Nanoimprint lithography as a new tool for cavity-resonator-integrated guided-mode resonance fabrication

Engineering Sciences [physics] Micro and nanotechnologies/Microelectronics Engineering Sciences [physics] Electromagnetism Engineering Sciences [physics] Optics / Photonic

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Submitted on : Monday, December 3, 2018-4:30:55 PM

Last modification on : Friday, March 3, 2023-3:40:45 AM

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hal-01943218 , version 1 (03-12-2018)

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HAL Id : hal-01943218 , version 1

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Sylvain Augé, Sylvain Pelloquin, Amandine Lestras, Jean-Baptiste Doucet, Emmanuelle Daran, et al.. Nanoimprint lithography as a new tool for cavity-resonator-integrated guided-mode resonance fabrication. International Conference on Micro and Nano Engineering (MNE2016), Sep 2016, Vienne, Austria. ⟨hal-01943218⟩

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