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3-axis high Q MEMS accelerometer with simultaneous damping control

Abstract : The increasing demand of consumer market sensors involves a continuous development for the die size, cost and performances. In this context, the integration of both a 3-axis MEMS accelerometer and a gyroscope within the same low pressure cavity becomes attractive. Such a packaging results in MEMS with high quality factor Q, which reduces Brownian noise, thereby improving the achievable precision. However, contrary to gyroscopes, in such a configuration, the MEMS accelerometers need to be damped prior to measurement. Therefore, this paper presents a new damping control architecture for such high Q capacitive accelerometers. Damping is ensured by inserting electrostatic force feedback (EFF) phases between measurement phases. By simultaneously damping 3 axis of acceleration, the transducer settling time is improved. Model simulations results prove damping efficiency and figure out a tradeoff between system sampling frequency and circuit complexity.
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Contributor : Lavinia Ciotirca <>
Submitted on : Monday, March 13, 2017 - 2:53:38 PM
Last modification on : Thursday, June 10, 2021 - 3:03:06 AM
Long-term archiving on: : Wednesday, June 14, 2017 - 1:59:49 PM


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Lavinia Ciotîrcă, Olivier Bernal, Hélène Tap, Jérôme Enjalbert, Thierry Cassagnes. 3-axis high Q MEMS accelerometer with simultaneous damping control. New Circuits and Systems Conference (NEWCAS), 2016 14th IEEE International, Jun 2016, Vancouver, Canada. pp.1 - 4, ⟨10.1109/NEWCAS.2016.7604787⟩. ⟨hal-01488286⟩



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