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Implementation of Integrated VCSEL-Based Optical Feedback Interferometry Microfluidic Sensor System with Polymer Microoptics

Yu Zhao 1 Qingyue Li Jean-Baptiste Doucet 2 Pierre-François Calmon 2 Fabien Mesnilgrente 2 Benjamin Reig 2 Clément Tronche 3 Thierry Camps 4 Julien Perchoux 1 Véronique Bardinal 4
1 LAAS-OSE - Équipe Optoélectronique pour les Systèmes Embarqués
LAAS - Laboratoire d'analyse et d'architecture des systèmes
2 LAAS-TEAM - Service Techniques et Équipements Appliqués à la Microélectronique
LAAS - Laboratoire d'analyse et d'architecture des systèmes
3 LAAS-I2C - Service Instrumentation Conception Caractérisation
LAAS - Laboratoire d'analyse et d'architecture des systèmes
4 LAAS-MICA - Équipe MICrosystèmes d'Analyse
LAAS - Laboratoire d'analyse et d'architecture des systèmes
Abstract : Using the optical feedback interferometry (OFI) technique, we demonstrated a miniaturized and compact sensor system based on a dedicated optical source for flowmetry at the micro-scale. In the system, polymer microlenses were integrated directly on a VCSEL (vertical-cavity surface-emitting laser) chip and the microfluidic channel chip surface using polymer-based micro-fabrication technologies. In particular, at a post-process stage, we integrated a collimation lens on a VCSEL chip of small dimensions (200 µm × 200 µm × 150 µm). This process was enabled by the soft-printing of dry thick resist films and through direct laser writing technology. We performed flow rate measurements using this new compact system, with a conventional bulk glass lens configuration for system performance evaluation. A maximum 33 dB signal-to-noise ratio was achieved from this novel ultra-compact system. To our knowledge, this is the highest signal level achieved by existing OFI based flowmetry sensors.
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Yu Zhao, Qingyue Li, Jean-Baptiste Doucet, Pierre-François Calmon, Fabien Mesnilgrente, et al.. Implementation of Integrated VCSEL-Based Optical Feedback Interferometry Microfluidic Sensor System with Polymer Microoptics. Applied Sciences, MDPI, 2019, 9 (24), pp.5484. ⟨10.3390/app9245484⟩. ⟨hal-02429139⟩

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