Skip to Main content Skip to Navigation
Journal articles

Characteristics of zirconium and niobium contacts on boron-doped diamond

Abstract : Formation of ohmic contacts on boron-doped diamond using zirconium and niobium has been studied in comparison to the commonly used titanium or tantalum contacts. Metal contacts were fabricated using standard micro-fabrication technologies on epitaxial layers with different boron concentrations. Room temperature specific contact resistance was determined using the circular Transmission Line Model after annealing at various temperatures. The specific contact resistance varies considerably with boron concentration and annealing temperature. Zirconium and niobium form ohmic contacts on highly boron-doped diamond after high-temperature annealing with a specific contact resistance comparable to that of titanium and tantalum contacts. Furthermore, we observed zirconium contacts showed better thermal stability upon high-temperature annealing compared to titanium and other metal contacts. These results emphasize the potential of zirconium for the formation of ohmic contacts on boron-doped diamond.
Complete list of metadata

Cited literature [48 references]  Display  Hide  Download
Contributor : David Trémouilles <>
Submitted on : Monday, February 11, 2019 - 5:14:58 PM
Last modification on : Wednesday, June 9, 2021 - 10:00:21 AM
Long-term archiving on: : Sunday, May 12, 2019 - 12:41:48 PM


DRM_2017_DTremouilles (1).pdf
Files produced by the author(s)



M. Davydova, A. Taylor, P. Hubík, L. Fekete, L. Klimša, et al.. Characteristics of zirconium and niobium contacts on boron-doped diamond. Diamond and Related Materials, Elsevier, 2018, 83, pp.184-189. ⟨10.1016/j.diamond.2018.02.009⟩. ⟨hal-01956850⟩



Record views


Files downloads