Characterization of sub-10nm-scale capacitors and tunnel junctions by SMM coupled to RF interferometry - LAAS - Laboratoire d'Analyse et d'Architecture des Systèmes Access content directly
Conference Papers Year : 2014

Characterization of sub-10nm-scale capacitors and tunnel junctions by SMM coupled to RF interferometry

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Micro and nanotechnologies/Microelectronics

Bernard Legrand  : Connect in order to contact the contributor

https://hal.laas.fr/hal-01962209

Submitted on : Thursday, December 20, 2018-2:35:01 PM

Last modification on : Monday, April 17, 2023-6:32:11 PM

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hal-01962209 , version 1 (20-12-2018)

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  • HAL Id : hal-01962209 , version 1

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Fei Wang, Damien Ducatteau, David Troadec, Hassan Tanbakuchi, Bernard Legrand, et al.. Characterization of sub-10nm-scale capacitors and tunnel junctions by SMM coupled to RF interferometry. European Conference on Electrical Measurements at the Nanoscale Using AFM, Jun 2014, Cambridge, United Kingdom. ⟨hal-01962209⟩

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UNIV-TLSE2 CNRS UNIV-VALENCIENNES INSA-TOULOUSE LAAS IEMN UT1-CAPITOLE LAAS-MICRO-NANO-BIO-TECHNOLOGIES LAAS-MEMS UNIV-LILLE INSA-GROUPE TOULOUSE-INP UNIV-UT3 UT3-TOULOUSEINP
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