Driving and sensing M/NEMS flexural vibration using dielectric transduction

Cécile Fuinel 1 Fabrice Mathieu 2 Bernard Legrand 1
1 LAAS-MEMS - Équipe Microsystèmes électromécaniques
LAAS - Laboratoire d'analyse et d'architecture des systèmes
2 LAAS-I2C - Service Instrumentation Conception Caractérisation
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : We show that nanometer-scale dielectric thin films can act as efficient electromechanical transducers to simultaneously drive and sense the vibration of the first flexural mode of micro/nano-cantilevers. Here, 16 μm-long, 5 μm-wide and 350 nm-thick cantilevers are actuated by a 15 nm-thick silicon nitride layer, and electrically detected by charge measurement at megahertz frequencies. The displacement was also checked by optical interferometry, and the electromechanical transduction efficiency is extracted and compared to an analytical modelling.
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https://hal.laas.fr/hal-01962981
Contributor : Bernard Legrand <>
Submitted on : Friday, December 21, 2018 - 8:59:11 AM
Last modification on : Friday, January 10, 2020 - 9:10:19 PM

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  • HAL Id : hal-01962981, version 1

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Cécile Fuinel, Fabrice Mathieu, Bernard Legrand. Driving and sensing M/NEMS flexural vibration using dielectric transduction. 31st International Conference EUROSENSORS, EUROSENSORS 2017, Sep 2017, Paris, France. ⟨hal-01962981⟩

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