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Nanoimprint lithography as a new tool for cavity-resonator-integrated guided-mode resonance fabrication

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https://hal.laas.fr/hal-01943218
Contributor : Olivier Gauthier-Lafaye <>
Submitted on : Monday, December 3, 2018 - 4:30:55 PM
Last modification on : Thursday, June 10, 2021 - 3:06:01 AM

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  • HAL Id : hal-01943218, version 1

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Sylvain Augé, Sylvain Pelloquin, Amandine Lestras, Jean-Baptiste Doucet, Emmanuelle Daran, et al.. Nanoimprint lithography as a new tool for cavity-resonator-integrated guided-mode resonance fabrication. International Conference on Micro and Nano Engineering (MNE2016), Sep 2016, Vienne, Austria. ⟨hal-01943218⟩

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