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A Simple Fabrication Process Based on Micro-masonry for the Realization of Nanoplate Resonators with Integrated Actuation and Detection Schemes

Abstract : In this work, we use the micro-masonry technique to fabricate nanoplate resonators with integrated electrostatic actuation and capacitive detection in a few steps. Our approach is an alternative solution to the current fabrication methods used to create membranes and plates that usually rely on the selective etching of a sacrificial layer. Highly doped silicon plates were transfer printed using microtip elastomeric stamps onto insulated bases displaying cavities in order to form suspended structures with airtight gaps. By post-processing adequate interconnections, the fabricated resonators were actuated and their resonant frequency measured in a fully integrated manner. The tested nanoplate devices behave as predicted by theory and offer quality factors of more than 30 in air.
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https://hal.laas.fr/hal-01960876
Contributor : Bernard Legrand <>
Submitted on : Wednesday, December 19, 2018 - 3:57:00 PM
Last modification on : Friday, January 24, 2020 - 10:52:04 AM

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Adhitya Bhaswara, Hohyun Keum, Fabrice Mathieu, Bernard Legrand, Seok Kim, et al.. A Simple Fabrication Process Based on Micro-masonry for the Realization of Nanoplate Resonators with Integrated Actuation and Detection Schemes. Frontiers of Mechanical Engineering in China, Springer Verlag, 2016, 2 (1), ⟨10.3389/fmech.2016.00001⟩. ⟨hal-01960876⟩

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