conference (NEWCAS), 2016 14th IEEE International, pp.1 - 4, 2016, 〈10.1109/NEWCAS.2016.7604787〉
Liste complète des métadonnées

https://hal.laas.fr/hal-01488286
Contributor : Lavinia Ciotirca <>
Submitted on : Monday, March 13, 2017 - 2:53:38 PM
Last modification on : Thursday, January 11, 2018 - 2:05:03 AM
Document(s) archivé(s) le : Wednesday, June 14, 2017 - 1:59:49 PM

File

NEWCAS'16_paperID4114_Ciotirca...
Files produced by the author(s)

Identifiers

Citation

Lavinia Ciotîrcă, Olivier Bernal, Hélène Tap, Jérôme Enjalbert, Thierry Cassagnes. 3-axis high Q MEMS accelerometer with simultaneous damping control. New Circuits and Systems Conference (NEWCAS), 2016 14th IEEE International, Jun 2016, Vancouver, Canada. New Circuits and Systems Conference (NEWCAS), 2016 14th IEEE International, pp.1 - 4, 2016, 〈10.1109/NEWCAS.2016.7604787〉. 〈hal-01488286〉

Share

Metrics

Record views

70

Files downloads

70